JPS55144229A - Exposure device - Google Patents
Exposure deviceInfo
- Publication number
- JPS55144229A JPS55144229A JP5279379A JP5279379A JPS55144229A JP S55144229 A JPS55144229 A JP S55144229A JP 5279379 A JP5279379 A JP 5279379A JP 5279379 A JP5279379 A JP 5279379A JP S55144229 A JPS55144229 A JP S55144229A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- expansion member
- support base
- exposure mask
- pressure gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Holders For Sensitive Materials And Originals (AREA)
Abstract
PURPOSE: To enable the even contact of a substrate and exposure mask to be readily obtained by feeding high-pressure gas between the soft expansion member on which the substrate is placed and a support base and letting the expansion member elongate.
CONSTITUTION: A substrate 3 is placed on a support base 1 which is provided with a high-pressure gas feed hole 11 and is freely adjustable within the horizontal and vertical planes, by way of a soft expansion member 2. In this state, an exposure mask 4 which has been formed with the specified electrode patterns in opposition to the substrate 3 is disposed in proximity in the form of being affixed to a mask holding plate 5 and is finely aligned of positions by making fine adjustment of the support base 1. If compressed air is fed between the support base 1 and soft expansion member 2 through the high-pressure gas feed hole 11 of the support table 1, the expansion member 2 is pushed upward, by which the substrate 3 placed thereon is evenly pressure-contacted to the exposure mask 4. In this way, the even contact of the substrate 3 and exposure mask 4 is readily obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5279379A JPS55144229A (en) | 1979-04-27 | 1979-04-27 | Exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5279379A JPS55144229A (en) | 1979-04-27 | 1979-04-27 | Exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55144229A true JPS55144229A (en) | 1980-11-11 |
Family
ID=12924707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5279379A Pending JPS55144229A (en) | 1979-04-27 | 1979-04-27 | Exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55144229A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0420526A2 (en) * | 1989-09-28 | 1991-04-03 | AT&T Corp. | Improved contact printing process |
EP0953878A2 (en) * | 1998-04-28 | 1999-11-03 | Ushiodenki Kabushiki Kaisha | Contact exposure process and device |
-
1979
- 1979-04-27 JP JP5279379A patent/JPS55144229A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0420526A2 (en) * | 1989-09-28 | 1991-04-03 | AT&T Corp. | Improved contact printing process |
EP0953878A2 (en) * | 1998-04-28 | 1999-11-03 | Ushiodenki Kabushiki Kaisha | Contact exposure process and device |
EP0953878A3 (en) * | 1998-04-28 | 2002-06-12 | Ushiodenki Kabushiki Kaisha | Contact exposure process and device |
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