JPS5644770A - Preparation of thin film - Google Patents
Preparation of thin filmInfo
- Publication number
- JPS5644770A JPS5644770A JP11967579A JP11967579A JPS5644770A JP S5644770 A JPS5644770 A JP S5644770A JP 11967579 A JP11967579 A JP 11967579A JP 11967579 A JP11967579 A JP 11967579A JP S5644770 A JPS5644770 A JP S5644770A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- laser beam
- heated
- thin film
- back face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the covering property of thin film formed on the surface of substrate, by providing the means maintaining the whole surface of semiconductor substrate at a fixed temperature. CONSTITUTION:The whole surface or back face of substrate during vapor deposition, is heated at a high temperature by irradiating laser beam and crack generation of stepped part is prevented and covering property is improved. For example, metal film is formed on the semiconductor substrate 10 by the anode 6 and the cathode (target) 7. The substrate 10 is heated by expanding the beam diameter of the laser beam 15 generated by the Ar, Kr, CO2 or YAG laser oscillator 12 by the optical system 13 and changing advancing direction by reflecting the beam by using the mirror 14 and then, irradiating on the whole back face of the substrate 10 at the same time. Heat of the substrate 10 is transmitted from the substrate 10 to the substrate support tool 9 and the temperature of the substrate 10 is measured by the thermocouple 11. The substrate 10 is easily heated until about 1,000 deg.C by the laser beam irradiation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11967579A JPS5644770A (en) | 1979-09-17 | 1979-09-17 | Preparation of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11967579A JPS5644770A (en) | 1979-09-17 | 1979-09-17 | Preparation of thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5644770A true JPS5644770A (en) | 1981-04-24 |
Family
ID=14767262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11967579A Pending JPS5644770A (en) | 1979-09-17 | 1979-09-17 | Preparation of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5644770A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074517A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Sputtering device |
EP0154561A2 (en) * | 1984-03-07 | 1985-09-11 | General Signal Corporation | Improved apparatus and method for laser-induced chemical vapor deposition |
JPS61245525A (en) * | 1985-04-23 | 1986-10-31 | Fujitsu Ltd | Manufacture of metal thin film |
JPH02163368A (en) * | 1988-12-15 | 1990-06-22 | Matsushita Electric Ind Co Ltd | Sputtering device |
WO2000015864A1 (en) | 1998-09-11 | 2000-03-23 | Japan Science And Technology Corporation | Laser heater |
JP2008025027A (en) * | 2006-06-22 | 2008-02-07 | Fujikura Ltd | Laser heating device for vacuum chamber and apparatus for vacuum process |
CN113957406A (en) * | 2021-10-22 | 2022-01-21 | 埃频(上海)仪器科技有限公司 | Heating device for preparing oxide film |
-
1979
- 1979-09-17 JP JP11967579A patent/JPS5644770A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074517A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Sputtering device |
EP0154561A2 (en) * | 1984-03-07 | 1985-09-11 | General Signal Corporation | Improved apparatus and method for laser-induced chemical vapor deposition |
JPS61245525A (en) * | 1985-04-23 | 1986-10-31 | Fujitsu Ltd | Manufacture of metal thin film |
JPH0420980B2 (en) * | 1985-04-23 | 1992-04-07 | Fujitsu Ltd | |
JPH02163368A (en) * | 1988-12-15 | 1990-06-22 | Matsushita Electric Ind Co Ltd | Sputtering device |
WO2000015864A1 (en) | 1998-09-11 | 2000-03-23 | Japan Science And Technology Corporation | Laser heater |
EP1116802A1 (en) * | 1998-09-11 | 2001-07-18 | Japan Science and Technology Corporation | Laser heater |
US6617539B1 (en) | 1998-09-11 | 2003-09-09 | Japan Science And Technology Kawaguchi | Laser heating apparatus |
EP1116802A4 (en) * | 1998-09-11 | 2004-09-08 | Japan Science & Tech Agency | Laser heater |
JP2008025027A (en) * | 2006-06-22 | 2008-02-07 | Fujikura Ltd | Laser heating device for vacuum chamber and apparatus for vacuum process |
CN113957406A (en) * | 2021-10-22 | 2022-01-21 | 埃频(上海)仪器科技有限公司 | Heating device for preparing oxide film |
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