JPS52149062A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS52149062A
JPS52149062A JP6558076A JP6558076A JPS52149062A JP S52149062 A JPS52149062 A JP S52149062A JP 6558076 A JP6558076 A JP 6558076A JP 6558076 A JP6558076 A JP 6558076A JP S52149062 A JPS52149062 A JP S52149062A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
sample
joining
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6558076A
Other languages
Japanese (ja)
Inventor
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6558076A priority Critical patent/JPS52149062A/en
Publication of JPS52149062A publication Critical patent/JPS52149062A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a scanning electronic microscope which can have observation to the local defect of a large-size test sample by joining the sample and the vacuum sealing section in accordance with the sample shape.
COPYRIGHT: (C)1977,JPO&Japio
JP6558076A 1976-06-07 1976-06-07 Scanning electronic microscope Pending JPS52149062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6558076A JPS52149062A (en) 1976-06-07 1976-06-07 Scanning electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6558076A JPS52149062A (en) 1976-06-07 1976-06-07 Scanning electronic microscope

Publications (1)

Publication Number Publication Date
JPS52149062A true JPS52149062A (en) 1977-12-10

Family

ID=13291078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6558076A Pending JPS52149062A (en) 1976-06-07 1976-06-07 Scanning electronic microscope

Country Status (1)

Country Link
JP (1) JPS52149062A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638756A (en) * 1979-07-03 1981-04-14 Unisearch Ltd Atmospheric scanning electron microscope
JPS57115751A (en) * 1981-01-08 1982-07-19 Mitsubishi Heavy Ind Ltd Scanning electron microscope
JPS60136048U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment
JPS60136046U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638756A (en) * 1979-07-03 1981-04-14 Unisearch Ltd Atmospheric scanning electron microscope
JPH0421302B2 (en) * 1979-07-03 1992-04-09 Unisearch Ltd
JPS57115751A (en) * 1981-01-08 1982-07-19 Mitsubishi Heavy Ind Ltd Scanning electron microscope
JPS60136048U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment
JPS60136046U (en) * 1984-12-27 1985-09-10 三菱重工業株式会社 scanning electron microscope equipment

Similar Documents

Publication Publication Date Title
JPS52149062A (en) Scanning electronic microscope
JPS52129319A (en) Photographing method of welded area
JPS5244158A (en) Scanning electronic microscope
JPS5381153A (en) Inspecting apparatus for positions of object to be inspected
JPS5418269A (en) Electron beam detector
JPS5339847A (en) Scanning electronic microscope
JPS5421790A (en) Sealing defect detector of canned products
JPS5344075A (en) Ultrasonic inspecting method
JPS54107254A (en) Scanning-type electron microscope
JPS52123163A (en) Reflection electron image observation unit for scanning type electroni c microscope
JPS538061A (en) Automatic positioning apparatus of articles
JPS51140755A (en) Equipment for inspecting shape of articles
JPS52104865A (en) X-ray analysis apparatus in electronic microscope or like
JPS5423465A (en) Electronic microscope
JPS52106268A (en) Scanning type electronic microscope and its method
JPS53140963A (en) Scanning electronic microscope
JPS5366152A (en) Electron microscope
JPS52104862A (en) Scanning electronic microscope
JPS5244229A (en) Method of making serological reagent for syphilis
JPS5235976A (en) Testing image display unit
JPS51142311A (en) Method for examining a visual function by leadinga visual line in an o phthalmological instrument
JPS53108275A (en) Scanning electronic microscope
JPS5342094A (en) Defect length measuring device
JPS5465819A (en) Connection of branch pipe
JPS526074A (en) Display unit for an electronic microscope