JPS5552245A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS5552245A JPS5552245A JP12555778A JP12555778A JPS5552245A JP S5552245 A JPS5552245 A JP S5552245A JP 12555778 A JP12555778 A JP 12555778A JP 12555778 A JP12555778 A JP 12555778A JP S5552245 A JPS5552245 A JP S5552245A
- Authority
- JP
- Japan
- Prior art keywords
- high purity
- alpha particles
- package
- layer
- purity silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000002245 particle Substances 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000012535 impurity Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical group [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 230000007257 malfunction Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
- 239000008188 pellet Substances 0.000 abstract 1
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE: To provide a semiconductor integrated circuit memory device having a high reliability and free of malfunctions that might take place due to the presence of alpha particles by covering at least part of the inside wall of a package with a metallic material of high purity, or impurities not exceeding 0.001ppm.
CONSTITUTION: A layer of high purity silicon 36,200μm thick is attached to part of the inside wall of an alumina cap 32 of a package. Most of the alpha particles released from the cap 32 which contain a plenty of impurities are absorbed by the high purity silicon layer 36, so that the probability that the alpha particles will reach MOS memory pellets 35 is quite little. Any alpha particles reaching the MOS memory rellets 35 must have consumed most of their energy on the way. Thus a memory device with the least probavbility of malfunctioning can be obtained. The high purity silicon layer 36 may be substituted by germanium or the like metal, and such layer may cover the inside walls of the package in their entirety in order to obtain more effective results.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12555778A JPS5552245A (en) | 1978-10-11 | 1978-10-11 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12555778A JPS5552245A (en) | 1978-10-11 | 1978-10-11 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5552245A true JPS5552245A (en) | 1980-04-16 |
Family
ID=14913137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12555778A Pending JPS5552245A (en) | 1978-10-11 | 1978-10-11 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5552245A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5588356A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Semiconductor device |
JPS5817642A (en) * | 1981-07-10 | 1983-02-01 | シ−メンス・アクチエンゲゼルシヤフト | Protecting device for semiconductor device |
US4975762A (en) * | 1981-06-11 | 1990-12-04 | General Electric Ceramics, Inc. | Alpha-particle-emitting ceramic composite cover |
-
1978
- 1978-10-11 JP JP12555778A patent/JPS5552245A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5588356A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Semiconductor device |
US4975762A (en) * | 1981-06-11 | 1990-12-04 | General Electric Ceramics, Inc. | Alpha-particle-emitting ceramic composite cover |
JPS5817642A (en) * | 1981-07-10 | 1983-02-01 | シ−メンス・アクチエンゲゼルシヤフト | Protecting device for semiconductor device |
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