JPS559415A - Semiconductor manufacturing method - Google Patents

Semiconductor manufacturing method

Info

Publication number
JPS559415A
JPS559415A JP8154978A JP8154978A JPS559415A JP S559415 A JPS559415 A JP S559415A JP 8154978 A JP8154978 A JP 8154978A JP 8154978 A JP8154978 A JP 8154978A JP S559415 A JPS559415 A JP S559415A
Authority
JP
Japan
Prior art keywords
film
wiring
opening
metallic
nitrified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8154978A
Other languages
English (en)
Inventor
Satoshi Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8154978A priority Critical patent/JPS559415A/ja
Publication of JPS559415A publication Critical patent/JPS559415A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP8154978A 1978-07-05 1978-07-05 Semiconductor manufacturing method Pending JPS559415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8154978A JPS559415A (en) 1978-07-05 1978-07-05 Semiconductor manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8154978A JPS559415A (en) 1978-07-05 1978-07-05 Semiconductor manufacturing method

Publications (1)

Publication Number Publication Date
JPS559415A true JPS559415A (en) 1980-01-23

Family

ID=13749367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8154978A Pending JPS559415A (en) 1978-07-05 1978-07-05 Semiconductor manufacturing method

Country Status (1)

Country Link
JP (1) JPS559415A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247150A (ja) * 1985-08-26 1987-02-28 Sumitomo Electric Ind Ltd 半導体装置およびその製造方法
JPH04229625A (ja) * 1990-04-30 1992-08-19 American Teleph & Telegr Co <Att> 半導体装置の製造方法
US7677696B2 (en) 2004-03-31 2010-03-16 Canon Kabushiki Kaisha Liquid discharge head

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247150A (ja) * 1985-08-26 1987-02-28 Sumitomo Electric Ind Ltd 半導体装置およびその製造方法
JPH04229625A (ja) * 1990-04-30 1992-08-19 American Teleph & Telegr Co <Att> 半導体装置の製造方法
US7677696B2 (en) 2004-03-31 2010-03-16 Canon Kabushiki Kaisha Liquid discharge head

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