JPS5487242A - Optical axis display device - Google Patents

Optical axis display device

Info

Publication number
JPS5487242A
JPS5487242A JP15446977A JP15446977A JPS5487242A JP S5487242 A JPS5487242 A JP S5487242A JP 15446977 A JP15446977 A JP 15446977A JP 15446977 A JP15446977 A JP 15446977A JP S5487242 A JPS5487242 A JP S5487242A
Authority
JP
Japan
Prior art keywords
light
image
slit
optical axis
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15446977A
Other languages
Japanese (ja)
Other versions
JPS5716329B2 (en
Inventor
Susumu Aiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15446977A priority Critical patent/JPS5487242A/en
Publication of JPS5487242A publication Critical patent/JPS5487242A/en
Publication of JPS5716329B2 publication Critical patent/JPS5716329B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE: To facilitate and ensure the optical axis adjustment of an illuminating light by measuring the light quantity distribution of a focused image of a cross pattern groove by a microscope thereby to display te center coordinates of the image intensity distribution.
CONSTITUTION: The focused light of such a cross pattern by a mocroscope as is irradiated from a light source 1 having its brightness uniformly distributed by a light quide has its displacement detected by a displacement meter 18 so that it is received by a photoelectric element 17 through a slit 15 which is synchronously reciprocated to a preset extent. Likewise, if the slit 15 is turned by 90 degrees about an optical axis, the image light of the pattern 12 in the two perpendicular directions is scanned. The detected signals corresponding to the irregularity in the brightness of the element 17 are subjected to A/D conversion and stored in a memory 26 so that the are processed by a calculation control circuit 25, which has its plural threshold values preset, in accordance with the detected values of the element 17 upon the illumination of a mirror surface with an identical light source. Then, the coordinates of the center locus MN of an intensity distribution of the image of the pattern 12 are displyed in a monitor 28. As a result, if the monitor 28 is observed to position the locus MN upright, the axis of the illuminating light can be adusted easily and reliably. Like results can be obtained if the slit is replaced by an image sensor.
COPYRIGHT: (C)1979,JPO&Japio
JP15446977A 1977-12-23 1977-12-23 Optical axis display device Granted JPS5487242A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15446977A JPS5487242A (en) 1977-12-23 1977-12-23 Optical axis display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15446977A JPS5487242A (en) 1977-12-23 1977-12-23 Optical axis display device

Publications (2)

Publication Number Publication Date
JPS5487242A true JPS5487242A (en) 1979-07-11
JPS5716329B2 JPS5716329B2 (en) 1982-04-05

Family

ID=15584920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15446977A Granted JPS5487242A (en) 1977-12-23 1977-12-23 Optical axis display device

Country Status (1)

Country Link
JP (1) JPS5487242A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184918A (en) * 1982-04-08 1983-10-28 カ−ル・ツアイス−スチフツング Microscope photometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS445591Y1 (en) * 1964-09-12 1969-02-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS445591Y1 (en) * 1964-09-12 1969-02-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184918A (en) * 1982-04-08 1983-10-28 カ−ル・ツアイス−スチフツング Microscope photometer

Also Published As

Publication number Publication date
JPS5716329B2 (en) 1982-04-05

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