JPS56145307A - Measuring method for size of minute pattern - Google Patents

Measuring method for size of minute pattern

Info

Publication number
JPS56145307A
JPS56145307A JP3520980A JP3520980A JPS56145307A JP S56145307 A JPS56145307 A JP S56145307A JP 3520980 A JP3520980 A JP 3520980A JP 3520980 A JP3520980 A JP 3520980A JP S56145307 A JPS56145307 A JP S56145307A
Authority
JP
Japan
Prior art keywords
minute pattern
pattern
size
reflected lights
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3520980A
Other languages
Japanese (ja)
Inventor
Michiyuki Sugihara
Kunio Asayama
Tsunehisa Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP3520980A priority Critical patent/JPS56145307A/en
Publication of JPS56145307A publication Critical patent/JPS56145307A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure the size of the minute pattern with high precision by simple operation by applying a method of dark-field illumination and by taking out as an optical image signal the contrast of reflected lights from the minute pattern and the surroundings obtained by the method. CONSTITUTION:The minute pattern 2 with end parts 21 shaped in a tapered form is formed on a base plate 1, and in the state that an object lens 3 nearly parallel to the base plate 1 is arranged above the minute pattern 2, a light 4 is applied aslant to the minute pattern 2 by using the dark-field illumination method. Then the reflected lights 51 from the flat part 22 of the pattern 2 and from the flat base plate 1 are obtained as a black image, since they do not enter the object lens 3. On the other hand, the reflected lights 52 from the end parts 21 of the pattern 2 are obtained as a white image. Accordingly, said contrast of the reflected lights is taken out as the optical image signal, and based on this signal, the size of the minute pattern is measured.
JP3520980A 1980-03-19 1980-03-19 Measuring method for size of minute pattern Pending JPS56145307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3520980A JPS56145307A (en) 1980-03-19 1980-03-19 Measuring method for size of minute pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3520980A JPS56145307A (en) 1980-03-19 1980-03-19 Measuring method for size of minute pattern

Publications (1)

Publication Number Publication Date
JPS56145307A true JPS56145307A (en) 1981-11-12

Family

ID=12435448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3520980A Pending JPS56145307A (en) 1980-03-19 1980-03-19 Measuring method for size of minute pattern

Country Status (1)

Country Link
JP (1) JPS56145307A (en)

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