JPS57108259A - Black carbon-coated parts for decoration - Google Patents

Black carbon-coated parts for decoration

Info

Publication number
JPS57108259A
JPS57108259A JP18286180A JP18286180A JPS57108259A JP S57108259 A JPS57108259 A JP S57108259A JP 18286180 A JP18286180 A JP 18286180A JP 18286180 A JP18286180 A JP 18286180A JP S57108259 A JPS57108259 A JP S57108259A
Authority
JP
Japan
Prior art keywords
carbon
gas
contg
plasma
decoration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18286180A
Other languages
Japanese (ja)
Inventor
Yoshikazu Takahashi
Akira Shimizu
Akira Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP18286180A priority Critical patent/JPS57108259A/en
Publication of JPS57108259A publication Critical patent/JPS57108259A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

Abstract

PURPOSE:To firmly adhere carbon to a substance to be treated, by thermally decomposing a gas contg. carbon with plasma in an inert gaseous atmosphere and by depositing the dissociated carbon on the substance kept at a specified temp. CONSTITUTION:A gas contg. carbon or hydrocarbon is decomposed by utilizing the discharge of Ar. The operation pressure is about 10<-3>-30 Torr, and the discharge voltage is 50-300 V. The ratio between Ar and the carbon-contg. gas can be selected arbitrarily. Ar is a carrier gas for maintaining plasma, and by the plasma discharge the carbon-contg. gas is decomposed to deposit carbon on the periphery of a base material to be treated. The optimum temp. of the base material is <=450 deg.C.
JP18286180A 1980-12-25 1980-12-25 Black carbon-coated parts for decoration Pending JPS57108259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18286180A JPS57108259A (en) 1980-12-25 1980-12-25 Black carbon-coated parts for decoration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18286180A JPS57108259A (en) 1980-12-25 1980-12-25 Black carbon-coated parts for decoration

Publications (1)

Publication Number Publication Date
JPS57108259A true JPS57108259A (en) 1982-07-06

Family

ID=16125724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18286180A Pending JPS57108259A (en) 1980-12-25 1980-12-25 Black carbon-coated parts for decoration

Country Status (1)

Country Link
JP (1) JPS57108259A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4917953A (en) * 1987-02-28 1990-04-17 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of forming solid lubricaitng film on ceramic material and product produced by the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4917953A (en) * 1987-02-28 1990-04-17 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of forming solid lubricaitng film on ceramic material and product produced by the same

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