JPS60224780A - Sealing device in continuous vacuum treating device for sheet-shaped material - Google Patents
Sealing device in continuous vacuum treating device for sheet-shaped materialInfo
- Publication number
- JPS60224780A JPS60224780A JP59080983A JP8098384A JPS60224780A JP S60224780 A JPS60224780 A JP S60224780A JP 59080983 A JP59080983 A JP 59080983A JP 8098384 A JP8098384 A JP 8098384A JP S60224780 A JPS60224780 A JP S60224780A
- Authority
- JP
- Japan
- Prior art keywords
- roller
- sheet
- casing
- sealing
- rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Advancing Webs (AREA)
- Sealing With Elastic Sealing Lips (AREA)
- Sealing Devices (AREA)
Abstract
Description
【発明の詳細な説明】
Ａ 本発明の技術分野
本発明は可とう性の被処理物質、例えばフィルム、布帛
、プラスチック成形品的のシート状物を真空処理槽で、
プラズマ、イオンブレーティング、スパッタリング、真
空蒸着、真空紫外線処理等を行うだめの真空連続処理装
置におけるソール装置に関するものである。Detailed Description of the Invention A: Technical Field of the Invention The present invention relates to the treatment of flexible materials to be treated, such as sheets of film, fabric, and plastic molded products, in a vacuum treatment tank.
The present invention relates to a sole device in a vacuum continuous processing apparatus that performs plasma, ion blasting, sputtering, vacuum evaporation, vacuum ultraviolet treatment, etc.
Ｂ 従来技術とその問題点
各種シート状物の表面改質を目的として真空処理槽中で
真空連続処理を行なうことは知られており、いくつかの
シール装置が提案されている。その代表的な一例は、第
３図に示す如く、ケーシング内にほぼ同一径の上・下一
対のローソーと、該ローラーとケーシングとの間のリッ
プ部材とからなるシール装置が複数組並列して設けられ
たものであるが、この一対のローラーが複数組並列する
構造のものにあっては、被処理物であるシート状物への
張力が低すぎるとシート状物が対ローラー間で撓み、皺
発生の原因となる。また張力が高すぎると弾性回復限界
以上の歪が生じシート状物が変形したり、やはり皺発生
の原因となる。これらは基本的にある程度以上の張力で
シート状物を移送させないとシート状物が円滑に移送で
きないというところに問題点があった。さらに１０−ル
に巻かれたシート状物が一種類でなく多種類混在する場
合、一定の張力を得ようとすると引張り率をシートの種
類によって変化させなけれ処理槽から後方シール部に再
度入った際、これらの皺はさらに拡大されて、品質を著
しくそこなうことになる。例えば布帛をプラズマ処理に
よって繊維表面をエツチングして濃色化するような技術
の場合、この皺部分は濃色程度が他の部分より著しく劣
り、完全に欠陥商品となる。B. Prior art and its problems It is known that continuous vacuum treatment is performed in a vacuum treatment tank for the purpose of surface modification of various sheet materials, and several sealing devices have been proposed. A typical example is as shown in Fig. 3, in which multiple sets of sealing devices each consisting of a pair of upper and lower row saws of approximately the same diameter and a lip member between the roller and the casing are arranged in parallel inside a casing. However, in a structure in which multiple pairs of rollers are arranged in parallel, if the tension applied to the sheet-like object to be processed is too low, the sheet-like object will bend between the pair of rollers. It causes wrinkles. Moreover, if the tension is too high, distortion exceeding the elastic recovery limit will occur, deforming the sheet-like material, and also causing wrinkles. Basically, these methods have a problem in that the sheet-like material cannot be transported smoothly unless the sheet-like material is transported with a tension above a certain level. Furthermore, if there are many types of sheets wound into 10-strand rolls, in order to obtain a constant tension, the tensile rate must be changed depending on the type of sheet, and the sheet will re-enter the rear seal from the processing tank. In the process, these wrinkles are further enlarged, significantly deteriorating the quality. For example, in the case of a technique in which the fiber surface of a fabric is etched by plasma treatment to darken the color, the degree of darkening of the wrinkled portion is significantly lower than that of other portions, resulting in a completely defective product.
