JPH10185545A - Shape measuring instrument for quartz crucible - Google Patents
Shape measuring instrument for quartz crucibleInfo
- Publication number
- JPH10185545A JPH10185545A JP34945596A JP34945596A JPH10185545A JP H10185545 A JPH10185545 A JP H10185545A JP 34945596 A JP34945596 A JP 34945596A JP 34945596 A JP34945596 A JP 34945596A JP H10185545 A JPH10185545 A JP H10185545A
- Authority
- JP
- Japan
- Prior art keywords
- work
- base
- measuring unit
- quartz crucible
- platform scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【発明が属する技術分野】本発明はＣＺ単結晶シリコン
を製造するＣＺ法（チョクラルスキ法、又は引き上げ
法）で使用する石英ルツボの形状（外径、高さ、重量）
を測定する測定装置に関する。The present invention relates to the shape (outer diameter, height, weight) of a quartz crucible used in the CZ method (Czochralski method or pulling method) for producing CZ single crystal silicon.
The present invention relates to a measuring device for measuring
【０００２】[0002]
【従来の技術】ＣＺ法は多結晶を石英（ＳｉＯ2 ）のル
ツボの中で、コントロール用活性不純物と共に熔融し、
種結晶棒で徐々に引き上げてＣＺ単結晶シリコンを製造
する。ところで、多結晶を溶かす石英のルツボから微量
の酸素が単結晶の中に入り込んでくる。この単結晶中の
酸素濃度は、ＩＣを製造する上できわめて重要な働きを
している。従って、ＣＺ単結晶の製造工程では、この酸
素濃度やＰ型・Ｎ型と呼ばれる導通型、電気抵抗率が厳
重に、しかもきめ細かくコントロールされ、結晶欠陥の
ない高純度な単結晶シリコンが製造される。2. Description of the Related Art In the CZ method, a polycrystal is melted in a crucible made of quartz (SiO 2 ) together with active impurities for control.
CZ single crystal silicon is manufactured by gradually pulling up with a seed crystal rod. By the way, a small amount of oxygen enters a single crystal from a quartz crucible that melts a polycrystal. The oxygen concentration in the single crystal plays a very important role in manufacturing an IC. Therefore, in the manufacturing process of the CZ single crystal, the oxygen concentration and the conduction type called P-type / N-type and the electrical resistivity are strictly and finely controlled, and high-purity single-crystal silicon without crystal defects is manufactured. .
【０００３】その為、上記ＣＺ法に使用される石英ルツ
ボは成形された後、該ルツボの外径、高さ、重量及び肉
厚が測定され、その測定値が前記単結晶の製造過程にお
いて管理され、それにより製造される単結晶中の酸素濃
度等を管理するようにしている。そこで、上記単結晶の
製造を管理する上で必要となる石英ルツボの形状測定で
あるが、従来外径、高さ及び肉厚の測定は巻尺を用いて
手作業で行い、又、石英ルツボの重量は秤に載せて計測
しているのが実状である。[0003] Therefore, after the quartz crucible used in the CZ method is formed, the outer diameter, height, weight, and thickness of the crucible are measured, and the measured values are controlled in the process of manufacturing the single crystal. Thus, the oxygen concentration and the like in the single crystal manufactured by the method are controlled. Therefore, the shape measurement of the quartz crucible required to control the production of the single crystal is performed. Conventionally, the measurement of the outer diameter, the height, and the thickness is manually performed using a tape measure, and the quartz crucible is also measured. The actual condition is that the weight is measured on a scale.
【０００４】[0004]
【発明が解決しようとする課題】従って、従来は石英ル
ツボの形状を測定するのに手数を要すると共に、得られ
る測定値は巻尺使用の為精度が低く、又、外径測定から
重量測定には石英ルツボを移動しなければならず、測定
作業に時間が掛かるといった問題点を有している。又、
最近はウエーハの口径が大きくなるに伴い、その元とな
る単結晶シリコンを製造する石英ルツボも大きく、且つ
重くなり、それら大型で重量が大なルツボを手作業で取
り扱って上記の形状測定を行うことは重労働で非常に大
変な作業である。Therefore, conventionally, it takes time and effort to measure the shape of a quartz crucible, and the measured value obtained is low in accuracy due to the use of a tape measure. There is a problem in that the quartz crucible must be moved, and the measurement operation takes time. or,
Recently, as the diameter of a wafer increases, the size of the quartz crucible for producing single-crystal silicon, which is the base material of the quartz crucible, also becomes larger and heavier. That is a very hard job with hard work.
