JPS5632658A - Scanning type electron microscope - Google Patents
Scanning type electron microscopeInfo
- Publication number
- JPS5632658A JPS5632658A JP10753979A JP10753979A JPS5632658A JP S5632658 A JPS5632658 A JP S5632658A JP 10753979 A JP10753979 A JP 10753979A JP 10753979 A JP10753979 A JP 10753979A JP S5632658 A JPS5632658 A JP S5632658A
- Authority
- JP
- Japan
- Prior art keywords
- plinth
- flame
- spherical
- inspected
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Abstract
PURPOSE:To perform a nondestructive inspection and an observation of a large structure as well as to obtain a bright image of an object to be inspected, by mounting above the object a mirror flame and a semi-spherical plinth for tiltably mounting the flame thereon by means of their respective vacuum seals. CONSTITUTION:A mirror flame 1, which has an inwardly extending vacuum seal means 16 consisting of a ring packing or the like at an opening end 15 thereof, is mounted on a hollow semi-spherical plinth 17 having an opening 18 for allowing electron-beam to pass therethrough. This plinth 17 is in turn mounted on the surface of a large structure 20 or the like via a vacuum sealing means 19 constituted of a ring packing or the like and provided on the bottom surface of the spherical plinth 17. Then, after evacuating the so-constituted chamber through a port 12, a signal 10 of a secondary electron beam or a specific X-ray is detected by a detector 11, thereby by inclining the frame 1 along the semispherical surface and adjusting the inclination so as to make larger the angle theta between an incoming electron-beam 3 and the surface 20A of the structure 20 which is to be inspected, thus a bright and detail image can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10753979A JPS5632658A (en) | 1979-08-23 | 1979-08-23 | Scanning type electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10753979A JPS5632658A (en) | 1979-08-23 | 1979-08-23 | Scanning type electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5632658A true JPS5632658A (en) | 1981-04-02 |
Family
ID=14461747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10753979A Pending JPS5632658A (en) | 1979-08-23 | 1979-08-23 | Scanning type electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5632658A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007188821A (en) * | 2006-01-16 | 2007-07-26 | Univ Osaka Sangyo | Handy electron microscope |
| EP2043131A3 (en) * | 2000-11-02 | 2009-07-08 | Hitachi Ltd. | Minute sample processing method |
-
1979
- 1979-08-23 JP JP10753979A patent/JPS5632658A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2043131A3 (en) * | 2000-11-02 | 2009-07-08 | Hitachi Ltd. | Minute sample processing method |
| US7888639B2 (en) | 2000-11-02 | 2011-02-15 | Hitachi, Ltd. | Method and apparatus for processing a micro sample |
| US8222618B2 (en) | 2000-11-02 | 2012-07-17 | Hitachi, Ltd. | Method and apparatus for processing a microsample |
| US8618520B2 (en) | 2000-11-02 | 2013-12-31 | Hitachi, Ltd. | Method and apparatus for processing a micro sample |
| JP2007188821A (en) * | 2006-01-16 | 2007-07-26 | Univ Osaka Sangyo | Handy electron microscope |
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