JPS5632316A - Manufacture of sic superfine particle - Google Patents

Manufacture of sic superfine particle

Info

Publication number
JPS5632316A
JPS5632316A JP10508679A JP10508679A JPS5632316A JP S5632316 A JPS5632316 A JP S5632316A JP 10508679 A JP10508679 A JP 10508679A JP 10508679 A JP10508679 A JP 10508679A JP S5632316 A JPS5632316 A JP S5632316A
Authority
JP
Japan
Prior art keywords
torch
plasma
gas
starting material
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10508679A
Other languages
English (en)
Other versions
JPS5825045B2 (ja
Inventor
Takashi Inukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP54105086A priority Critical patent/JPS5825045B2/ja
Publication of JPS5632316A publication Critical patent/JPS5632316A/ja
Publication of JPS5825045B2 publication Critical patent/JPS5825045B2/ja
Expired legal-status Critical Current

Links

JP54105086A 1979-08-20 1979-08-20 ＳｉＣ超微粒子の製造方法 Expired JPS5825045B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54105086A JPS5825045B2 (ja) 1979-08-20 1979-08-20 ＳｉＣ超微粒子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54105086A JPS5825045B2 (ja) 1979-08-20 1979-08-20 ＳｉＣ超微粒子の製造方法

Publications (2)

Publication Number Publication Date
JPS5632316A true JPS5632316A (en) 1981-04-01
JPS5825045B2 JPS5825045B2 (ja) 1983-05-25

Family

ID=14398101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54105086A Expired JPS5825045B2 (ja) 1979-08-20 1979-08-20 ＳｉＣ超微粒子の製造方法

Country Status (1)

Country Link
JP (1) JPS5825045B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131509A (ja) * 1983-01-17 1984-07-28 Shin Etsu Chem Co Ltd 炭化けい素の製造方法
JPS60239316A (ja) * 1984-05-11 1985-11-28 Natl Inst For Res In Inorg Mater ＳｉＣ超微粉末の製造方法
EP0199482A2 (en) * 1985-04-04 1986-10-29 Nippon Steel Corporation Processes for producing silicon carbide particles and sinter
KR101101197B1 (ko) 2009-09-02 2012-01-04 한국기초과학지원연구원 플라즈마젯에 의한 탄화규소(ＳｉＣ) 분말 합성장치 및 합성방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022520A (ja) * 1973-06-27 1975-03-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022520A (ja) * 1973-06-27 1975-03-11

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131509A (ja) * 1983-01-17 1984-07-28 Shin Etsu Chem Co Ltd 炭化けい素の製造方法
JPS6359967B2 (ja) * 1983-01-17 1988-11-22
JPS60239316A (ja) * 1984-05-11 1985-11-28 Natl Inst For Res In Inorg Mater ＳｉＣ超微粉末の製造方法
JPH0124727B2 (ja) * 1984-05-11 1989-05-12 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho
EP0199482A2 (en) * 1985-04-04 1986-10-29 Nippon Steel Corporation Processes for producing silicon carbide particles and sinter
KR101101197B1 (ko) 2009-09-02 2012-01-04 한국기초과학지원연구원 플라즈마젯에 의한 탄화규소(ＳｉＣ) 분말 합성장치 및 합성방법

Also Published As

Publication number Publication date
JPS5825045B2 (ja) 1983-05-25

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