【０００５】本発明は、上記した従来の技術が有する問
題点に鑑みてなされたもので、ワーク（石英ルツボ）を
持ち運び移動することなく、一度測定のベース上にセッ
トすれば、後は自動的にワークの形状（外径、高さ、重
量）を測定することが出来る形状測定装置を提供するこ
とを課題とする。The present invention has been made in view of the above-mentioned problems of the prior art, and once a work (quartz crucible) is set on a measurement base without carrying and moving, the work is automatically performed thereafter. Another object of the present invention is to provide a shape measuring device capable of measuring the shape (outer diameter, height, weight) of a work.
【０００６】[0006]
【課題を解決するための手段】上記課題を達成するため
に本発明が講じた技術的手段は、台板上面と所定の間隔
をおいてワークを載承保持するベースを上下動自在に取
り付けると共に、そのベース側近に位置させて支柱を鉛
直に起立取り付け、その支柱に、水平旋回手段を備えた
支持部材を上下案内手段を介して上下動自在に支持す
る。そして、その支持部材には、該支持部材の長手方向
にそって水平移動手段が取り付けられ、その水平移動手
段の可動部材に、ワークを跨ぐ間隔をおいてセンサーを
対向配置した測定ユニットを垂下取り付ける。更に、前
記台板の上面には台秤を載置し、その台秤のワーク受け
は上死点に位置するベースよりも下方に位置させ、ベー
スを下降させることでベース上に支持したワークを台秤
のワーク受けで受け取り支持するように構成したことを
特徴とする。The technical means taken by the present invention to achieve the above object is to mount a base for mounting and holding a work at a predetermined distance from the upper surface of the base plate so as to be movable up and down. A support is provided vertically near the base side, and a support member provided with a horizontal turning means is supported on the support vertically through a vertical guide means. A horizontal moving means is attached to the supporting member along the longitudinal direction of the supporting member, and a measuring unit having a sensor arranged opposite to the movable member of the horizontal moving means at an interval over the work is attached to the movable member. . Further, a platform scale is placed on the upper surface of the platform, and the work receiver of the platform scale is located below the base located at the top dead center, and the work supported on the base is lowered by lowering the base. It is configured to be received and supported by a work receiver.
【０００７】上記ベースを上下させる手段としては、エ
アーシリンダ又は油圧シリンダが使用され、そのベース
には台秤のワーク受けが貫通突出する通孔が開設され、
ベースを下降させてワーク受けより下側に位置させる事
が出来るように構成されている。そして、前記ベースの
上面にはワーク載せ部が放射状に配置されると共に、そ
のワーク載せ部の上面に位置決め用突起が径方向に所定
間隔をおいて設けられている。上記ベース上に載置した
ワーク（石英ルツボ）の外径を測定する測定ユニット
は、門型をした枠体と、その枠体の対峙した垂直部にレ
ーザー式の光電センサーが複数個上下移動可能に取り付
けられて構成され、その測定ユニットは水平移動手段で
該測定ユニットを支持する支持部材の長手方向へ水平移
動される。上記水平移動手段は、ボールネジ機構及び直
線案内機構等によって構成されている。As a means for raising and lowering the base, an air cylinder or a hydraulic cylinder is used, and a through hole is formed in the base through which a work receiver of a platform scale penetrates and protrudes.
The base is lowered so that it can be positioned below the work receiver. A work mounting portion is radially arranged on the upper surface of the base, and positioning projections are provided on the upper surface of the work mounting portion at predetermined intervals in the radial direction. The measurement unit that measures the outer diameter of the work (quartz crucible) placed on the base is a gate-shaped frame, and a plurality of laser-type photoelectric sensors can be moved up and down on the vertical part facing the frame. The measuring unit is horizontally moved in a longitudinal direction of a support member supporting the measuring unit by horizontal moving means. The horizontal moving means includes a ball screw mechanism, a linear guide mechanism, and the like.
