JPS5632316A - Manufacture of sic superfine particle - Google Patents

Manufacture of sic superfine particle

Info

Publication number
JPS5632316A
JPS5632316A JP10508679A JP10508679A JPS5632316A JP S5632316 A JPS5632316 A JP S5632316A JP 10508679 A JP10508679 A JP 10508679A JP 10508679 A JP10508679 A JP 10508679A JP S5632316 A JPS5632316 A JP S5632316A
Authority
JP
Japan
Prior art keywords
torch
plasma
gas
starting material
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10508679A
Other languages
Japanese (ja)
Other versions
JPS5825045B2 (en
Inventor
Takashi Inukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP54105086A priority Critical patent/JPS5825045B2/en
Publication of JPS5632316A publication Critical patent/JPS5632316A/en
Publication of JPS5825045B2 publication Critical patent/JPS5825045B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To economically manufacture high purity SiC superfine particles with a small-sized apparatus by generating stable plasma in a reaction system and introducing a starting material gas into the system.
CONSTITUTION: A gas for plasma is introduced into torch 1 from introduction pipe 14 through flow meter 15 to generate plasma in torch 1 with graphite rod 9 protruded into torch 1 and work coil 10 working with high frequency power source 12. After pulling up rod 9 from torch 1, a carrier gas is fed from introduction pipe 16 through flow meter 15 to evaporate liq. starting material such as methyltrichlorosilane in vessel 18, and the vapor is introduced into torch 1 together with the carrier gas and reacted. SiC superfine particles thus formed are collected in precipitation chamber 11.
COPYRIGHT: (C)1981,JPO&Japio
JP54105086A 1979-08-20 1979-08-20 Method for producing SiC ultrafine particles Expired JPS5825045B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54105086A JPS5825045B2 (en) 1979-08-20 1979-08-20 Method for producing SiC ultrafine particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54105086A JPS5825045B2 (en) 1979-08-20 1979-08-20 Method for producing SiC ultrafine particles

Publications (2)

Publication Number Publication Date
JPS5632316A true JPS5632316A (en) 1981-04-01
JPS5825045B2 JPS5825045B2 (en) 1983-05-25

Family

ID=14398101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54105086A Expired JPS5825045B2 (en) 1979-08-20 1979-08-20 Method for producing SiC ultrafine particles

Country Status (1)

Country Link
JP (1) JPS5825045B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131509A (en) * 1983-01-17 1984-07-28 Shin Etsu Chem Co Ltd Preparation of silicon carbide
JPS60239316A (en) * 1984-05-11 1985-11-28 Natl Inst For Res In Inorg Mater Manufacture of hyperfine sic powder
EP0199482A2 (en) * 1985-04-04 1986-10-29 Nippon Steel Corporation Processes for producing silicon carbide particles and sinter
KR101101197B1 (en) 2009-09-02 2012-01-04 한국기초과학지원연구원 Synthesis system for SiC particles by plasmajet and synthesis methods

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022520A (en) * 1973-06-27 1975-03-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022520A (en) * 1973-06-27 1975-03-11

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131509A (en) * 1983-01-17 1984-07-28 Shin Etsu Chem Co Ltd Preparation of silicon carbide
JPS6359967B2 (en) * 1983-01-17 1988-11-22
JPS60239316A (en) * 1984-05-11 1985-11-28 Natl Inst For Res In Inorg Mater Manufacture of hyperfine sic powder
JPH0124727B2 (en) * 1984-05-11 1989-05-12 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho
EP0199482A2 (en) * 1985-04-04 1986-10-29 Nippon Steel Corporation Processes for producing silicon carbide particles and sinter
KR101101197B1 (en) 2009-09-02 2012-01-04 한국기초과학지원연구원 Synthesis system for SiC particles by plasmajet and synthesis methods

Also Published As

Publication number Publication date
JPS5825045B2 (en) 1983-05-25

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