JPS5618444A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5618444A
JPS5618444A JP9377479A JP9377479A JPS5618444A JP S5618444 A JPS5618444 A JP S5618444A JP 9377479 A JP9377479 A JP 9377479A JP 9377479 A JP9377479 A JP 9377479A JP S5618444 A JPS5618444 A JP S5618444A
Authority
JP
Japan
Prior art keywords
aluminium
semiconductor device
purity
alpha
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9377479A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9377479A priority Critical patent/JPS5618444A/en
Publication of JPS5618444A publication Critical patent/JPS5618444A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Conductive Materials (AREA)

Abstract

PURPOSE:To prevent a decline of reliability of the semiconductor device due to an alpha-ray by a method wherein a wiring layer of a high-purity aluminium or aluminium alloy. CONSTITUTION:The wiring layer is formed by aluminium or aluminium alloy having a high purity of 99.9999% or above. These wirings are formed, for instance, by evaporating with an electron beam using a source of evaporation of aluminium having a purity of 99.9999% or above, or by evaporating both said aluminium and a high-purity silicon or copper. As a result, the decline of reliability of the semiconductor device due to an alpha-ray can be prevented by reducing the alpha-ray radiation from the wiring.
JP9377479A 1979-07-25 1979-07-25 Manufacture of semiconductor device Pending JPS5618444A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9377479A JPS5618444A (en) 1979-07-25 1979-07-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9377479A JPS5618444A (en) 1979-07-25 1979-07-25 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5618444A true JPS5618444A (en) 1981-02-21

Family

ID=14091761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9377479A Pending JPS5618444A (en) 1979-07-25 1979-07-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5618444A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190703U (en) * 1981-05-29 1982-12-03
JPS6445208A (en) * 1988-05-02 1989-02-17 Shimadaya Honten Kk Automatic packing machine
JPH01137099A (en) * 1987-11-25 1989-05-30 Teijin Petrochem Ind Ltd Fixing material used for method of fixing construction of bolt
JPH01137100A (en) * 1987-11-25 1989-05-30 Teijin Petrochem Ind Ltd Anchor bolt fixing material
JPH05338606A (en) * 1992-06-10 1993-12-21 Toyo Shoji:Kk Packing method and device therefor
JP2016196695A (en) * 2015-04-06 2016-11-24 住友化学株式会社 High purity aluminum grain material and manufacturing method therefor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190703U (en) * 1981-05-29 1982-12-03
JPH01137099A (en) * 1987-11-25 1989-05-30 Teijin Petrochem Ind Ltd Fixing material used for method of fixing construction of bolt
JPH01137100A (en) * 1987-11-25 1989-05-30 Teijin Petrochem Ind Ltd Anchor bolt fixing material
JPS6445208A (en) * 1988-05-02 1989-02-17 Shimadaya Honten Kk Automatic packing machine
JPH05338606A (en) * 1992-06-10 1993-12-21 Toyo Shoji:Kk Packing method and device therefor
JP2016196695A (en) * 2015-04-06 2016-11-24 住友化学株式会社 High purity aluminum grain material and manufacturing method therefor

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