Ｃ本発明の目的
本発明の目的は、シート状物を大気中から真空処理槽へ
、また真空処理槽から大気中へ連続的に移送させて処理
を行なうときの、シール装置による上記欠点を解消せん
とするものである。即ち、本発明者等は低張力でシート
状物を移送でき、し置におけるシール装置を発明するに
至った。CObject of the present invention The purpose of the present invention is to eliminate the above-mentioned drawbacks caused by a sealing device when processing a sheet-like material by continuously transferring it from the atmosphere to a vacuum processing tank and from the vacuum processing tank to the atmosphere. This is what I am trying to do. That is, the present inventors have invented a sealing device that can transport a sheet-like object with low tension and can be placed in a stationary position.
Ｄ 本発明の構成
即ち本発明は、
「シート状物の真空処理槽での処理を連続化するための
真空処理槽前後両方側または一方側に設ける、大気シー
ルのためのシール装置において、シート状物の導入導出
口を有するケーシング内に。D Structure of the present invention, that is, the present invention is, “In a sealing device for atmospheric sealing provided on both the front and rear sides or one side of a vacuum processing tank for continuous processing of sheet-like materials in the vacuum processing tank, Inside the casing with an outlet for the introduction of objects.
シート状物をローラー局面に沿わせ回転と共に移送する
大ローラーと、
ケーシングのシート状物の導入導出口をはさんだ大ロー
ラーの上下両側位置関係で、大ローラーに軸方向で接触
して回転する少なくとも一対の小ローラーと、
小ローラードケーシングとの間のローラー軸方向のシー
ル手段ならびに大・小ローラー端面とケーシングとの間
のシール手段とを設け、Ｅ記大・小ロージーおよびケー
シングとシール手段とで区画されたケーシング内室を減
圧にする減圧手段を設けてなり、
ソー ト状物を大ロー ソーの回転と共に大ローラー表
面で支えて移送しつつ大気シールするようになしたこと
を特徴とするシート状物の真空連続処理装置におけるシ
ール装置。 」
である。The large roller rotates and transports the sheet-like material along the roller surface, and the large roller that sandwiches the sheet-like material inlet/outlet of the casing is positioned on both sides of the upper and lower sides. A pair of small rollers and a sealing means in the roller axial direction between the small roller casing and a sealing means between the large and small roller end faces and the casing are provided, and the sealing means is provided between the large and small rollers and the casing and the sealing means. The invention is characterized in that it is equipped with a depressurizing means for reducing the pressure in the interior of the casing, which is divided into sections, and seals the sorted material to the atmosphere while supporting and transporting it on the surface of the large roller as the large saw rotates. Sealing device for vacuum continuous processing equipment for sheet materials. ”.
本発明のシール装置は第１図（ａ）、（ｂ）で示され、
例えば第２図に示す如く設置される。この第２図で、真
空処理槽Ａ、Ｂはプラズマ、イオンブレーティング、ス
パッタリング、真空蒸着、真空紫外線処理等を行なうた
めの処理室で通常１ｏ−６〜１０Ｔｏｒｒ程度の真空と
するための真空ポンプにつながる配管、ガス導入［ＴＪ
、１！極などを備えている。The sealing device of the present invention is shown in FIGS. 1(a) and 1(b),
For example, it is installed as shown in FIG. In this Figure 2, vacuum processing chambers A and B are processing chambers for performing plasma, ion blating, sputtering, vacuum evaporation, vacuum ultraviolet treatment, etc., and are usually vacuum pumps for creating a vacuum of about 10-6 to 10 Torr. Piping connected to, gas introduction [TJ
, 1! It has poles etc.
もちろん真空処理槽はＡのみでもよく処理速度を上げた
り又は異なる処理をするために直列して数装置いてもよ
い。Of course, only A may be used as the vacuum processing tank, and several units may be connected in series to increase the processing speed or perform different processing.
