JPS5687372A - Semiconductor type measuring diaphragm - Google Patents
Semiconductor type measuring diaphragmInfo
- Publication number
- JPS5687372A JPS5687372A JP16412479A JP16412479A JPS5687372A JP S5687372 A JPS5687372 A JP S5687372A JP 16412479 A JP16412479 A JP 16412479A JP 16412479 A JP16412479 A JP 16412479A JP S5687372 A JPS5687372 A JP S5687372A
- Authority
- JP
- Japan
- Prior art keywords
- section
- resistors
- electrostrictive
- gauge
- measuring diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE:To eliminate the nonlinearity on the low-tension region of the subject diaphragm by a method wherein the surface of the semiconductor single crystal substrate is turned toward (110) or (211) direction and a gauge resistance is provided in parallel to the crystal axis of electrostrictive section <111>. CONSTITUTION:The measuring diaphragm 56, consists of N type single crystal Si having (110) face whereon a thin section 62 to be used as an annular electrostrictive section and having a center rigid body 58 in the center and a thick fixed section 60 on the outer circumference, is formed. Along the <111> axial radial direction of the electrostrictive section 62, a plurality of p type gauge resistors 64 are formed. Two gauge resistors are formed in the vicinity of the outer circumferential fixing section 60, other two gauge resistors are provided in the viciniy of the center rigid body 58 and power is outputted by assembling these resistors into the Wheatstone bridge.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16412479A JPS5687372A (en) | 1979-12-19 | 1979-12-19 | Semiconductor type measuring diaphragm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16412479A JPS5687372A (en) | 1979-12-19 | 1979-12-19 | Semiconductor type measuring diaphragm |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5687372A true JPS5687372A (en) | 1981-07-15 |
Family
ID=15787193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16412479A Pending JPS5687372A (en) | 1979-12-19 | 1979-12-19 | Semiconductor type measuring diaphragm |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5687372A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021025966A (en) * | 2019-08-08 | 2021-02-22 | ローム株式会社 | MEMS sensor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169678A (en) * | 1974-11-06 | 1976-06-16 | Philips Nv | |
JPS5232236A (en) * | 1975-09-05 | 1977-03-11 | Toshiba Corp | Testing device for interrupt processing circuit |
-
1979
- 1979-12-19 JP JP16412479A patent/JPS5687372A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169678A (en) * | 1974-11-06 | 1976-06-16 | Philips Nv | |
JPS5232236A (en) * | 1975-09-05 | 1977-03-11 | Toshiba Corp | Testing device for interrupt processing circuit |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021025966A (en) * | 2019-08-08 | 2021-02-22 | ローム株式会社 | MEMS sensor |
US11643324B2 (en) | 2019-08-08 | 2023-05-09 | Rohm Co., Ltd. | MEMS sensor |
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