JPS55411A - Surface roughness measurement with laser beam - Google Patents
Surface roughness measurement with laser beamInfo
- Publication number
- JPS55411A JPS55411A JP4412778A JP4412778A JPS55411A JP S55411 A JPS55411 A JP S55411A JP 4412778 A JP4412778 A JP 4412778A JP 4412778 A JP4412778 A JP 4412778A JP S55411 A JPS55411 A JP S55411A
- Authority
- JP
- Japan
- Prior art keywords
- surface roughness
- scattered
- sample
- fourier transforming
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To obtain the stable measurement results by determining the surface roughness with the use of a calibration curve from the optical intensity at the origin of a spacial frequency axis on the Fourier transforming plane of a scattered light.
CONSTITUTION: The beam from a laser light source 1 is changed into a parallel beam by a lens 3 to enter a transparent replica 4, which is taken out of a sample surface, so that it is scattered by the irregular surface roughness thereof. After that, the scattered beam is focused on a Fourier transforming plane a by a Fourier transforming lens 5. since there is arranged at the origin of the spacial frequency axis of the plane a a phototransistor 6 which has a minute light receiving surface, the scattered beam of the replica 4 illuminates this so that it has an output corresponding to the illumination. As a result, if the relationship between the output of the transistor 6 and the surface roughness is calibrated in advance with the use of a sample having a known surface roughness, the stable measurement results of the surface roughness can be determined from the output of the transistor 6. Incidentally, the transparent replica can be replaced by a split which has an inclination of about 45 degrees with respect to the parallel beam from the reflective rough sample.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4412778A JPS55411A (en) | 1978-04-17 | 1978-04-17 | Surface roughness measurement with laser beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4412778A JPS55411A (en) | 1978-04-17 | 1978-04-17 | Surface roughness measurement with laser beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55411A true JPS55411A (en) | 1980-01-05 |
Family
ID=12682937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4412778A Pending JPS55411A (en) | 1978-04-17 | 1978-04-17 | Surface roughness measurement with laser beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55411A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61113002U (en) * | 1984-12-28 | 1986-07-17 | ||
JP2007007122A (en) * | 2005-06-30 | 2007-01-18 | Japan Pionics Co Ltd | Flat heater for bedding, mat and bed using the heater |
JP2009198340A (en) * | 2008-02-22 | 2009-09-03 | Hitachi High-Technologies Corp | Electron microscope system, and film thickness reduction amount evaluation method of resist pattern using it |
-
1978
- 1978-04-17 JP JP4412778A patent/JPS55411A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61113002U (en) * | 1984-12-28 | 1986-07-17 | ||
JP2007007122A (en) * | 2005-06-30 | 2007-01-18 | Japan Pionics Co Ltd | Flat heater for bedding, mat and bed using the heater |
JP2009198340A (en) * | 2008-02-22 | 2009-09-03 | Hitachi High-Technologies Corp | Electron microscope system, and film thickness reduction amount evaluation method of resist pattern using it |
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