本発明のシール装置Ｃは、この真空処理槽Ａ、Ｂの前方
（入口側）および後方（出口側）の両方側の大気シール
、場合によっては前方あるいは後方一方向側のみの大気
シールを行なって、真空連続処理を可能とするものであ
る。本ソール装置を第１図（ａ）あるいｔｄ（ｂ）で説
明すれば、１け、シート状物の導入口２ および導出口
３ を備えたケーシング、４は、該ケーシング１内に軸
支された大ローラ−，５−１〜５−５あるいは６−１〜
６−５は、大ローラ−４に軸方で接触する小ローラー、
７は、該各車ローラー５あるいは６とケーシング１との
間をシールするシール部材、８−１〜８−４あるいは９
−１〜９−４は、大ローラ−４と各小ローラー５あるい
は６および各小ローラー５あるいは６の軸方向のシール
部材７お上び大・小口−シ一端血のンール部羽１３とで
区画された各ケーシング内室１０−１〜１０−４あるい
は１１−１〜１１−４の真空ポンプ（図示略）につなが
る排気（］である。又ｊ２は、大ローラ−４の表面に被
覆された篩分子弾性物である。又１４は、大小ローラー
１４面のシール部の排気口である。大ローラ−４および
それを取囲むように配された小ローラー５並ひに６群は
、ケーシング内で、該ケーシング内の支持部材に軸受を
介して回転自在に軸支され、かつ例えば、各々ローラー
軸の軸端に取付けたギア歯車で噛合わせ、大ローラ−４
に対して小ローラー５および６群が同時駆動できるよう
になっている。The sealing device C of the present invention performs atmospheric sealing on both the front (inlet side) and rear (outlet side) sides of the vacuum processing tanks A and B, or in some cases, performs atmospheric sealing only on one side of the front or rear side. , which enables continuous vacuum processing. If the present sole device is explained with reference to FIG. large roller, 5-1~5-5 or 6-1~
6-5 is a small roller that contacts the large roller 4 in the axial direction;
7 is a sealing member 8-1 to 8-4 or 9 for sealing between each roller 5 or 6 and the casing 1;
-1 to 9-4 are a large roller 4, each small roller 5 or 6, a sealing member 7 in the axial direction of each small roller 5 or 6, and a large and small mouth end blood noon blade 13. This is an exhaust port () connected to a vacuum pump (not shown) for each of the divided casing inner chambers 10-1 to 10-4 or 11-1 to 11-4. The large roller 4 and the small rollers 5 and 6 that are arranged to surround the large roller 4 are connected to the casing. The large roller 4 is rotatably supported by a support member in the casing via a bearing, and meshed with a gear gear attached to the shaft end of each roller shaft, for example.
In contrast, the small roller groups 5 and 6 can be driven simultaneously.
第１図（ａ）においてシート状物−トは大気側導入口２
からガイド等を介してケーシング内に入り、大ローラ−
４の表面で重量が支えられるように該大ローラ−４表面
上に載り、かつその上から小ローラー５群によって大ロ
ーラ−４表面へ抑えられ、大ローラ−４の回転と共に、
大ローラーの表面上に接触したままの状態で移送され、
真空処理槽への大気シールは、大ローラ−４に対してケ
ーソンでの最小単位としては小ローラー５−１と小ロー
ラー６−１を設置することによって達せられる。In Fig. 1(a), the sheet-like material is placed at the atmosphere side inlet 2.
It enters the casing through a guide etc. from the large roller.
It rests on the surface of the large roller 4 so that its weight is supported by the surface of the roller 4, and is pressed onto the surface of the large roller 4 by a group of 5 small rollers from above, and as the large roller 4 rotates,
It is transferred while remaining in contact with the surface of the large roller,
Air sealing to the vacuum processing tank is achieved by installing a small roller 5-1 and a small roller 6-1 as the minimum unit of a caisson with respect to the large roller 4.
