JPS57149815A - Manufacture of granular silicon - Google Patents
Manufacture of granular siliconInfo
- Publication number
- JPS57149815A JPS57149815A JP3147681A JP3147681A JPS57149815A JP S57149815 A JPS57149815 A JP S57149815A JP 3147681 A JP3147681 A JP 3147681A JP 3147681 A JP3147681 A JP 3147681A JP S57149815 A JPS57149815 A JP S57149815A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- gaseous
- gas
- droplets
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To manufacture fine silicon particles easily and inexpensively without polluting environment by melting a high purity silicon rod by contact with a plasma flame in an inert atmosphere, converting the melt into atomized droplets with a gaseous flow, and cooling the droplets.
CONSTITUTION: Gaseous Ar, etc. are fed from the gas feeding inlet 6 and the stable gas feeding inlet 7 of a plasma torch 2, and a high frequency power source is applied to generate a plasma flame 8. A high purity silicon rod 9 is lowered with a feeder 3 and melted by contact with the flame 8. By feeding gaseous Ar or the like from a cooling gas leading inlet 4, the melt carried by the gaseous flow for plasma is dispersed as atomized droplets and carried forward. The droplets are solidified to fine powder by cooling with a cooling tube 11 and a cooling gas from an end 13, the powder is introduced into a storage tank 5, and the gaseous Ar is exhausted from an exhaust port 12. The internal gas of the apparatus 1 is replaced with an inert gas beforehand.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3147681A JPS57149815A (en) | 1981-03-05 | 1981-03-05 | Manufacture of granular silicon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3147681A JPS57149815A (en) | 1981-03-05 | 1981-03-05 | Manufacture of granular silicon |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57149815A true JPS57149815A (en) | 1982-09-16 |
Family
ID=12332308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3147681A Pending JPS57149815A (en) | 1981-03-05 | 1981-03-05 | Manufacture of granular silicon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57149815A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5182091A (en) * | 1990-05-30 | 1993-01-26 | Kawasaki Steel Corporation | Method and apparatus for purifying silicon |
CN102951643A (en) * | 2012-10-15 | 2013-03-06 | 宁波广博纳米新材料股份有限公司 | Production method of nano-grade spherical silica powder |
CN103241740A (en) * | 2013-05-23 | 2013-08-14 | 苏州金瑞晨科技有限公司 | Preparation method of nanosphere silicon with silicon-hydrogen shell |
-
1981
- 1981-03-05 JP JP3147681A patent/JPS57149815A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5182091A (en) * | 1990-05-30 | 1993-01-26 | Kawasaki Steel Corporation | Method and apparatus for purifying silicon |
CN102951643A (en) * | 2012-10-15 | 2013-03-06 | 宁波广博纳米新材料股份有限公司 | Production method of nano-grade spherical silica powder |
CN103241740A (en) * | 2013-05-23 | 2013-08-14 | 苏州金瑞晨科技有限公司 | Preparation method of nanosphere silicon with silicon-hydrogen shell |
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