JPS5566113A - Manufacture of elastic surface wave device - Google Patents

Manufacture of elastic surface wave device

Info

Publication number
JPS5566113A
JPS5566113A JP13887878A JP13887878A JPS5566113A JP S5566113 A JPS5566113 A JP S5566113A JP 13887878 A JP13887878 A JP 13887878A JP 13887878 A JP13887878 A JP 13887878A JP S5566113 A JPS5566113 A JP S5566113A
Authority
JP
Japan
Prior art keywords
comb
substrate
line electrode
electrode
aluminum film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13887878A
Other languages
Japanese (ja)
Inventor
Masaharu Ishigaki
Hideo Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13887878A priority Critical patent/JPS5566113A/en
Publication of JPS5566113A publication Critical patent/JPS5566113A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To enhance the reliability for the wire bonding as well as the yield for the comb-line electrode by forming the thin aluminum for use to the comb-line electrode through heating up sufficiently the substrate temperature after forming the electrode parts excepting the comb-line electrode with the metal film on the piezeoelectric substrate. CONSTITUTION:The aluminum film of about 8000Angstrom thick is formed through the evaporation method onto lithium niobate single-crystal substrate 1, and then the metal parts excepting the comb-line electrode are formed through the photoetching technique. Then substrate 1 is held in the vacuum atmosphere about 20 minutes and at about 200 deg.C of the substrate temperature, and then the aluminum film of about 1000Angstrom is formed again through the evaporation method. Then the photo resist is coated on substrate 1 with exposure to form the photo resist pattern, and the aluminum film is etched chemically to form comb-line electrodes 2 and 3. In such way, no damage is given to the comb-line electrode during the forming process of the bonding pad part, thus increasing the defect yield for the electrode pattern.
JP13887878A 1978-11-13 1978-11-13 Manufacture of elastic surface wave device Pending JPS5566113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13887878A JPS5566113A (en) 1978-11-13 1978-11-13 Manufacture of elastic surface wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13887878A JPS5566113A (en) 1978-11-13 1978-11-13 Manufacture of elastic surface wave device

Publications (1)

Publication Number Publication Date
JPS5566113A true JPS5566113A (en) 1980-05-19

Family

ID=15232216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13887878A Pending JPS5566113A (en) 1978-11-13 1978-11-13 Manufacture of elastic surface wave device

Country Status (1)

Country Link
JP (1) JPS5566113A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462009A (en) * 1987-09-01 1989-03-08 Murata Manufacturing Co Surface wave element
JPH0444408A (en) * 1990-06-12 1992-02-14 Toshiba Corp Manufacture of surface acoustic wave device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154794A (en) * 1974-11-08 1976-05-14 Victor Company Of Japan Hyomenhasochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154794A (en) * 1974-11-08 1976-05-14 Victor Company Of Japan Hyomenhasochino seizohoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462009A (en) * 1987-09-01 1989-03-08 Murata Manufacturing Co Surface wave element
JPH0444408A (en) * 1990-06-12 1992-02-14 Toshiba Corp Manufacture of surface acoustic wave device

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