JPS5710985A - Solid image pickup element - Google Patents

Solid image pickup element

Info

Publication number
JPS5710985A
JPS5710985A JP8508280A JP8508280A JPS5710985A JP S5710985 A JPS5710985 A JP S5710985A JP 8508280 A JP8508280 A JP 8508280A JP 8508280 A JP8508280 A JP 8508280A JP S5710985 A JPS5710985 A JP S5710985A
Authority
JP
Japan
Prior art keywords
layer
film
films
gate
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8508280A
Other languages
Japanese (ja)
Other versions
JPS6229913B2 (en
Inventor
Toshiki Suzuki
Masayuki Hikiba
Kiyoshi Tanaka
Koji Yamashita
Michio Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8508280A priority Critical patent/JPS5710985A/en
Publication of JPS5710985A publication Critical patent/JPS5710985A/en
Publication of JPS6229913B2 publication Critical patent/JPS6229913B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/148—Charge coupled imagers
    • H01L27/14887—Blooming suppression

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To contrive the high quality of a picture by deepening the depth of an insulating film under a gate from the upper surface of a substrate than the depth of source and drain impurity layers wherein the occurrence of blooming is controlled. CONSTITUTION:Thick silicon oxide films 17, 17' are selectively formed on the main surface of a P type silicon substrate 10 and a source diffusion layer 11, a drain diffusion layer 12 are formed shallower than the thickness of the films 17, 17' at the part existing no films 17, 17'. Next, the film 17' used as a gate controlling the threshold voltage of an active MOS at a low value is etched and a gate electrode 16 is formed at the etched section. The charges flowed out of the layer 11 are hard to reach the layer 12 by the presence of the film 17'. Blooming control effect will further be improved by providing a high-impurity density layer 18 right below the film 17'.
JP8508280A 1980-06-25 1980-06-25 Solid image pickup element Granted JPS5710985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8508280A JPS5710985A (en) 1980-06-25 1980-06-25 Solid image pickup element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8508280A JPS5710985A (en) 1980-06-25 1980-06-25 Solid image pickup element

Publications (2)

Publication Number Publication Date
JPS5710985A true JPS5710985A (en) 1982-01-20
JPS6229913B2 JPS6229913B2 (en) 1987-06-29

Family

ID=13848680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8508280A Granted JPS5710985A (en) 1980-06-25 1980-06-25 Solid image pickup element

Country Status (1)

Country Link
JP (1) JPS5710985A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179380A (en) * 1984-09-27 1986-04-22 Matsushita Electronics Corp Solid-state image pickup element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665577A (en) * 1979-11-01 1981-06-03 Nec Corp Solidstate image sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665577A (en) * 1979-11-01 1981-06-03 Nec Corp Solidstate image sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179380A (en) * 1984-09-27 1986-04-22 Matsushita Electronics Corp Solid-state image pickup element

Also Published As

Publication number Publication date
JPS6229913B2 (en) 1987-06-29

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