JPS5778008A - Method and device for controlling automatic forcusing - Google Patents
Method and device for controlling automatic forcusingInfo
- Publication number
- JPS5778008A JPS5778008A JP15374280A JP15374280A JPS5778008A JP S5778008 A JPS5778008 A JP S5778008A JP 15374280 A JP15374280 A JP 15374280A JP 15374280 A JP15374280 A JP 15374280A JP S5778008 A JPS5778008 A JP S5778008A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- signal
- focusing
- control
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
PURPOSE:To control automatic focusing irrespectively of the optical characteristics of objects to be measured, by driving the automatic focusing control of a surface roughness measuring device by normalizing contrast signals obtained when a striped pattern composed of periodical bright and dark zones is projected on the measuring object. CONSTITUTION:A minute pattern 103 is composed of bright and dark zones which are arranged alternately at prescribed intervals. The pattern 103 is irradiated by a white light source 102 and projected on the surface of an object 13 to be measured. lights reflected by the object 13 again pass through an objective lens 12 and form images at an array sensor 105. The image formed at the sensor 105 is transformed into electric signals. Outputs in the direction (y) S1-S16 are time-serially obtained synchronously to the scanning in the direction (x), and the outputs S1-S16 are added 113 to each other, and then, a contrast signal In is generated 119 through an absolute value circuit 115 and a delay circuit 117. Then, subtractions are performed on the contrast signal In by the output of an average strength calculating circuit 120, and a normalized signal IN is generated 121. Focusing conditions are obtained by performing hill-climbing control, by moving the measuring object 13 against the lens 12 from a focusing control circuit 123 through a focusing control mechanism driving circuit 125 by using the signal IN.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15374280A JPS5778008A (en) | 1980-11-04 | 1980-11-04 | Method and device for controlling automatic forcusing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15374280A JPS5778008A (en) | 1980-11-04 | 1980-11-04 | Method and device for controlling automatic forcusing |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5778008A true JPS5778008A (en) | 1982-05-15 |
Family
ID=15569110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15374280A Pending JPS5778008A (en) | 1980-11-04 | 1980-11-04 | Method and device for controlling automatic forcusing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5778008A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS614011A (en) * | 1984-06-18 | 1986-01-09 | Canon Inc | Automatic tracking device of camera |
JPS6457557A (en) * | 1987-08-28 | 1989-03-03 | Hitachi Ltd | Electron microscope |
JP2007108455A (en) * | 2005-10-14 | 2007-04-26 | Fujifilm Corp | Automatic focusing controller and control method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5331151A (en) * | 1976-09-03 | 1978-03-24 | Hitachi Ltd | Automatic focusing device for microscope |
-
1980
- 1980-11-04 JP JP15374280A patent/JPS5778008A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5331151A (en) * | 1976-09-03 | 1978-03-24 | Hitachi Ltd | Automatic focusing device for microscope |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS614011A (en) * | 1984-06-18 | 1986-01-09 | Canon Inc | Automatic tracking device of camera |
JPS6457557A (en) * | 1987-08-28 | 1989-03-03 | Hitachi Ltd | Electron microscope |
JP2007108455A (en) * | 2005-10-14 | 2007-04-26 | Fujifilm Corp | Automatic focusing controller and control method |
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