JPS5325381A - Semiconductor device having multilayer wiring structure - Google Patents
Semiconductor device having multilayer wiring structureInfo
- Publication number
- JPS5325381A JPS5325381A JP9970676A JP9970676A JPS5325381A JP S5325381 A JPS5325381 A JP S5325381A JP 9970676 A JP9970676 A JP 9970676A JP 9970676 A JP9970676 A JP 9970676A JP S5325381 A JPS5325381 A JP S5325381A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- multilayer wiring
- wiring structure
- insulator
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain a multilayer circuit structure free of breakage of the wiring layers, by using a lamination of successively piled layers of thermosetting Si oxide applicable by coating, insulator formed by deposition, and coated insulator, as the interlayer insulating films.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9970676A JPS5325381A (en) | 1976-08-23 | 1976-08-23 | Semiconductor device having multilayer wiring structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9970676A JPS5325381A (en) | 1976-08-23 | 1976-08-23 | Semiconductor device having multilayer wiring structure |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5325381A true JPS5325381A (en) | 1978-03-09 |
Family
ID=14254496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9970676A Pending JPS5325381A (en) | 1976-08-23 | 1976-08-23 | Semiconductor device having multilayer wiring structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5325381A (en) |
-
1976
- 1976-08-23 JP JP9970676A patent/JPS5325381A/en active Pending
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