JPS5565478A - Semiconductor pressure transducer - Google Patents
Semiconductor pressure transducerInfo
- Publication number
- JPS5565478A JPS5565478A JP13951678A JP13951678A JPS5565478A JP S5565478 A JPS5565478 A JP S5565478A JP 13951678 A JP13951678 A JP 13951678A JP 13951678 A JP13951678 A JP 13951678A JP S5565478 A JPS5565478 A JP S5565478A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- fixed base
- pressure
- pipe
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To secure a measurement of absolute pressure for a long period of time by using Sn or In or alloy thereof for adhesion of a fixed base for pressure induction pipe and pressure sensitive pellet.
CONSTITUTION: A pressure sensitive pellet 1 consists of a semiconductor single crystal provided with a thin-walled diaphragm for which a diffused resistor layer 2 is formed at the center, and a fixed base 3 consists of the same material as the pellet 1 which is fixed thereon at the periphery. Then, a pressure induction pipe 4 coupled with a through hole perforated at the center of the fixed base 3 is provided to introduce pressures to the pellet 1, and the pellet 1 and the fixed base 3, the fixed base 3 and the pipe 4 are fixed airtightly each other to seal the pipe 4, thereby arranging a vacuum chamber. From using the pressure intensifier as an absolute pressure gauge, the absolute pressure can be measured stably for a long period of time.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13951678A JPS5565478A (en) | 1978-11-13 | 1978-11-13 | Semiconductor pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13951678A JPS5565478A (en) | 1978-11-13 | 1978-11-13 | Semiconductor pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5565478A true JPS5565478A (en) | 1980-05-16 |
Family
ID=15247108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13951678A Pending JPS5565478A (en) | 1978-11-13 | 1978-11-13 | Semiconductor pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5565478A (en) |
-
1978
- 1978-11-13 JP JP13951678A patent/JPS5565478A/en active Pending
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