JPS559415A - Semiconductor manufacturing method - Google Patents
Semiconductor manufacturing methodInfo
- Publication number
- JPS559415A JPS559415A JP8154978A JP8154978A JPS559415A JP S559415 A JPS559415 A JP S559415A JP 8154978 A JP8154978 A JP 8154978A JP 8154978 A JP8154978 A JP 8154978A JP S559415 A JPS559415 A JP S559415A
- Authority
- JP
- Japan
- Prior art keywords
- film
- wiring
- opening
- metallic
- nitrified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8154978A JPS559415A (en) | 1978-07-05 | 1978-07-05 | Semiconductor manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8154978A JPS559415A (en) | 1978-07-05 | 1978-07-05 | Semiconductor manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS559415A true JPS559415A (en) | 1980-01-23 |
Family
ID=13749367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8154978A Pending JPS559415A (en) | 1978-07-05 | 1978-07-05 | Semiconductor manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS559415A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6247150A (ja) * | 1985-08-26 | 1987-02-28 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
JPH04229625A (ja) * | 1990-04-30 | 1992-08-19 | American Teleph & Telegr Co <Att> | 半導体装置の製造方法 |
US7677696B2 (en) | 2004-03-31 | 2010-03-16 | Canon Kabushiki Kaisha | Liquid discharge head |
-
1978
- 1978-07-05 JP JP8154978A patent/JPS559415A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6247150A (ja) * | 1985-08-26 | 1987-02-28 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
JPH04229625A (ja) * | 1990-04-30 | 1992-08-19 | American Teleph & Telegr Co <Att> | 半導体装置の製造方法 |
US7677696B2 (en) | 2004-03-31 | 2010-03-16 | Canon Kabushiki Kaisha | Liquid discharge head |
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