JPS5633601A - Production of optical parts - Google Patents

Production of optical parts

Info

Publication number
JPS5633601A
JPS5633601A JP10912679A JP10912679A JPS5633601A JP S5633601 A JPS5633601 A JP S5633601A JP 10912679 A JP10912679 A JP 10912679A JP 10912679 A JP10912679 A JP 10912679A JP S5633601 A JPS5633601 A JP S5633601A
Authority
JP
Japan
Prior art keywords
ion implantation
ion
controlling
optical
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10912679A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Kenichi Asanami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP10912679A priority Critical patent/JPS5633601A/en
Publication of JPS5633601A publication Critical patent/JPS5633601A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE:To achieve the improvement in the characteristics of optical filters and the like and make them more stable and more accurate by applying ion implantation treatment of the surface of a transparent material and changing and controlling the optical characteristics such as light transmittance and reflectance thereof. CONSTITUTION:Phosphorus ions 3 are implanted on a substrate 1 of sapphire etc. by a CVD method etc., to form an ion implanted layer 4. The transmittance of tungsten white light is changed by this ion implantation and the light transmittance decreases by increasing the amount of phosphorus ion implanation. The application of surface treatment of the optical parts etc. by the ion implantation in this way may be stably performed with good reproducibility by controlling the amount or depth of ion implantation, implantation current and acceleration energy.
JP10912679A 1979-08-29 1979-08-29 Production of optical parts Pending JPS5633601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10912679A JPS5633601A (en) 1979-08-29 1979-08-29 Production of optical parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10912679A JPS5633601A (en) 1979-08-29 1979-08-29 Production of optical parts

Publications (1)

Publication Number Publication Date
JPS5633601A true JPS5633601A (en) 1981-04-04

Family

ID=14502220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10912679A Pending JPS5633601A (en) 1979-08-29 1979-08-29 Production of optical parts

Country Status (1)

Country Link
JP (1) JPS5633601A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0189210A2 (en) * 1985-01-24 1986-07-30 Cuv "Progres" Process for producing light and heat sources with an improved radiating capacity
EP0608202A1 (en) * 1993-01-22 1994-07-27 SOCIETA' ITALIANA VETRO - SIV - S.p.A. Filter for solar radiation, particularly suitable for sunglass lenses
WO2014126551A1 (en) * 2013-02-12 2014-08-21 Apple Inc. Multi-step ion implantation
US10280504B2 (en) 2015-09-25 2019-05-07 Apple Inc. Ion-implanted, anti-reflective layer formed within sapphire material

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0189210A2 (en) * 1985-01-24 1986-07-30 Cuv "Progres" Process for producing light and heat sources with an improved radiating capacity
EP0608202A1 (en) * 1993-01-22 1994-07-27 SOCIETA' ITALIANA VETRO - SIV - S.p.A. Filter for solar radiation, particularly suitable for sunglass lenses
WO2014126551A1 (en) * 2013-02-12 2014-08-21 Apple Inc. Multi-step ion implantation
US9828668B2 (en) 2013-02-12 2017-11-28 Apple Inc. Multi-step ion implantation
US10280504B2 (en) 2015-09-25 2019-05-07 Apple Inc. Ion-implanted, anti-reflective layer formed within sapphire material

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