JPS56125296A - Temperature measurment for crystal growth - Google Patents
Temperature measurment for crystal growthInfo
- Publication number
- JPS56125296A JPS56125296A JP2788580A JP2788580A JPS56125296A JP S56125296 A JPS56125296 A JP S56125296A JP 2788580 A JP2788580 A JP 2788580A JP 2788580 A JP2788580 A JP 2788580A JP S56125296 A JPS56125296 A JP S56125296A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- melt
- thermocouple
- speed
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To control temperature properly, by dropping the temperature measuring end of a thermocouple with the growth of crystal, measuring the temperature of crystal growth while the thermocouple always in contact with melt.
CONSTITUTION: The thermocouple 5 is supported by the supporting member 25 moving on the sliding member 26 by the rotation of the feed screw 24, and the temperature measuring end 5a is brought into contact with melt. In the operation, the feed screw 24 is rotated through the bevel gear 22, the worm and worm wheel 23 by the motor 21. There is a specific relation between the rising speed of the supporting rod 4 which is lifted in response to the growing speed of the crystal 3 and the falling speed of the level. When the thermocouple 5 is droped at the falling speed of the level calculated on the bases of the lifting speed, the temperature measuring end 5a is always in contact with the melt so that the temperature of the melt can be measured directly and accurately.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2788580A JPS56125296A (en) | 1980-03-07 | 1980-03-07 | Temperature measurment for crystal growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2788580A JPS56125296A (en) | 1980-03-07 | 1980-03-07 | Temperature measurment for crystal growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56125296A true JPS56125296A (en) | 1981-10-01 |
Family
ID=12233340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2788580A Pending JPS56125296A (en) | 1980-03-07 | 1980-03-07 | Temperature measurment for crystal growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56125296A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07330484A (en) * | 1994-06-03 | 1995-12-19 | Nippon Steel Corp | Pulling up device and production of silicon single crystal |
US7582160B2 (en) | 2005-06-15 | 2009-09-01 | Siltronic Ag | Silicone single crystal production process |
CN104034447A (en) * | 2014-05-27 | 2014-09-10 | 安徽省计量科学研究院 | Standard device for calibrating dry-type temperature calibrator |
-
1980
- 1980-03-07 JP JP2788580A patent/JPS56125296A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07330484A (en) * | 1994-06-03 | 1995-12-19 | Nippon Steel Corp | Pulling up device and production of silicon single crystal |
US7582160B2 (en) | 2005-06-15 | 2009-09-01 | Siltronic Ag | Silicone single crystal production process |
CN104034447A (en) * | 2014-05-27 | 2014-09-10 | 安徽省计量科学研究院 | Standard device for calibrating dry-type temperature calibrator |
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