図例の場合は、大ローラ−４に対して小ローラー５−１
〜５−５と小ローラー６−１〜６−５とでシールするよ
うになしたもので、例えば、排気口８−１と９−１．８
−２と９−２．８−３と９−３．８−４と９−４とをそ
れぞれ同一の真空系へ接続すれば、区画されたケーシン
グ内室１０−１は１１−１と、１０−２は１１−２と、
１０−３は１１−３と、１０−４は１１−４とそれぞれ
同一真空となる。しかも上記真空系を後者になるほど高
真空度となるように構成すればケーシング内室１０−１
．１１−１より１０−２．１１−２が高真空度に、１０
−２．１１−２よりさらに１０−３．１１−３が高真空
度に、さらに１０−３．１１−３より１０−４．１１−
４を高真空度にすることができ、結局複数のケーシング
内室によって順次高真空度になすことができるものであ
る。もつとも、処理により高真空度のシールを必要とし
ない場合には、大ローラ−４に対して、小ローラー５と
小ローラー６との数を減らせばよく、又逆に、よシ高真
空度のシールを必要とする場合には図例以上に小ローラ
ー５と小ローラー６との数を増やせばよいこと明らかで
ある。In the example shown, the small roller 5-1 is compared to the large roller 4.
5-5 and small rollers 6-1 to 6-5, for example, exhaust ports 8-1 and 9-1.8.
-2 and 9-2.8-3 and 9-3.8-4 and 9-4 are respectively connected to the same vacuum system, the partitioned casing inner chamber 10-1 becomes 11-1 and 10-2. -2 is 11-2,
10-3 and 11-3 have the same vacuum, and 10-4 and 11-4 have the same vacuum. Moreover, if the vacuum system is configured so that the degree of vacuum becomes higher in the latter case, the inner chamber 10-1 of the casing
．． 10-2 from 11-1.11-2 has a high degree of vacuum, 10
-10-3.11-3 has a high degree of vacuum from -2.11-2, and 10-4.11- from 10-3.11-3
4 can be made to a high degree of vacuum, and in the end, a high degree of vacuum can be made sequentially by a plurality of casing interior chambers. However, if the process does not require sealing at a high degree of vacuum, the number of small rollers 5 and 6 may be reduced relative to the large roller 4; It is clear that if sealing is required, the number of small rollers 5 and 6 may be increased beyond that shown in the illustrated example.
大ローラーが高分子弾性物又はそれで被覆された場合は
、小ローラーは金Ｓ製、小ローラーに接触するシールリ
ップ部材は高分子弾性物の組合せが、また大ローラーを
金属線にした場合は、小ローラーが高分子弾性体又はそ
れで被覆されたもの、小ローラーに接触するシールリッ
プ部材は金属製の組合せが、耐摩耗耐久性及び補修上望
ましい。If the large roller is made of an elastic polymer or coated with it, the small roller is made of gold S, and the seal lip member that contacts the small roller is made of an elastic polymer, and if the large roller is made of metal wire, It is desirable for the small roller to be made of a polymeric elastic material or covered with it, and for the seal lip member that contacts the small roller to be made of metal, in terms of wear resistance and repairability.
通常前者のケースが最も好ましいが、これらの組合せに
限定されるものではない。The former case is usually the most preferred, but the combination is not limited to these.