【０００８】又、前記支持部材を支柱に沿って上下動さ
せる上下案内手段は、ボールネジ機構と直線案内手段に
よって構成される。上記の構成により、ワークをベース
上にセットし、次に測定ユニットを取り付けた支持部材
を、上下案内手段の作動によって下降させ、測定を開始
する。測定ユニットが下降する時、センサーはワークの
センターの位置にあり、最下部のセンサーがワークの底
面の頂部を検出した時のセンサーの位置からワークの高
さを測定する。そして、測定ユニットは下降を完了した
後ベースより外れた一方側の待機位置へ移動し、その位
置から外径の測定の為に反対側に向かって移動を開始す
る。この時、測定ユニットの複数個のセンサーを用いて
複数箇所のワークの外径を測定する。外径測定の原理
は、測定ユニットを一方から他方へ一定の速度で移動さ
せ、ベースにセットされたワークで測定ユニットに取り
付けられたセンサーが遮断された時の測定ユニットの位
置をリニアセンサーで読み取ることにより外径を測定す
る。次に、測定ユニットを支持した支持部材を水平旋回
手段によって９０゜回転し、その状態で前記したと同じ
ように測定ユニットを一方から他方へ移動させてワーク
の外径を測定する。以上の測定を終了したら、測定ユニ
ットは上下案内手段によって上方の待機位置へ移動させ
る。The vertical guide means for moving the support member up and down along the column is constituted by a ball screw mechanism and linear guide means. With the above configuration, the work is set on the base, and then the support member to which the measurement unit is attached is lowered by the operation of the vertical guide means, and measurement is started. When the measuring unit is lowered, the sensor is at the center of the work, and measures the height of the work from the position of the sensor when the bottom sensor detects the top of the bottom of the work. Then, after completing the lowering, the measuring unit moves to a standby position on one side deviating from the base, and starts moving from the position toward the opposite side for measuring the outer diameter. At this time, the outer diameter of the work at a plurality of locations is measured using the plurality of sensors of the measurement unit. The principle of outer diameter measurement is to move the measurement unit from one side to the other at a constant speed, and read the position of the measurement unit with a linear sensor when the sensor attached to the measurement unit is cut off by the work set on the base This measures the outer diameter. Next, the supporting member supporting the measuring unit is rotated by 90 ° by the horizontal turning means, and in this state, the measuring unit is moved from one side to the other to measure the outer diameter of the work as described above. When the above measurement is completed, the measuring unit is moved to the upper standby position by the vertical guide means.
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施の形態の一例
を図面に基づいて説明する。図１は本測定装置全体を示
す正面図で、図中、１は台板で、この台板１の上面に架
台101 が載置固定されると共に、その架台101 の上面に
ガイドポスト２が中心から等距離の位置に対角線状に起
立固定され、そのガイドポスト２に平面形状が円形をし
たベース３が上下動可能に支持され、且つそのベース３
は架台101 に取り付けたエアーシリンダ４のロッド401
に取り付けられ、エアーシリンダ４の作動でベース３は
上下動自在に構成されている。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a front view showing the entire measurement apparatus. In the figure, reference numeral 1 denotes a base plate, and a gantry 101 is placed and fixed on the top surface of the gantry 1, and a guide post 2 is centered on the top surface of the gantry 101. A base 3 having a circular shape in a plan view is supported by the guide post 2 so as to be movable up and down, and the base 3
Is the rod 401 of the air cylinder 4 attached to the gantry 101
The base 3 is configured to be vertically movable by the operation of the air cylinder 4.
【００１０】上記ベース３はワーク（石英ルツボ）Ａを
載承支持するもので、円板の上面にはワーク載せ部301
が放射状（十字状）に取り付けられ、そのワーク載せ部
301の上面に位置決め用突起302 が径方向に所定間隔を
置いて取り付けられている。この位置決め用突起302 に
よりワークＡはその中心をベース３の中心に合わせて正
確にセットすることが出来る。The base 3 supports and supports a work (quartz crucible) A, and a work mounting portion 301 is provided on the upper surface of the disk.
Are mounted radially (cross-shaped), and the work
Positioning projections 302 are mounted on the upper surface of 301 at predetermined intervals in the radial direction. With the positioning projections 302, the center of the work A can be accurately set with its center aligned with the center of the base 3.
