JPS5425683A - Pressure transmitter of semiconductor - Google Patents

Pressure transmitter of semiconductor

Info

Publication number
JPS5425683A
JPS5425683A JP9029477A JP9029477A JPS5425683A JP S5425683 A JPS5425683 A JP S5425683A JP 9029477 A JP9029477 A JP 9029477A JP 9029477 A JP9029477 A JP 9029477A JP S5425683 A JPS5425683 A JP S5425683A
Authority
JP
Japan
Prior art keywords
semiconductor
pressure transmitter
gauges
minimized
avoiding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9029477A
Other languages
Japanese (ja)
Other versions
JPS581550B2 (en
Inventor
Satoshi Shimada
Masanori Tanabe
Kazuji Yamada
Yasumasa Matsuda
Motohisa Nishihara
Yoshitaka Matsuoka
Mitsuo Gai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52090294A priority Critical patent/JPS581550B2/en
Publication of JPS5425683A publication Critical patent/JPS5425683A/en
Publication of JPS581550B2 publication Critical patent/JPS581550B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To maintain high accuracy, by avoiding the effect of static characteristics and temperature characteristics, by arranging the output compensation resistor connected between the gauges on the two sides adjacent each other at the bridge output terminals toward the crystal azimuth in which the piezoelectric coefficient on the fixed part of a silicon diaphragm is minimized.
COPYRIGHT: (C)1979,JPO&Japio
JP52090294A 1977-07-29 1977-07-29 semiconductor pressure transmitter Expired JPS581550B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52090294A JPS581550B2 (en) 1977-07-29 1977-07-29 semiconductor pressure transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52090294A JPS581550B2 (en) 1977-07-29 1977-07-29 semiconductor pressure transmitter

Publications (2)

Publication Number Publication Date
JPS5425683A true JPS5425683A (en) 1979-02-26
JPS581550B2 JPS581550B2 (en) 1983-01-11

Family

ID=13994503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52090294A Expired JPS581550B2 (en) 1977-07-29 1977-07-29 semiconductor pressure transmitter

Country Status (1)

Country Link
JP (1) JPS581550B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007057284A (en) * 2005-08-23 2007-03-08 Ngk Spark Plug Co Ltd Pressure sensor and pressure detection apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007057284A (en) * 2005-08-23 2007-03-08 Ngk Spark Plug Co Ltd Pressure sensor and pressure detection apparatus

Also Published As

Publication number Publication date
JPS581550B2 (en) 1983-01-11

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