JPS5562750A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS5562750A
JPS5562750A JP13644778A JP13644778A JPS5562750A JP S5562750 A JPS5562750 A JP S5562750A JP 13644778 A JP13644778 A JP 13644778A JP 13644778 A JP13644778 A JP 13644778A JP S5562750 A JPS5562750 A JP S5562750A
Authority
JP
Japan
Prior art keywords
film
sio
substrate
wiring
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13644778A
Other languages
English (en)
Inventor
Matsuo Ichinose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP13644778A priority Critical patent/JPS5562750A/ja
Publication of JPS5562750A publication Critical patent/JPS5562750A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP13644778A 1978-11-06 1978-11-06 Semiconductor integrated circuit device Pending JPS5562750A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13644778A JPS5562750A (en) 1978-11-06 1978-11-06 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13644778A JPS5562750A (en) 1978-11-06 1978-11-06 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5562750A true JPS5562750A (en) 1980-05-12

Family

ID=15175316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13644778A Pending JPS5562750A (en) 1978-11-06 1978-11-06 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5562750A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162351A (en) * 1981-03-16 1982-10-06 Fairchild Camera Instr Co Two-dimensional germanium-silicon mutual connector and electrode for integrated circuit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396769A (en) * 1977-02-04 1978-08-24 Nippon Telegr & Teleph Corp <Ntt> Production of mis integratd circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396769A (en) * 1977-02-04 1978-08-24 Nippon Telegr & Teleph Corp <Ntt> Production of mis integratd circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162351A (en) * 1981-03-16 1982-10-06 Fairchild Camera Instr Co Two-dimensional germanium-silicon mutual connector and electrode for integrated circuit

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