JPS57149815A - Manufacture of granular silicon - Google Patents

Manufacture of granular silicon

Info

Publication number
JPS57149815A
JPS57149815A JP3147681A JP3147681A JPS57149815A JP S57149815 A JPS57149815 A JP S57149815A JP 3147681 A JP3147681 A JP 3147681A JP 3147681 A JP3147681 A JP 3147681A JP S57149815 A JPS57149815 A JP S57149815A
Authority
JP
Japan
Prior art keywords
cooling
gaseous
gas
droplets
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3147681A
Other languages
Japanese (ja)
Inventor
Jinichiro Hasegawa
Kiyoshi Kaneko
Yoshihiro Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP3147681A priority Critical patent/JPS57149815A/en
Publication of JPS57149815A publication Critical patent/JPS57149815A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To manufacture fine silicon particles easily and inexpensively without polluting environment by melting a high purity silicon rod by contact with a plasma flame in an inert atmosphere, converting the melt into atomized droplets with a gaseous flow, and cooling the droplets.
CONSTITUTION: Gaseous Ar, etc. are fed from the gas feeding inlet 6 and the stable gas feeding inlet 7 of a plasma torch 2, and a high frequency power source is applied to generate a plasma flame 8. A high purity silicon rod 9 is lowered with a feeder 3 and melted by contact with the flame 8. By feeding gaseous Ar or the like from a cooling gas leading inlet 4, the melt carried by the gaseous flow for plasma is dispersed as atomized droplets and carried forward. The droplets are solidified to fine powder by cooling with a cooling tube 11 and a cooling gas from an end 13, the powder is introduced into a storage tank 5, and the gaseous Ar is exhausted from an exhaust port 12. The internal gas of the apparatus 1 is replaced with an inert gas beforehand.
COPYRIGHT: (C)1982,JPO&Japio
JP3147681A 1981-03-05 1981-03-05 Manufacture of granular silicon Pending JPS57149815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3147681A JPS57149815A (en) 1981-03-05 1981-03-05 Manufacture of granular silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3147681A JPS57149815A (en) 1981-03-05 1981-03-05 Manufacture of granular silicon

Publications (1)

Publication Number Publication Date
JPS57149815A true JPS57149815A (en) 1982-09-16

Family

ID=12332308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3147681A Pending JPS57149815A (en) 1981-03-05 1981-03-05 Manufacture of granular silicon

Country Status (1)

Country Link
JP (1) JPS57149815A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182091A (en) * 1990-05-30 1993-01-26 Kawasaki Steel Corporation Method and apparatus for purifying silicon
CN102951643A (en) * 2012-10-15 2013-03-06 宁波广博纳米新材料股份有限公司 Production method of nano-grade spherical silica powder
CN103241740A (en) * 2013-05-23 2013-08-14 苏州金瑞晨科技有限公司 Preparation method of nanosphere silicon with silicon-hydrogen shell

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5182091A (en) * 1990-05-30 1993-01-26 Kawasaki Steel Corporation Method and apparatus for purifying silicon
CN102951643A (en) * 2012-10-15 2013-03-06 宁波广博纳米新材料股份有限公司 Production method of nano-grade spherical silica powder
CN103241740A (en) * 2013-05-23 2013-08-14 苏州金瑞晨科技有限公司 Preparation method of nanosphere silicon with silicon-hydrogen shell

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