JPS57195754A - Continuous vacuum treatment apparatus - Google Patents
Continuous vacuum treatment apparatusInfo
- Publication number
- JPS57195754A JPS57195754A JP8236081A JP8236081A JPS57195754A JP S57195754 A JPS57195754 A JP S57195754A JP 8236081 A JP8236081 A JP 8236081A JP 8236081 A JP8236081 A JP 8236081A JP S57195754 A JPS57195754 A JP S57195754A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum treatment
- treatment
- sealing mechanism
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To provide effective industrial means by the titled apparatus for performing a plasma treatment, sputtering treatment, etc. on a plastics, wherein respective vacuum treatment tanks can conduct independently different treatments on a workpiece, for example, formation of a plurality of different layers on the object surface, by arranging a plurality of vacuum treatment tanks with a sealing mechanism therebetween for intercepting them.
CONSTITUTION: The continuous vacuum treatment apparatus is composed of vacuum treatment tanks 101, 102 for continuously performing a plasma treatment, etc. on a flexible workpiece F under a vacuum, the sealing mechanism 4 for intercepting them, and preliminary vacuum chambers 2, 3 positioned respectively before and after them. In an embodiment, a vinyl chloride resin film (the workpiece F) is delivered from a payoff 8 to the preliminary vacuum chamber 2 into the vacuum treatment tank 101 where it is exposed to an atmosphere containing argon, then is passed via the sealing mechanism 4 into the vacuum treatment tank 102 where it is subjected again to another plasma treatment in the presence of an organic gas such as an amine monomer. Thereafter it is wound onto a winder 9 positioned downstream.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8236081A JPS57195754A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8236081A JPS57195754A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57195754A true JPS57195754A (en) | 1982-12-01 |
JPH0153294B2 JPH0153294B2 (en) | 1989-11-13 |
Family
ID=13772406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8236081A Granted JPS57195754A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57195754A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60224780A (en) * | 1984-04-20 | 1985-11-09 | Kuraray Co Ltd | Sealing device in continuous vacuum treating device for sheet-shaped material |
JPS6112867A (en) * | 1984-06-27 | 1986-01-21 | Hitachi Ltd | Roll type sealing device |
US4763601A (en) * | 1987-09-02 | 1988-08-16 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
KR100880352B1 (en) | 2007-06-01 | 2009-01-23 | (주) 에이알티 | Flexible film sputter system having film pass port for inflow prevention of gas |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50161475A (en) * | 1974-06-20 | 1975-12-27 | ||
JPS5730733A (en) * | 1980-07-30 | 1982-02-19 | Shin Etsu Chem Co Ltd | Device for continuous plasma treatment |
JPS5773025A (en) * | 1980-10-27 | 1982-05-07 | Shin Etsu Chem Co Ltd | Apparatus for continuous vacuum treatment |
-
1981
- 1981-05-29 JP JP8236081A patent/JPS57195754A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50161475A (en) * | 1974-06-20 | 1975-12-27 | ||
JPS5730733A (en) * | 1980-07-30 | 1982-02-19 | Shin Etsu Chem Co Ltd | Device for continuous plasma treatment |
JPS5773025A (en) * | 1980-10-27 | 1982-05-07 | Shin Etsu Chem Co Ltd | Apparatus for continuous vacuum treatment |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60224780A (en) * | 1984-04-20 | 1985-11-09 | Kuraray Co Ltd | Sealing device in continuous vacuum treating device for sheet-shaped material |
JPS6112867A (en) * | 1984-06-27 | 1986-01-21 | Hitachi Ltd | Roll type sealing device |
US4763601A (en) * | 1987-09-02 | 1988-08-16 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
EP0305573B1 (en) * | 1987-09-03 | 1993-07-28 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
KR100880352B1 (en) | 2007-06-01 | 2009-01-23 | (주) 에이알티 | Flexible film sputter system having film pass port for inflow prevention of gas |
Also Published As
Publication number | Publication date |
---|---|
JPH0153294B2 (en) | 1989-11-13 |
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