JPS5532386A - Electrode inspecting device - Google Patents
Electrode inspecting deviceInfo
- Publication number
- JPS5532386A JPS5532386A JP10664578A JP10664578A JPS5532386A JP S5532386 A JPS5532386 A JP S5532386A JP 10664578 A JP10664578 A JP 10664578A JP 10664578 A JP10664578 A JP 10664578A JP S5532386 A JPS5532386 A JP S5532386A
- Authority
- JP
- Japan
- Prior art keywords
- microelectrode
- unit
- sensor
- polarized
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
PURPOSE: To improve the efficiency and reliability of electrode inspection by displaying a magnified image of a microelectrode placed on a table which is movable in a plane by detecting the light which is radiated from behind and transmitted through the microelectrode with a solid image pickup sensor.
CONSTITUTION: The device comprises a control unit 1 for totally controlling the system, a mechanical unit 2 driven by the control unit 1, a sensor unit 3 and a displaying unit 4. The mechanical unit 2 comprises a scanning table 21 which is movable in the X-X and Y-Y directions in a horizontal plane of the scanning table and adapted to carry a microelectrode for inspection, a illuminating light source 22, a polarizing mirrors 23 and 27, a lens 26 and a solid image pickup sensor 28. The table 21 is operated in the X-X and Y-Y directions by pulse motors 24 and 25. The light from the light source 22 is polarized by the mirror 23, transmitted through a microelectrode to be inspected, then magnified and polarized by the lens 26 and the mirror 27, respectively, and detected by the sensor 28. When any flaw is found, a signal is sent to a display device 45 and a printer 46.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10664578A JPS5532386A (en) | 1978-08-30 | 1978-08-30 | Electrode inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10664578A JPS5532386A (en) | 1978-08-30 | 1978-08-30 | Electrode inspecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5532386A true JPS5532386A (en) | 1980-03-07 |
Family
ID=14438851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10664578A Pending JPS5532386A (en) | 1978-08-30 | 1978-08-30 | Electrode inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5532386A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0251562U (en) * | 1988-10-05 | 1990-04-11 | ||
JPH0336654U (en) * | 1989-08-16 | 1991-04-10 |
-
1978
- 1978-08-30 JP JP10664578A patent/JPS5532386A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0251562U (en) * | 1988-10-05 | 1990-04-11 | ||
JPH0336654U (en) * | 1989-08-16 | 1991-04-10 | ||
JPH048913Y2 (en) * | 1989-08-16 | 1992-03-05 |
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