JPS56126934A - Appearance inspecting apparatus for semiconductor pellet - Google Patents

Appearance inspecting apparatus for semiconductor pellet

Info

Publication number
JPS56126934A
JPS56126934A JP3111180A JP3111180A JPS56126934A JP S56126934 A JPS56126934 A JP S56126934A JP 3111180 A JP3111180 A JP 3111180A JP 3111180 A JP3111180 A JP 3111180A JP S56126934 A JPS56126934 A JP S56126934A
Authority
JP
Japan
Prior art keywords
pellet
rejected
carrier
appearance
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3111180A
Other languages
Japanese (ja)
Other versions
JPS6136703B2 (en
Inventor
Koichiro Tsutsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3111180A priority Critical patent/JPS56126934A/en
Publication of JPS56126934A publication Critical patent/JPS56126934A/en
Publication of JPS6136703B2 publication Critical patent/JPS6136703B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To improve the workability of an appearance inspection with a microscope by including a function which enables the removal of rejected ones from semiconductor pellets outside the view thereof. CONSTITUTION:A carrier 6 of a pellet5 moves with a pulse motor 2 to detect the pellet and is stopped at a fixed position within the view of a microscope 8. At the same time, the center of the pellet is calculated. When an operation part 4 is moved by an operator for inspecting the appearance thereof, a sliding section 1 linked with this moves allowing the execution of the appearance inspection preventing the pellet carrier 6 from being vibrated. When a pellet is rejected, the center of the pellet 5 is corrected by a value calculated to move the carrier by a corresponding amount whereby the pellet rejected is removed being sucked with a nozzle 11 of a removing section 7. This makes possible the immediate removal of the rejected pellet thereby improving the productivity, however narrow the space may be between the object lens 10 and the pellet or the like.
JP3111180A 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet Granted JPS56126934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3111180A JPS56126934A (en) 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3111180A JPS56126934A (en) 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet

Publications (2)

Publication Number Publication Date
JPS56126934A true JPS56126934A (en) 1981-10-05
JPS6136703B2 JPS6136703B2 (en) 1986-08-20

Family

ID=12322281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3111180A Granted JPS56126934A (en) 1980-03-12 1980-03-12 Appearance inspecting apparatus for semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS56126934A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114130693A (en) * 2021-11-26 2022-03-04 远通五金塑胶制品(深圳)有限公司 Automatic code spraying detection machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114130693A (en) * 2021-11-26 2022-03-04 远通五金塑胶制品(深圳)有限公司 Automatic code spraying detection machine

Also Published As

Publication number Publication date
JPS6136703B2 (en) 1986-08-20

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