JPS5425683A - Pressure transmitter of semiconductor - Google Patents
Pressure transmitter of semiconductorInfo
- Publication number
- JPS5425683A JPS5425683A JP9029477A JP9029477A JPS5425683A JP S5425683 A JPS5425683 A JP S5425683A JP 9029477 A JP9029477 A JP 9029477A JP 9029477 A JP9029477 A JP 9029477A JP S5425683 A JPS5425683 A JP S5425683A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- pressure transmitter
- gauges
- minimized
- avoiding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To maintain high accuracy, by avoiding the effect of static characteristics and temperature characteristics, by arranging the output compensation resistor connected between the gauges on the two sides adjacent each other at the bridge output terminals toward the crystal azimuth in which the piezoelectric coefficient on the fixed part of a silicon diaphragm is minimized.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52090294A JPS581550B2 (en) | 1977-07-29 | 1977-07-29 | semiconductor pressure transmitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52090294A JPS581550B2 (en) | 1977-07-29 | 1977-07-29 | semiconductor pressure transmitter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5425683A true JPS5425683A (en) | 1979-02-26 |
JPS581550B2 JPS581550B2 (en) | 1983-01-11 |
Family
ID=13994503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52090294A Expired JPS581550B2 (en) | 1977-07-29 | 1977-07-29 | semiconductor pressure transmitter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS581550B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007057284A (en) * | 2005-08-23 | 2007-03-08 | Ngk Spark Plug Co Ltd | Pressure sensor and pressure detection apparatus |
-
1977
- 1977-07-29 JP JP52090294A patent/JPS581550B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007057284A (en) * | 2005-08-23 | 2007-03-08 | Ngk Spark Plug Co Ltd | Pressure sensor and pressure detection apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS581550B2 (en) | 1983-01-11 |
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