弾性体としてはたとえば、シリコンゴム、ニトリルゴム
、ウレタンゴム等がある。又大・小ローラー端面のシー
ル手段として祉、例えば、該ローラー端面とケーシング
との間に端面シール部材１３を設け、そのローラー端面
に対向する面を低摩擦係数を有するフッソ樹脂等の膜を
焼付けた面とする。Examples of the elastic body include silicone rubber, nitrile rubber, and urethane rubber. In addition, as a sealing means for the end faces of the large and small rollers, for example, an end face sealing member 13 is provided between the end face of the roller and the casing, and a film of fluorine resin or the like having a low coefficient of friction is baked on the surface facing the end face of the roller. It is assumed that
本発明シール装置は、第２図に示されるように真空処理
槽の前後両方側に設けることができるばかりでなく、処
理の目的によって真空処理槽Ａ１Ｂの中間に設置して両
槽を異なった真空度に真空シールをすることができるし
、さらに又シート状物が第１図図面で大ローラ−４と小
ローラー５−１〜５−５七でシールされて真空処理槽へ
入ったシート状物が、該真空処理槽内を一巡し７て処理
して再び本シール装置の大ローラ−４と小ローラー６−
５〜６−１間へ導ひいて連続処理することができるもの
である。更に又、本発明シール装置を、例えば第２図の
前方側のみに設−し、真空処理槽６の後方側を密閉可ｎ
［・な欅取槽として半連続真空処理するシール装置とし
て用いることも熱論可能で、又真空処理槽前後の片方を
本発明のシール装置を用い、他側は他の手段を使用し７
て連転化することも可能である。The sealing device of the present invention can not only be installed on both the front and rear sides of the vacuum processing tank as shown in FIG. In addition, the sheet-like material can be vacuum-sealed at the same time, and the sheet-like material is sealed by the large roller 4 and the small rollers 5-1 to 5-57 in FIG. After the vacuum processing tank has been processed once, the large roller 4 and small roller 6 of the present sealing device are used again.
5 to 6-1 and can be continuously processed. Furthermore, the sealing device of the present invention may be installed, for example, only on the front side in FIG. 2, and the rear side of the vacuum processing tank 6 may be sealed.
It is also theoretically possible to use the zelkova tank as a sealing device for semi-continuous vacuum processing, and it is also possible to use the sealing device of the present invention on one side before and after the vacuum processing tank, and use other means on the other side.
It is also possible to convert them continuously.
本発明のシール装置が従来のものと、もつとも機構的に
異なる点は前記のように、大ローラーと小ローラーとを
糺合せ、シート状物を大ローラーの表面−ヒを大ローラ
ーを回転させる仁とにより共ｌ送させるようにし７たこ
とであり、これにより、極めて低張力でし７かも皺発生
がまったくなく移送及びシールができる点である。The sealing device of the present invention is mechanically different from conventional ones in that, as described above, a large roller and a small roller are glued together, and the sheet-like material is bonded to the surface of the large roller. This makes it possible to transport and seal with extremely low tension and no wrinkles at all.
Ｅ 本発明の効果
本発明においては、大ローラーの表面上に接触し７た状
態でシート状物か移送し、シート状物の１鮒ねローラー
表面で支えられるため極めて低張力下でも撓みによる皺
等の発生がまったく生じない。したがって又、極めて低
張力で布（シート状物）か移送できるからこそ、伸張特
性の異なるシート状物が巻出しローラーに混在して巻か
れていてもまったく皺発生なく処冗可畦、となったもの
である。E Effects of the present invention In the present invention, the sheet-like material is transferred while in contact with the surface of the large roller, and since the sheet-like material is supported by the surface of the funane roller, wrinkles due to deflection are avoided even under extremely low tension. etc. will not occur at all. Therefore, because the fabric (sheet-like material) can be transferred with extremely low tension, even if sheet-like materials with different elongation properties are mixed and wound around the unwinding roller, they can be processed without wrinkles at all. It is something that
第１図は本発明シール装置の一実施例の概略縦断面図で
、（ａ）は正面開所…１図、（ｂ）は側面側断面図であ
る。第２図は本発明装材を組込んだシート状物の真空連
続処理装置の概略図、第３図は従来のシール装置の概略
縦断面図である。
Ａ、Ｂ・・・真空処理槽 ７・・・ シール部材Ｃ・・
・・シール装置 ８．９ ・・排気口８−１〜８−４
（）
１ ・・・・・ケーシング ９−１〜９−４４ ・・・
・・犬ローラー １２・・・・・高分子弾性物特許出願
人 株式会社り ラ し
代理人弁理士本多 堅
ｖ；１ 図（Ｇ）
＠３１１２１FIG. 1 is a schematic vertical cross-sectional view of an embodiment of the sealing device of the present invention, (a) is a front open view, and (b) is a side cross-sectional view. FIG. 2 is a schematic diagram of a continuous vacuum processing apparatus for sheet-like materials incorporating the packaging material of the present invention, and FIG. 3 is a schematic vertical sectional view of a conventional sealing device. A, B... Vacuum processing tank 7... Seal member C...
