JPS5325381A - Semiconductor device having multilayer wiring structure - Google Patents

Semiconductor device having multilayer wiring structure

Info

Publication number
JPS5325381A
JPS5325381A JP9970676A JP9970676A JPS5325381A JP S5325381 A JPS5325381 A JP S5325381A JP 9970676 A JP9970676 A JP 9970676A JP 9970676 A JP9970676 A JP 9970676A JP S5325381 A JPS5325381 A JP S5325381A
Authority
JP
Japan
Prior art keywords
semiconductor device
multilayer wiring
wiring structure
insulator
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9970676A
Other languages
Japanese (ja)
Inventor
Masao Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9970676A priority Critical patent/JPS5325381A/en
Publication of JPS5325381A publication Critical patent/JPS5325381A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain a multilayer circuit structure free of breakage of the wiring layers, by using a lamination of successively piled layers of thermosetting Si oxide applicable by coating, insulator formed by deposition, and coated insulator, as the interlayer insulating films.
COPYRIGHT: (C)1978,JPO&Japio
JP9970676A 1976-08-23 1976-08-23 Semiconductor device having multilayer wiring structure Pending JPS5325381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9970676A JPS5325381A (en) 1976-08-23 1976-08-23 Semiconductor device having multilayer wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9970676A JPS5325381A (en) 1976-08-23 1976-08-23 Semiconductor device having multilayer wiring structure

Publications (1)

Publication Number Publication Date
JPS5325381A true JPS5325381A (en) 1978-03-09

Family

ID=14254496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9970676A Pending JPS5325381A (en) 1976-08-23 1976-08-23 Semiconductor device having multilayer wiring structure

Country Status (1)

Country Link
JP (1) JPS5325381A (en)

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