JPS5632316A - Manufacture of sic superfine particle - Google Patents
Manufacture of sic superfine particleInfo
- Publication number
- JPS5632316A JPS5632316A JP10508679A JP10508679A JPS5632316A JP S5632316 A JPS5632316 A JP S5632316A JP 10508679 A JP10508679 A JP 10508679A JP 10508679 A JP10508679 A JP 10508679A JP S5632316 A JPS5632316 A JP S5632316A
- Authority
- JP
- Japan
- Prior art keywords
- torch
- plasma
- gas
- starting material
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To economically manufacture high purity SiC superfine particles with a small-sized apparatus by generating stable plasma in a reaction system and introducing a starting material gas into the system.
CONSTITUTION: A gas for plasma is introduced into torch 1 from introduction pipe 14 through flow meter 15 to generate plasma in torch 1 with graphite rod 9 protruded into torch 1 and work coil 10 working with high frequency power source 12. After pulling up rod 9 from torch 1, a carrier gas is fed from introduction pipe 16 through flow meter 15 to evaporate liq. starting material such as methyltrichlorosilane in vessel 18, and the vapor is introduced into torch 1 together with the carrier gas and reacted. SiC superfine particles thus formed are collected in precipitation chamber 11.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54105086A JPS5825045B2 (en) | 1979-08-20 | 1979-08-20 | Method for producing SiC ultrafine particles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54105086A JPS5825045B2 (en) | 1979-08-20 | 1979-08-20 | Method for producing SiC ultrafine particles |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5632316A true JPS5632316A (en) | 1981-04-01 |
JPS5825045B2 JPS5825045B2 (en) | 1983-05-25 |
Family
ID=14398101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54105086A Expired JPS5825045B2 (en) | 1979-08-20 | 1979-08-20 | Method for producing SiC ultrafine particles |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5825045B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59131509A (en) * | 1983-01-17 | 1984-07-28 | Shin Etsu Chem Co Ltd | Preparation of silicon carbide |
JPS60239316A (en) * | 1984-05-11 | 1985-11-28 | Natl Inst For Res In Inorg Mater | Manufacture of hyperfine sic powder |
EP0199482A2 (en) * | 1985-04-04 | 1986-10-29 | Nippon Steel Corporation | Processes for producing silicon carbide particles and sinter |
KR101101197B1 (en) | 2009-09-02 | 2012-01-04 | 한국기초과학지원연구원 | Synthesis system for SiC particles by plasmajet and synthesis methods |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022520A (en) * | 1973-06-27 | 1975-03-11 |
-
1979
- 1979-08-20 JP JP54105086A patent/JPS5825045B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022520A (en) * | 1973-06-27 | 1975-03-11 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59131509A (en) * | 1983-01-17 | 1984-07-28 | Shin Etsu Chem Co Ltd | Preparation of silicon carbide |
JPS6359967B2 (en) * | 1983-01-17 | 1988-11-22 | ||
JPS60239316A (en) * | 1984-05-11 | 1985-11-28 | Natl Inst For Res In Inorg Mater | Manufacture of hyperfine sic powder |
JPH0124727B2 (en) * | 1984-05-11 | 1989-05-12 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | |
EP0199482A2 (en) * | 1985-04-04 | 1986-10-29 | Nippon Steel Corporation | Processes for producing silicon carbide particles and sinter |
KR101101197B1 (en) | 2009-09-02 | 2012-01-04 | 한국기초과학지원연구원 | Synthesis system for SiC particles by plasmajet and synthesis methods |
Also Published As
Publication number | Publication date |
---|---|
JPS5825045B2 (en) | 1983-05-25 |
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