【００１１】又、前記台板１の上面には前記したベース
３の側近に位置させて支柱５が鉛直に起立固定され、そ
の支柱５の前面（ベース３と対向する面）に水平旋回手
段10を備えた支持部材７が上下案内手段６を介して上下
動自在に支持され、その支持部材７に測定ユニット８が
水平移動手段９を介して取り付けられている。A column 5 is vertically fixed on the upper surface of the base plate 1 so as to be close to the base 3, and a horizontal turning means 10 is mounted on the front surface of the column 5 (the surface facing the base 3). Is supported via a vertical guide means 6 so as to be vertically movable, and a measuring unit 8 is attached to the support member 7 via a horizontal movement means 9.
【００１２】支柱５に装備される上下案内手段６は、支
柱５に沿って鉛直に架設されたボールネジ601 と、その
ボールネジ601 を駆動回転するサーボモータ602 と、前
記ボールネジ601 の左右両側に位置させて鉛直に取り付
けた直線ガイド（ＬＭガイド）603 と、前記ボールネジ
601 と螺合し直線ガイド（ＬＭガイド）603 と係合する
側面略逆Ｌ字形の可動体604 とで構成され、ボールネジ
601 とサーボモータ602 の回転軸はカップリング605 で
連結されている。それにより、サーボモータ602 を駆動
回転させるとボールネジ601 は回転され、ボールネジ60
1 と螺合する可動体604 は直線ガイド（ＬＭガイド）60
3 に沿って上下方向に案内される。The vertical guide means 6 mounted on the column 5 is provided with a ball screw 601 vertically provided along the column 5, a servomotor 602 for driving and rotating the ball screw 601, and a left and right side of the ball screw 601. Linear guide (LM guide) 603 mounted vertically with the ball screw
A side surface substantially inverted L-shaped movable body 604 engaged with the linear guide (LM guide) 603 and screwed with the 601;
The rotation shafts of the servo motor 601 and the servo motor 602 are connected by a coupling 605. Accordingly, when the servo motor 602 is driven and rotated, the ball screw 601 is rotated, and the ball screw 60 is rotated.
The movable body 604 screwed with 1 is a linear guide (LM guide) 60
Guided up and down along 3
【００１３】上記可動体604 は前記したベース３の中心
に向けて前方に張り出し突出され、その可動体604 の先
部に水平旋回手段10を介して支持部材７が垂下取り付け
られ、その支持部材７に水平移動手段９を介してワーク
Ａの高さ及び外径を測定する測定ユニット８が支持部材
７の長手方向に沿って水平移動可能に取り付けられてい
る。支持部材７は長尺の平板にして前記可動体604 の先
部に水平旋回手段10を構成するロータリーアクチュエー
タで９０゜旋回するように構成され、その支持部材７の
下側に水平移動手段９が取り付けられている。The movable body 604 is projected forward toward the center of the base 3, and a supporting member 7 is attached to the leading end of the movable body 604 via a horizontal turning means 10 so as to hang down. A measuring unit 8 for measuring the height and the outer diameter of the work A via a horizontal moving means 9 is attached so as to be able to move horizontally along the longitudinal direction of the support member 7. The support member 7 is a long flat plate, and is configured to rotate 90 ° at the tip of the movable body 604 by a rotary actuator constituting the horizontal rotation means 10, and the horizontal movement means 9 is provided below the support member 7. Installed.
【００１４】水平移動手段９は、前記した支持部材７の
長手方向の両側に設けた軸受け701に亘って定位置回転
可能に架設したボールネジ901 と、そのボールネジ901
を駆動回転するサーボモータ902 と、前記ボールネジ90
1 に螺合する可動体903 と、その可動体903 を支持部材
７に沿って直線的に案内する直線ガイド（ＬＭガイド）
904 とで構成され、前記ボールネジ901 とサーボモータ
902 の回転軸はカップリング905 で連結されている。The horizontal moving means 9 includes a ball screw 901 which is rotatably mounted at a fixed position over bearings 701 provided on both sides of the support member 7 in the longitudinal direction, and the ball screw 901.
A servo motor 902 for driving and rotating the ball screw 90
A movable body 903 that is screwed into 1 and a linear guide (LM guide) that linearly guides the movable body 903 along the support member 7.
