JPS5585022A - Heat treating apparatus - Google Patents
Heat treating apparatusInfo
- Publication number
- JPS5585022A JPS5585022A JP15748978A JP15748978A JPS5585022A JP S5585022 A JPS5585022 A JP S5585022A JP 15748978 A JP15748978 A JP 15748978A JP 15748978 A JP15748978 A JP 15748978A JP S5585022 A JPS5585022 A JP S5585022A
- Authority
- JP
- Japan
- Prior art keywords
- tubes
- furnace
- furnace core
- heat treating
- treating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Charging Or Discharging (AREA)
- Furnace Details (AREA)
Abstract
PURPOSE: To readily mount a plurality of furnace core tubes in a furnace for diffusing a semiconductor wafer by independently detachably attaching the tubes from the side surface in the longitudinal direction of the tubes to the furnace.
CONSTITUTION: A plurality of furnace core tubes 5 and a heater 19 are positioned by a guide 21 on a slender rotary plate 20, which is so carried on a base plate 22 as to move via rails 23, and moved on the rails 23 by rotating a handle 30 via combined gears 26, 27. Thus, since the furnace core tubes 5 can be independently moved to the side surface of a heat treating apparatus, the tubes can be simply replaced or cleaned so that dusts contaminating a semiconductor wafer may not be adhered thereto, and since only the tubes required for replacement are necessarily stopped, it can improve the workability of the apparatus.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15748978A JPS5585022A (en) | 1978-12-22 | 1978-12-22 | Heat treating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15748978A JPS5585022A (en) | 1978-12-22 | 1978-12-22 | Heat treating apparatus |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10458584A Division JPS6041217A (en) | 1984-05-25 | 1984-05-25 | Heat treating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5585022A true JPS5585022A (en) | 1980-06-26 |
JPS626645B2 JPS626645B2 (en) | 1987-02-12 |
Family
ID=15650794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15748978A Granted JPS5585022A (en) | 1978-12-22 | 1978-12-22 | Heat treating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5585022A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132441U (en) * | 1981-02-12 | 1982-08-18 | ||
JPS6041217A (en) * | 1984-05-25 | 1985-03-04 | Hitachi Ltd | Heat treating apparatus |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63213720A (en) * | 1987-03-02 | 1988-09-06 | Noritsu Co Ltd | Safety device for hot-water supplier |
US20230351723A1 (en) | 2020-10-23 | 2023-11-02 | Nec Corporation | Individual identification apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04289U (en) * | 1990-04-17 | 1992-01-06 |
-
1978
- 1978-12-22 JP JP15748978A patent/JPS5585022A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04289U (en) * | 1990-04-17 | 1992-01-06 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132441U (en) * | 1981-02-12 | 1982-08-18 | ||
JPS6041217A (en) * | 1984-05-25 | 1985-03-04 | Hitachi Ltd | Heat treating apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS626645B2 (en) | 1987-02-12 |
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