JPS5456378A - Wafer prober apparatus - Google Patents
Wafer prober apparatusInfo
- Publication number
- JPS5456378A JPS5456378A JP12235477A JP12235477A JPS5456378A JP S5456378 A JPS5456378 A JP S5456378A JP 12235477 A JP12235477 A JP 12235477A JP 12235477 A JP12235477 A JP 12235477A JP S5456378 A JPS5456378 A JP S5456378A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- directions
- start position
- measurement start
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To facilitate the alignment of wafer and probe needles by providing guides consisting of linear parts respectively extending in XY directions to the peripheral edge of a wafer for defining the XY directions of the wafer on the stage and further providing a mechanism of automatically resetting the stage to the measurement start position.
CONSTITUTION: In a stage 2 for placement of a wafer 3 and a wafer prober apparatus which makes contact to the measurement electrodes of the pellet regions of the wafer 3 as the stage 2 ascends relatively with respect to the probe needles 4 provided to said stage 2, a linear X-direction defining guide 17 and a Y-direction defining guide 16 which respectively extend in the XY directions and determine the positions in the X and Y directions are provided to the peripheral edge of the wafer 3 on the stage 2 to determine the positions in the XY directions thereof. Further, a reset switch 10, address display part 13 and measurement start position display part 14, etc. forming the mechanism which makes automatic resetting of the stage 2 to the measurement start position are provided
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12235477A JPS5456378A (en) | 1977-10-14 | 1977-10-14 | Wafer prober apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12235477A JPS5456378A (en) | 1977-10-14 | 1977-10-14 | Wafer prober apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5456378A true JPS5456378A (en) | 1979-05-07 |
Family
ID=14833831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12235477A Pending JPS5456378A (en) | 1977-10-14 | 1977-10-14 | Wafer prober apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5456378A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6232332A (en) * | 1985-08-05 | 1987-02-12 | Toyota Central Res & Dev Lab Inc | Method and device for testing pressure detecting element |
| JPS6370432A (en) * | 1986-09-11 | 1988-03-30 | Tokyo Electron Ltd | Probing apparatus |
| JPS63107038A (en) * | 1981-11-02 | 1988-05-12 | ジヨセフ クバトロニツク | Miniature circuit processing device |
-
1977
- 1977-10-14 JP JP12235477A patent/JPS5456378A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63107038A (en) * | 1981-11-02 | 1988-05-12 | ジヨセフ クバトロニツク | Miniature circuit processing device |
| JPH055377B2 (en) * | 1981-11-02 | 1993-01-22 | Kubatoronitsuku Josefu | |
| JPS6232332A (en) * | 1985-08-05 | 1987-02-12 | Toyota Central Res & Dev Lab Inc | Method and device for testing pressure detecting element |
| JPH0458898B2 (en) * | 1985-08-05 | 1992-09-18 | Toyoda Chuo Kenkyusho Kk | |
| JPS6370432A (en) * | 1986-09-11 | 1988-03-30 | Tokyo Electron Ltd | Probing apparatus |
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