JPS5537429A - Production of optical thin film - Google Patents
Production of optical thin filmInfo
- Publication number
- JPS5537429A JPS5537429A JP10874178A JP10874178A JPS5537429A JP S5537429 A JPS5537429 A JP S5537429A JP 10874178 A JP10874178 A JP 10874178A JP 10874178 A JP10874178 A JP 10874178A JP S5537429 A JPS5537429 A JP S5537429A
- Authority
- JP
- Japan
- Prior art keywords
- materials
- evaporated
- stage
- electron beams
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optical Filters (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form a homogeneous optical thin film without causing a fractionating effect by frranging equally or unequally a plurality of vacuum-deposition materials with different refractive indexes on a stage and by turning the stage to successively irradiate the materials with electron beams and to evaporate the materials while always stabilizing the evaporation. CONSTITUTION:Vacuum-deposition materials with different refractive indexes, e.g. TiO212a and MgF212b are arranged in crucible 10 on a stage to be irradated with electron beams (d). Next rotary stand 9 is turned to successively irradiate materials 12a, 12b with beams (d), whereby the materials are evaporated and deposited on sample substrate 4 and film thickness monitoring substrate 7. By this method the materials are evaporated with single electronic gun filament 11, so stable vapor currents are scattered from evaporation source 2. Since the materials are successively irradiated with electron beams, they are evaporated almost simultaneously and deposited on substrate 4, causing no fractionating effect even if they are different in vapor press.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10874178A JPS5537429A (en) | 1978-09-04 | 1978-09-04 | Production of optical thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10874178A JPS5537429A (en) | 1978-09-04 | 1978-09-04 | Production of optical thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5537429A true JPS5537429A (en) | 1980-03-15 |
JPS61601B2 JPS61601B2 (en) | 1986-01-09 |
Family
ID=14492335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10874178A Granted JPS5537429A (en) | 1978-09-04 | 1978-09-04 | Production of optical thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5537429A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6273202A (en) * | 1985-09-27 | 1987-04-03 | Hamamatsu Photonics Kk | Production of thin optical film |
JPS647005A (en) * | 1987-06-30 | 1989-01-11 | Toshiba Glass Kk | Reflecting mirror made of multi-layered films |
DE4005848A1 (en) * | 1989-02-23 | 1990-09-06 | Fuji Electric Co Ltd | STORAGE COOLING DEVICE FOR A WATER TURBINE |
JPH042764A (en) * | 1990-04-18 | 1992-01-07 | Sharp Corp | Production of thin-film el element |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62129601U (en) * | 1986-02-05 | 1987-08-17 |
-
1978
- 1978-09-04 JP JP10874178A patent/JPS5537429A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6273202A (en) * | 1985-09-27 | 1987-04-03 | Hamamatsu Photonics Kk | Production of thin optical film |
JPS647005A (en) * | 1987-06-30 | 1989-01-11 | Toshiba Glass Kk | Reflecting mirror made of multi-layered films |
DE4005848A1 (en) * | 1989-02-23 | 1990-09-06 | Fuji Electric Co Ltd | STORAGE COOLING DEVICE FOR A WATER TURBINE |
DE4005848C2 (en) * | 1989-02-23 | 1994-03-03 | Fuji Electric Co Ltd | Bearing cooling device for a water turbine |
JPH042764A (en) * | 1990-04-18 | 1992-01-07 | Sharp Corp | Production of thin-film el element |
Also Published As
Publication number | Publication date |
---|---|
JPS61601B2 (en) | 1986-01-09 |
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