JPS5487242A - Optical axis display device - Google Patents
Optical axis display deviceInfo
- Publication number
- JPS5487242A JPS5487242A JP15446977A JP15446977A JPS5487242A JP S5487242 A JPS5487242 A JP S5487242A JP 15446977 A JP15446977 A JP 15446977A JP 15446977 A JP15446977 A JP 15446977A JP S5487242 A JPS5487242 A JP S5487242A
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- slit
- optical axis
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE: To facilitate and ensure the optical axis adjustment of an illuminating light by measuring the light quantity distribution of a focused image of a cross pattern groove by a microscope thereby to display te center coordinates of the image intensity distribution.
CONSTITUTION: The focused light of such a cross pattern by a mocroscope as is irradiated from a light source 1 having its brightness uniformly distributed by a light quide has its displacement detected by a displacement meter 18 so that it is received by a photoelectric element 17 through a slit 15 which is synchronously reciprocated to a preset extent. Likewise, if the slit 15 is turned by 90 degrees about an optical axis, the image light of the pattern 12 in the two perpendicular directions is scanned. The detected signals corresponding to the irregularity in the brightness of the element 17 are subjected to A/D conversion and stored in a memory 26 so that the are processed by a calculation control circuit 25, which has its plural threshold values preset, in accordance with the detected values of the element 17 upon the illumination of a mirror surface with an identical light source. Then, the coordinates of the center locus MN of an intensity distribution of the image of the pattern 12 are displyed in a monitor 28. As a result, if the monitor 28 is observed to position the locus MN upright, the axis of the illuminating light can be adusted easily and reliably. Like results can be obtained if the slit is replaced by an image sensor.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15446977A JPS5487242A (en) | 1977-12-23 | 1977-12-23 | Optical axis display device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15446977A JPS5487242A (en) | 1977-12-23 | 1977-12-23 | Optical axis display device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5487242A true JPS5487242A (en) | 1979-07-11 |
JPS5716329B2 JPS5716329B2 (en) | 1982-04-05 |
Family
ID=15584920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15446977A Granted JPS5487242A (en) | 1977-12-23 | 1977-12-23 | Optical axis display device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5487242A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58184918A (en) * | 1982-04-08 | 1983-10-28 | カ−ル・ツアイス−スチフツング | Microscope photometer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS445591Y1 (en) * | 1964-09-12 | 1969-02-28 |
-
1977
- 1977-12-23 JP JP15446977A patent/JPS5487242A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS445591Y1 (en) * | 1964-09-12 | 1969-02-28 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58184918A (en) * | 1982-04-08 | 1983-10-28 | カ−ル・ツアイス−スチフツング | Microscope photometer |
Also Published As
Publication number | Publication date |
---|---|
JPS5716329B2 (en) | 1982-04-05 |
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