904, the ball screw 901 and a servo motor
The rotation shaft of 902 is connected by a coupling 905.
【００１５】上記可動体903 に垂下取り付けられる測定
ユニット８は、ワークＡを跨ぐ幅を有する門型の枠体80
1 と、その枠体801 の相対峙した垂直部に対向して取り
付けた複数個のレーザー式の光電センサー802 とで構成
され、その光電センサー802は垂直部に上下移動可能に
取り付けられている。The measuring unit 8 suspended from the movable body 903 has a gate-shaped frame 80 having a width over the work A.
1 and a plurality of laser-type photoelectric sensors 802 mounted opposite to the vertically opposed portions of the frame body 801. The photoelectric sensors 802 are vertically movably attached to the vertical portions.
【００１６】更に、前記した台板１の上面にはデジタル
台秤11が載置固定され、その台秤11のワーク受け12は支
持脚13を介して前記したベース３の最上位と最下位の間
に水平に配置され、且つそのワーク受け12は前記したベ
ース３のワーク載せ部301 の間に配置されると共に、ベ
ース３を下降させた時ワーク受け12をベース３より上方
に突出させる通孔14がベース３に開設されている。それ
により、ワークＡを載承支持したベース３をエアーシリ
ンダ４を作動させて下げると、ベース３は通孔14により
台秤11のワーク受け12を超えて該ワーク受け12より下側
に下がり、ベース３上のワークＡは台秤11のワーク受け
12に乗り移り、ワークＡの重量が測定される。尚、台秤
11のワーク受け12はベース３のワーク載せ部301 の間に
配置する関係で４個としたが、前記したベース３のワー
ク載せ部301 を、円周を三等分する３個とし、そのワー
ク載せ部の間に位置させてワーク受け12を３個設けるよ
うにしても勿論よいものである。Further, a digital platform scale 11 is mounted and fixed on the upper surface of the base plate 1, and the work receiver 12 of the platform scale 11 is supported between the uppermost and lowermost portions of the base 3 via the support legs 13. The work receiver 12 is disposed horizontally, and the work receiver 12 is disposed between the work mounting portions 301 of the base 3, and a through hole 14 for projecting the work receiver 12 above the base 3 when the base 3 is lowered is provided. It is established on Base 3. Thus, when the air cylinder 4 is operated to lower the base 3 on which the work A is mounted and supported, the base 3 is lowered below the work receiver 12 beyond the work receiver 12 of the platform scale 11 by the through hole 14, and the base 3 is lowered. Work A on 3 is the work receiver of platform scale 11
The process moves to 12, and the weight of the work A is measured. In addition, platform scale
Although the number of the work receivers 12 of the base 11 is four because of the arrangement between the work placement parts 301 of the base 3, the work placement parts 301 of the base 3 are three pieces that divide the circumference into three equal parts. Needless to say, three work receivers 12 may be provided between the mounting portions.
【００１７】次に、ワークＡの測定動作について説明す
る。 先ず、ワークＡをベース３上にセツトする前に測定
ユニット８を上下案内手段６を操作して上方に待機さ
せ、その後にワークＡをベース３のワーク載せ部301 に
載置セットする。 上下案内手段６を作動させて測定ユニット８を垂下
支持した支持部材７を下降させて測定を開始する。 支持部材７が下降する時、測定ユニット８はワーク
Ａの中心線上に位置しており、それにより測定ユニット
８の最下部のレーザー式の光電センサー802 が、ワーク
Ａの底面の頂部を検出した時の該センサーの位置からワ
ークＡの高さを測定する。 測定ユニット８を支持した支持部材７が下降を完了
すると、測定ユニット８は支持部材７の一方端（図１で
右端）の待機位置に移動し、その位置から支持部材７の
反対側に向かって水平移動手段９の作動により測定ユニ
ット８が移動を開始し、ワークＡの外径を測定する。外
径の測定は、レーザー式の光電センサー802 を備えた測
定ユニット８が一定の速度で移動し、ベース３上にセッ
トされたワークＡによって前記光電センサー802 が遮ら
れた時の測定ユニット８の位置をリニアセンサーで読み
取ることにより、外径の測定を行うことが出来る。 この時、測定ユニット８は複数個の光電センサー80
2 を備えている為、ワークＡにおける複数箇所の外径が
測定される。 次に測定ユニット８を支持した支持部材７を９０゜
回転させて（図２の二点鎖線（イ）の位置）、と同様
にワークＡの外径を測定する。 外径の測定が終了したら、測定ユニット８を支持部
材７の待機位置に移動させる。 次に、ベース３を支持するエアーシリンダ４を作動
させてベース３を下降させ、ワークＡを台秤11にセット
されているワーク受け12の上に降ろし、重量を測定す
る。 重量の測定が終了したらエアーシリンダ４を作動さ
せてベース３を上昇させ、ワークＡを台秤のワーク受け
12から浮かせてベース３上に乗り移す。そして、ワーク
