JPS5618444A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5618444A JPS5618444A JP9377479A JP9377479A JPS5618444A JP S5618444 A JPS5618444 A JP S5618444A JP 9377479 A JP9377479 A JP 9377479A JP 9377479 A JP9377479 A JP 9377479A JP S5618444 A JPS5618444 A JP S5618444A
- Authority
- JP
- Japan
- Prior art keywords
- aluminium
- semiconductor device
- purity
- alpha
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Conductive Materials (AREA)
Abstract
PURPOSE:To prevent a decline of reliability of the semiconductor device due to an alpha-ray by a method wherein a wiring layer of a high-purity aluminium or aluminium alloy. CONSTITUTION:The wiring layer is formed by aluminium or aluminium alloy having a high purity of 99.9999% or above. These wirings are formed, for instance, by evaporating with an electron beam using a source of evaporation of aluminium having a purity of 99.9999% or above, or by evaporating both said aluminium and a high-purity silicon or copper. As a result, the decline of reliability of the semiconductor device due to an alpha-ray can be prevented by reducing the alpha-ray radiation from the wiring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9377479A JPS5618444A (en) | 1979-07-25 | 1979-07-25 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9377479A JPS5618444A (en) | 1979-07-25 | 1979-07-25 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5618444A true JPS5618444A (en) | 1981-02-21 |
Family
ID=14091761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9377479A Pending JPS5618444A (en) | 1979-07-25 | 1979-07-25 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5618444A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57190703U (en) * | 1981-05-29 | 1982-12-03 | ||
JPS6445208A (en) * | 1988-05-02 | 1989-02-17 | Shimadaya Honten Kk | Automatic packing machine |
JPH01137099A (en) * | 1987-11-25 | 1989-05-30 | Teijin Petrochem Ind Ltd | Fixing material used for method of fixing construction of bolt |
JPH01137100A (en) * | 1987-11-25 | 1989-05-30 | Teijin Petrochem Ind Ltd | Anchor bolt fixing material |
JPH05338606A (en) * | 1992-06-10 | 1993-12-21 | Toyo Shoji:Kk | Packing method and device therefor |
JP2016196695A (en) * | 2015-04-06 | 2016-11-24 | 住友化学株式会社 | High purity aluminum grain material and manufacturing method therefor |
-
1979
- 1979-07-25 JP JP9377479A patent/JPS5618444A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57190703U (en) * | 1981-05-29 | 1982-12-03 | ||
JPH01137099A (en) * | 1987-11-25 | 1989-05-30 | Teijin Petrochem Ind Ltd | Fixing material used for method of fixing construction of bolt |
JPH01137100A (en) * | 1987-11-25 | 1989-05-30 | Teijin Petrochem Ind Ltd | Anchor bolt fixing material |
JPS6445208A (en) * | 1988-05-02 | 1989-02-17 | Shimadaya Honten Kk | Automatic packing machine |
JPH05338606A (en) * | 1992-06-10 | 1993-12-21 | Toyo Shoji:Kk | Packing method and device therefor |
JP2016196695A (en) * | 2015-04-06 | 2016-11-24 | 住友化学株式会社 | High purity aluminum grain material and manufacturing method therefor |
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