JPS5218176A - Production method of semiconductor device - Google Patents
Production method of semiconductor deviceInfo
- Publication number
- JPS5218176A JPS5218176A JP50093875A JP9387575A JPS5218176A JP S5218176 A JPS5218176 A JP S5218176A JP 50093875 A JP50093875 A JP 50093875A JP 9387575 A JP9387575 A JP 9387575A JP S5218176 A JPS5218176 A JP S5218176A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production method
- mask
- attaching
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: In order to perform the accurate position adjustment with the mask, by means of attaching a microscopic mark on the surface to be treated through using a radiation source.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50093875A JPS5218176A (en) | 1975-08-01 | 1975-08-01 | Production method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50093875A JPS5218176A (en) | 1975-08-01 | 1975-08-01 | Production method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5218176A true JPS5218176A (en) | 1977-02-10 |
Family
ID=14094631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50093875A Pending JPS5218176A (en) | 1975-08-01 | 1975-08-01 | Production method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5218176A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54114183A (en) * | 1978-02-27 | 1979-09-06 | Canon Inc | Position matching method |
JP2009022240A (en) * | 2007-07-23 | 2009-02-05 | Taito:Kk | Animal protection net |
-
1975
- 1975-08-01 JP JP50093875A patent/JPS5218176A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54114183A (en) * | 1978-02-27 | 1979-09-06 | Canon Inc | Position matching method |
JPS6148251B2 (en) * | 1978-02-27 | 1986-10-23 | Canon Kk | |
JP2009022240A (en) * | 2007-07-23 | 2009-02-05 | Taito:Kk | Animal protection net |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51117078A (en) | Magnetic field measuring method | |
JPS51120180A (en) | Pattern printing device | |
JPS51147179A (en) | Method of munufacturing of semiconductor device | |
JPS5211774A (en) | Method of detecting relative position of patterns | |
JPS5218176A (en) | Production method of semiconductor device | |
JPS5416984A (en) | Wafer locating device | |
JPS5219082A (en) | Production method of semiconductor | |
JPS53127266A (en) | Forming method of marker | |
JPS5218173A (en) | Soldering method of semiconductor element | |
JPS51151073A (en) | Method to adjust the position of an mask for an integrated circuit | |
JPS51120178A (en) | Scanning type mask detector | |
JPS5232186A (en) | Spherical surface processing device | |
JPS5219081A (en) | Production method of semiconductor device | |
JPS5348458A (en) | Production of semiconductor device | |
JPS5429978A (en) | Carrier device for semiconductor wafer and mask | |
JPS5264576A (en) | Positioning controller | |
JPS51147180A (en) | Method of manufacturing of semiconductor device | |
JPS51139774A (en) | Liquid phase growing device | |
JPS5315074A (en) | Mask alignment method | |
JPS53142879A (en) | Manufacture for semiconductor device | |
JPS532071A (en) | Manufacture of semiconductor device | |
JPS542663A (en) | Positioning method for mounting semiconductor chip | |
JPS5253667A (en) | Production of semiconductor device | |
JPS539488A (en) | Production of semiconductor device | |
JPS53121468A (en) | Manufacture for semiconductor device |