Ａをベース３から取り外して測定を完了する。Next, the measurement operation of the work A will be described. First, before setting the work A on the base 3, the measuring unit 8 is made to stand by operating the vertical guide means 6, and then the work A is placed and set on the work placing portion 301 of the base 3. The measurement is started by operating the up-and-down guide means 6 to lower the support member 7 that supports the measurement unit 8 in a hanging manner. When the support member 7 is lowered, the measuring unit 8 is positioned on the center line of the work A, so that the laser type photoelectric sensor 802 at the bottom of the measuring unit 8 detects the top of the bottom surface of the work A. The height of the work A is measured from the position of the sensor. When the support member 7 supporting the measurement unit 8 completes the lowering, the measurement unit 8 moves to a standby position at one end (the right end in FIG. 1) of the support member 7 and moves from that position toward the opposite side of the support member 7. The operation of the horizontal moving means 9 causes the measuring unit 8 to start moving, and measures the outer diameter of the work A. The measurement of the outer diameter is performed when the measuring unit 8 having the laser type photoelectric sensor 802 moves at a constant speed and the photoelectric sensor 802 is blocked by the work A set on the base 3. The outer diameter can be measured by reading the position with a linear sensor. At this time, the measurement unit 8 includes a plurality of photoelectric sensors 80.
2, the outer diameters at a plurality of locations on the work A are measured. Next, the outer diameter of the work A is measured in the same manner as described above by rotating the support member 7 supporting the measurement unit 8 by 90 ° (the position indicated by the two-dot chain line (a) in FIG. 2). When the measurement of the outer diameter is completed, the measurement unit 8 is moved to the standby position of the support member 7. Next, the air cylinder 4 supporting the base 3 is operated to lower the base 3, and the work A is dropped on the work receiver 12 set on the platform scale 11, and the weight is measured. When the measurement of the weight is completed, the air cylinder 4 is operated to raise the base 3, and the work A is received by the work weigher of the platform scale.
Float from 12 and transfer to base 3. Then, the work A is removed from the base 3 to complete the measurement.
【００１８】[0018]
【発明の効果】本発明の石英ルツボの形状測定装置は請
求項１に記載の構成により、石英ルツボをベース上にセ
ットするだけで、石英ルツボの高さ、外径、及び重量を
自動的に測定することが出来る。しかも、高さ及び外径
の測定はセンサーで測定する為、高精度の測定値を迅速
に得ることが出来る。従って、最近の大口径ウエーハの
製造に伴い石英ルツボも大型化するが、前記装置により
高精度の測定を容易に行うことができる。更に、請求項
２に記載の構成により、石英ルツボの複数箇所の外径を
測定できる為、外形をより正確に捉えることが出来る。
又、請求項３に記載の構成により、上記した外径の測定
をニ方向から行うことが出来る為、高精度の測定値を得
ることが出来る。According to the quartz crucible shape measuring apparatus of the present invention, the height, outer diameter and weight of the quartz crucible can be automatically determined by simply setting the quartz crucible on the base. Can be measured. Moreover, since the measurement of the height and the outer diameter is performed by a sensor, a highly accurate measured value can be obtained quickly. Accordingly, quartz crucibles also become larger with the recent production of large-diameter wafers, but high-precision measurement can be easily performed by the above-described apparatus. Furthermore, according to the configuration described in claim 2, since the outer diameter of a plurality of locations of the quartz crucible can be measured, the outer shape can be more accurately grasped.
Further, according to the configuration of the third aspect, since the above-described measurement of the outer diameter can be performed from two directions, a highly accurate measured value can be obtained.
