JPS5685812A - Method of pattern forming of magnetic bubble element - Google Patents

Method of pattern forming of magnetic bubble element

Info

Publication number
JPS5685812A
JPS5685812A JP16379979A JP16379979A JPS5685812A JP S5685812 A JPS5685812 A JP S5685812A JP 16379979 A JP16379979 A JP 16379979A JP 16379979 A JP16379979 A JP 16379979A JP S5685812 A JPS5685812 A JP S5685812A
Authority
JP
Japan
Prior art keywords
pattern
layer
forming
conductor
permalloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16379979A
Other languages
Japanese (ja)
Inventor
Hideki Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16379979A priority Critical patent/JPS5685812A/en
Publication of JPS5685812A publication Critical patent/JPS5685812A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To effectively prevent a position discrepancy between positions of conductor pattern and permalloy pattern by protruding the upper part of a mark on the conductor pattern side by a method wherein a resist pattern for forming a position fitting mark on the conductor pattern side is left and attached with every layer by in sequence thereon. CONSTITUTION:A spacer layer 3 is formed on a magnetic film 2 of a substrate 1, a conductor layer 4' for forming a conductor pattern 4 is formed thereon and in addition, the resist pattern for forming the pattern 4 and a resist pattern 7m for forming the position fitting mark are formed on the layer 4'. Then, a planar layer 8 is attach-formed on the patterns 7 and 7m. At this time, the pattern 7 is formed in sharp and the pattern 7m is formed in such a manner as having an easy slope, and when the pattern 7 and an insulator 8m are lifted off to be removed, the pattern 7m and the insulator 8m are left behind. And further, an insulated layer 5, permalloy layer 6 and anti-halation film 9 and the like are formed in sequence and the top of the pattern 7 is protruded to prevent the position discrepancy between the positions of the pattern 4 and the permalloy pattern.
JP16379979A 1979-12-17 1979-12-17 Method of pattern forming of magnetic bubble element Pending JPS5685812A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16379979A JPS5685812A (en) 1979-12-17 1979-12-17 Method of pattern forming of magnetic bubble element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16379979A JPS5685812A (en) 1979-12-17 1979-12-17 Method of pattern forming of magnetic bubble element

Publications (1)

Publication Number Publication Date
JPS5685812A true JPS5685812A (en) 1981-07-13

Family

ID=15780916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16379979A Pending JPS5685812A (en) 1979-12-17 1979-12-17 Method of pattern forming of magnetic bubble element

Country Status (1)

Country Link
JP (1) JPS5685812A (en)

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