...Seal device 8.9 ...Exhaust ports 8-1 to 8-4 () 1 ...Casing 9-1 to 9-44 ...
...Dog Roller 12 ... Polymer elastic material patent applicant RiRa Co., Ltd. Representative Patent Attorney Ken Honda v; 1 Figure (G) @31121
Claims (1)
の真空処理槽前後両方側または一方側に設ける、大気ン
ールのだめのシール装置において、シート状物の導入導
出口を有するケーシング内に、 シート状物をローラー局面に沿わせ回転と共に移送する
大口〜シーと、 ケーシングのシート状物の導入導出口をはさんだ大ロー
ラーの上下両側位１に関係で、大ローラーに軸方向で接
触して回転する少なくとも一対の小ローラーと、 小ローラーとケーシングとの間のローラー軸方向のシー
ル手段ならびに大・小ローラー端面とケーシングとの間
のシール手段とを設け、上記大・小ローラーおよびケー
シングとシール手段とで区画されたケーシング内室を減
圧にする減圧手段を設けてなり、 シート状物乞大ローラーの回転と共に大ローラー表面で
支えて移送しつつ大気シールするようになしたことを特
徴とするシート状物の真空連続処理装置におけるシール
装置。[Scope of Claims] A sealing device for an atmospheric chamber provided on both sides or one side of a vacuum processing tank for continuous processing of sheet-like materials in a vacuum processing tank, in which a sheet-like material is introduced. In the casing which has an outlet, there is a large roller which rotates and transfers the sheet-like material along the roller surface, and a large roller that is connected to the upper and lower sides of the large roller that sandwich the sheet-like material introduction/outlet of the casing. At least a pair of small rollers that rotate in axial contact with the rollers, sealing means in the roller axial direction between the small rollers and the casing, and sealing means between the end faces of the large and small rollers and the casing are provided. - A pressure reducing means is provided to reduce the pressure in the casing interior divided by the small roller, the casing, and the sealing means, and as the sheet-like large roller rotates, it is supported and transferred by the large roller surface and sealed to the atmosphere. A sealing device in a continuous vacuum processing apparatus for sheet-like materials, characterized by the following:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59080983A JPS60224780A (en) | 1984-04-20 | 1984-04-20 | Sealing device in continuous vacuum treating device for sheet-shaped material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59080983A JPS60224780A (en) | 1984-04-20 | 1984-04-20 | Sealing device in continuous vacuum treating device for sheet-shaped material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60224780A true JPS60224780A (en) | 1985-11-09 |
Family
ID=13733736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59080983A Pending JPS60224780A (en) | 1984-04-20 | 1984-04-20 | Sealing device in continuous vacuum treating device for sheet-shaped material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60224780A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5149036A (en) * | 1974-10-11 | 1976-04-27 | Fujitsu Ltd | GENZOYOTONAAHOKYUSOCHI |
| JPS57195754A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
| JPS58131470A (en) * | 1982-01-29 | 1983-08-05 | Fuji Photo Film Co Ltd | Roller system seal device |
-
1984
- 1984-04-20 JP JP59080983A patent/JPS60224780A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5149036A (en) * | 1974-10-11 | 1976-04-27 | Fujitsu Ltd | GENZOYOTONAAHOKYUSOCHI |
| JPS57195754A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
| JPS58131470A (en) * | 1982-01-29 | 1983-08-05 | Fuji Photo Film Co Ltd | Roller system seal device |
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