JPS56130938A - Inspecting apparatus of semiconductor pellet - Google Patents

Inspecting apparatus of semiconductor pellet

Info

Publication number
JPS56130938A
JPS56130938A JP3446780A JP3446780A JPS56130938A JP S56130938 A JPS56130938 A JP S56130938A JP 3446780 A JP3446780 A JP 3446780A JP 3446780 A JP3446780 A JP 3446780A JP S56130938 A JPS56130938 A JP S56130938A
Authority
JP
Japan
Prior art keywords
pellet
improper
inspecting
unit
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3446780A
Other languages
Japanese (ja)
Inventor
Koichiro Dai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3446780A priority Critical patent/JPS56130938A/en
Publication of JPS56130938A publication Critical patent/JPS56130938A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enhance the workability of inspecting a semiconductor pellet by moving an improper pellet from a pellet appearance inspecting unit to an improper pellet removing unit, thereby immediately removing the improper pellet. CONSTITUTION:This inspecting apparatus consists of a microscope 3 for inspecting the appearance inspection of a semiconductor pellet, a pellet carrying base 1 for placing a semiconductor pellet 2, an automatic position detector 6 for detecting the position of the pellet, an improper pellet removing nozzle 4 for removing the inproper pellet, and an improper pellet projecting unit 5. The base 1 is movable in parallel with the microscope 3 by a pulse motor. When the pellet inspected in the appearance of the surface via a microscope 3 is improper, the improper pellet is automatically moved to the improper pellet removing unit, and immediately removed by the nozzle 4. Thus, the improper pellet removing unit can be mounted even if no space is between the inspecting unit and the microscope, thereby enhancing the workability.
JP3446780A 1980-03-18 1980-03-18 Inspecting apparatus of semiconductor pellet Pending JPS56130938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3446780A JPS56130938A (en) 1980-03-18 1980-03-18 Inspecting apparatus of semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3446780A JPS56130938A (en) 1980-03-18 1980-03-18 Inspecting apparatus of semiconductor pellet

Publications (1)

Publication Number Publication Date
JPS56130938A true JPS56130938A (en) 1981-10-14

Family

ID=12415045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3446780A Pending JPS56130938A (en) 1980-03-18 1980-03-18 Inspecting apparatus of semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS56130938A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011044609A (en) * 2009-08-21 2011-03-03 Shin Etsu Handotai Co Ltd Visual inspection apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011044609A (en) * 2009-08-21 2011-03-03 Shin Etsu Handotai Co Ltd Visual inspection apparatus

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