JPS5670446A - Measuring method and measuring device employed therefor - Google Patents
Measuring method and measuring device employed thereforInfo
- Publication number
- JPS5670446A JPS5670446A JP14822879A JP14822879A JPS5670446A JP S5670446 A JPS5670446 A JP S5670446A JP 14822879 A JP14822879 A JP 14822879A JP 14822879 A JP14822879 A JP 14822879A JP S5670446 A JPS5670446 A JP S5670446A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- central part
- resistance
- wafer
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To measure the electrical characteristics of a semiconductor wafer and the like easily and precisely by applying a light to the central part of a point of measurement, taking out an electric signal from the periphery of this central part and thereby reducing the resistance of contact with a probe.
CONSTITUTION: The probe 1 made of tungsten or the like is provided with a hole in the shape of such a slender pipe as an injector needle, and a optical fiber 2 is inserted into this hole. By this constitution, the central part of the point of measurement of the wafer 4 is irradiated through the intermediary of the optical fiber 2, and when the probe 1 contacts with the periphery of the irradiated part, the contact resistance of the probe 1 is lowered by the light, whereby the electrical characteristics of the wafer 4, such as resistance, are measured easily and precisely.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14822879A JPS5670446A (en) | 1979-11-15 | 1979-11-15 | Measuring method and measuring device employed therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14822879A JPS5670446A (en) | 1979-11-15 | 1979-11-15 | Measuring method and measuring device employed therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5670446A true JPS5670446A (en) | 1981-06-12 |
Family
ID=15448134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14822879A Pending JPS5670446A (en) | 1979-11-15 | 1979-11-15 | Measuring method and measuring device employed therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5670446A (en) |
-
1979
- 1979-11-15 JP JP14822879A patent/JPS5670446A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5378859A (en) | Automatic measuring and testing system | |
JPS5670446A (en) | Measuring method and measuring device employed therefor | |
JPS5437582A (en) | Measuring method for capacity of three-terminal semiconductor element | |
JPS5337077A (en) | Probe for tester | |
JPS54112174A (en) | Testing method for semiconductor device | |
JPS51120242A (en) | Fiber diameter measuring instrument | |
JPS6472079A (en) | Electrical characteristic measuring instrument | |
JPS5322757A (en) | Testing apparatus of electric a ppliances | |
JPS5483774A (en) | Manufacture of semiconductor device | |
JPS51134685A (en) | Fluid softness measurement method | |
JPS5614131A (en) | Inspecting method for fiber optic connector ferrule | |
JPS547279A (en) | Socket adapter for ic measurement | |
JPS53138377A (en) | Insulation testing method | |
JPS5776852A (en) | Card for probe | |
JPS55122171A (en) | Method of testing semiconductor unit | |
JPS5587437A (en) | Method of detecting completion of dry etching | |
JPS5516453A (en) | Tape for holding semiconductor device | |
JPS5717873A (en) | Inspection method of semiconductor element | |
JPS54114184A (en) | Measuring device for semiconductor device | |
JPS55147301A (en) | Micrometer with short circuit | |
JPS5750444A (en) | Inspection device for semiconductor wafer | |
GB2020827A (en) | Measurement of Electrical Characteristics of In-process Semiconductor Devices | |
JPS6473263A (en) | Method and apparatus for inspecting light emitting diode element | |
JPS5412840A (en) | Measuring method for surface potential of electrophotographic photoreceptor by time series | |
JPS5353348A (en) | Optical fiber length measuring method and apparatus |