JPS55165631A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS55165631A JPS55165631A JP7371579A JP7371579A JPS55165631A JP S55165631 A JPS55165631 A JP S55165631A JP 7371579 A JP7371579 A JP 7371579A JP 7371579 A JP7371579 A JP 7371579A JP S55165631 A JPS55165631 A JP S55165631A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resist
- electron beam
- quinone
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7371579A JPS588131B2 (ja) | 1979-06-12 | 1979-06-12 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7371579A JPS588131B2 (ja) | 1979-06-12 | 1979-06-12 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55165631A true JPS55165631A (en) | 1980-12-24 |
JPS588131B2 JPS588131B2 (ja) | 1983-02-14 |
Family
ID=13526186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7371579A Expired JPS588131B2 (ja) | 1979-06-12 | 1979-06-12 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS588131B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56164531A (en) * | 1980-05-21 | 1981-12-17 | Hitachi Ltd | Manufacture of semiconductor |
JPS6221102A (ja) * | 1985-07-19 | 1987-01-29 | Matsushita Electric Ind Co Ltd | フレネルレンズの製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4669811A (en) * | 1983-11-17 | 1987-06-02 | Pilkington P.E. Limited | Optical filtering apparatus |
-
1979
- 1979-06-12 JP JP7371579A patent/JPS588131B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56164531A (en) * | 1980-05-21 | 1981-12-17 | Hitachi Ltd | Manufacture of semiconductor |
JPS6221102A (ja) * | 1985-07-19 | 1987-01-29 | Matsushita Electric Ind Co Ltd | フレネルレンズの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS588131B2 (ja) | 1983-02-14 |
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