【図１】本発明に係る形状測定装置の実施の形態の一例
を示す正面図である。FIG. 1 is a front view showing an example of an embodiment of a shape measuring apparatus according to the present invention.
【図２】図１の側面図である。FIG. 2 is a side view of FIG.
【図３】（ａ）は図１の（３）−（３）線に沿える横断
面図、（ｂ）は（ａ）の状態から支持部材を９０゜回転
した状態を示す同横断面図である。3A is a cross-sectional view taken along the line (3)-(3) of FIG. 1, and FIG. 3B is a cross-sectional view showing a state where the support member is rotated by 90 ° from the state of FIG. It is.
【図４】ベースを下降させてワークを台秤のワーク受け
で支持し、重量を測定する状態を示す側面図である。FIG. 4 is a side view showing a state in which the base is lowered, the work is supported by a work receiver of a platform scale, and the weight is measured.
１…台板 ３…ベース ４…エアーシリンダ ５…支柱 ６…上下案内手段 ７…支持部材 ８…測定ユニット ９…水平移動手段 10…水平旋回手段 11…台秤 12…ワーク受け DESCRIPTION OF SYMBOLS 1 ... Base plate 3 ... Base 4 ... Air cylinder 5 ... Column 6 ... Vertical guide means 7 ... Support member 8 ... Measuring unit 9 ... Horizontal moving means 10 ... Horizontal turning means 11 ... Platform weighing 12 ... Work receiving
Claims (3)
スを上下動自在に取り付けると共に、そのベース側近に
位置させて支柱を鉛直に起立取り付け、その支柱に、水
平旋回手段を備えた支持部材を上下案内手段を介して上
下動自在に支持し、その支持部材に、ワークを跨ぐ間隔
をおいてセンサーを対向配置した測定ユニットを水平移
動手段を介して取り付け、更に前記台板上面には台秤を
載置すると共に、前記ベースの下降により台秤のワーク
受けに載承保持されるようにした石英ルツボの形状測定
装置。A base for mounting and holding a work is mounted on the upper surface of a base plate so as to be movable up and down, and a column is mounted vertically upright near the base, and the column is provided with horizontal turning means. The member is vertically movably supported via vertical guide means, and a measuring unit in which a sensor is arranged facing the work at an interval across the work is attached to the support member via horizontal moving means, and further on the base plate upper surface. An apparatus for measuring the shape of a quartz crucible on which a platform scale is placed and which is mounted and held on a work receiver of the platform scale by lowering the base.
その枠体の対峙した垂直部に上下移動可能に取り付けた
複数個のセンサーとで構成されている請求項1 記載の石
英ルツボの形状測定装置。2. A frame in which the measurement unit has a gate shape,
2. The quartz crucible shape measuring device according to claim 1, further comprising a plurality of sensors vertically movably mounted on opposed vertical portions of the frame.
は、支持部材と水平移動手段と測定ユニットを一体化し
て９０゜旋回させる請求項１又は２記載の石英ルツボの
形状測定装置。3. The quartz crucible shape measuring device according to claim 1, wherein the horizontal turning means provided on the supporting member turns the supporting member, the horizontal moving means and the measuring unit integrally by 90 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34945596A JPH10185545A (en) | 1996-12-27 | 1996-12-27 | Shape measuring instrument for quartz crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34945596A JPH10185545A (en) | 1996-12-27 | 1996-12-27 | Shape measuring instrument for quartz crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10185545A true JPH10185545A (en) | 1998-07-14 |
Family
ID=18403874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34945596A Pending JPH10185545A (en) | 1996-12-27 | 1996-12-27 | Shape measuring instrument for quartz crucible |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10185545A (en) |
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1996
- 1996-12-27 JP JP34945596A patent/JPH10185545A/en active Pending
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| JP2013133226A (en) * | 2011-12-22 | 2013-07-08 | Japan Siper Quarts Corp | Method for measuring three-dimensional shape of silica glass crucible and method for producing silicon single crystal |
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| JP2015163588A (en) * | 2015-05-13 | 2015-09-10 | 株式会社Sumco | Determination method of three-dimensional distribution of surface roughness of silica glass crucible, manufacturing method of silicon single crystal |
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