JPS5658285A - Manufacture of color solid pick-up element - Google Patents

Manufacture of color solid pick-up element

Info

Publication number
JPS5658285A
JPS5658285A JP13416679A JP13416679A JPS5658285A JP S5658285 A JPS5658285 A JP S5658285A JP 13416679 A JP13416679 A JP 13416679A JP 13416679 A JP13416679 A JP 13416679A JP S5658285 A JPS5658285 A JP S5658285A
Authority
JP
Japan
Prior art keywords
electrode
protective film
intermediate layer
upper section
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13416679A
Other languages
Japanese (ja)
Other versions
JPS5814074B2 (en
Inventor
Norio Koike
Akira Sasano
Toshio Nakano
Seiji Kubo
Michio Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP54134166A priority Critical patent/JPS5814074B2/en
Publication of JPS5658285A publication Critical patent/JPS5658285A/en
Publication of JPS5814074B2 publication Critical patent/JPS5814074B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To improve yield and reliability by a method wherein a protective film corresponding to an upper section of a pad electrode is removed in a final process of a filter process. CONSTITUTION:The upper sections of photodiodes 103 and an Si semiconductor substrate 102 formed by integrating scanning circuit regions 104 are covered with a protective film 107 including an upper section of a pad electrode 105 for bonding. A dyeing region 109 of R is made up on a fixed region of the IC, and a high molecular resin intermediate layer 110-1 is built up on the whole. A dyeing region 111 of G and a dyeing region 112 of B are formed and high molecular resin intermediate layers 110-2, 110-3 are coated by repeating the same process. The resin layers 110-1-110-3 corresponding to an upper section 113 of an electrode 105 are removed by using a photomask. The protective film 107 under an intermediate layer 115 is etched using the intermediate layer 115 being bored as a mask, and the electrode 105 is exposed. Consequently, bondability to the electrode 105 is similar to one before forming a color filter. Thus, yield and reliability can be improved remarkably.
JP54134166A 1979-10-19 1979-10-19 Manufacturing method of color solid-state image sensor Expired JPS5814074B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54134166A JPS5814074B2 (en) 1979-10-19 1979-10-19 Manufacturing method of color solid-state image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54134166A JPS5814074B2 (en) 1979-10-19 1979-10-19 Manufacturing method of color solid-state image sensor

Publications (2)

Publication Number Publication Date
JPS5658285A true JPS5658285A (en) 1981-05-21
JPS5814074B2 JPS5814074B2 (en) 1983-03-17

Family

ID=15121985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54134166A Expired JPS5814074B2 (en) 1979-10-19 1979-10-19 Manufacturing method of color solid-state image sensor

Country Status (1)

Country Link
JP (1) JPS5814074B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812354A (en) * 1981-07-15 1983-01-24 Toshiba Corp Manufacture of solid-state colored image pickup device
JPS5834961A (en) * 1981-08-27 1983-03-01 Dainippon Printing Co Ltd Manufacture of color solid image pick up element plate
JPS592009A (en) * 1982-06-29 1984-01-07 Toshiba Corp Manufacture of color filter
JPS6180104A (en) * 1984-09-27 1986-04-23 Matsushita Electronics Corp Direct forming method of color filter
KR100447986B1 (en) * 1997-12-29 2005-07-04 주식회사 하이닉스반도체 Manufacturing method of color filter of optical sensing element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812354A (en) * 1981-07-15 1983-01-24 Toshiba Corp Manufacture of solid-state colored image pickup device
JPS5834961A (en) * 1981-08-27 1983-03-01 Dainippon Printing Co Ltd Manufacture of color solid image pick up element plate
JPS592009A (en) * 1982-06-29 1984-01-07 Toshiba Corp Manufacture of color filter
JPS6180104A (en) * 1984-09-27 1986-04-23 Matsushita Electronics Corp Direct forming method of color filter
KR100447986B1 (en) * 1997-12-29 2005-07-04 주식회사 하이닉스반도체 Manufacturing method of color filter of optical sensing element

Also Published As

Publication number Publication date
JPS5814074B2 (en) 1983-03-17

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