JPS52155065A - Wafer insepaction method - Google Patents

Wafer insepaction method

Info

Publication number
JPS52155065A
JPS52155065A JP7193776A JP7193776A JPS52155065A JP S52155065 A JPS52155065 A JP S52155065A JP 7193776 A JP7193776 A JP 7193776A JP 7193776 A JP7193776 A JP 7193776A JP S52155065 A JPS52155065 A JP S52155065A
Authority
JP
Japan
Prior art keywords
insepaction
wafer
probe groups
measurement
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7193776A
Other languages
Japanese (ja)
Inventor
Akio Horiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7193776A priority Critical patent/JPS52155065A/en
Publication of JPS52155065A publication Critical patent/JPS52155065A/en
Pending legal-status Critical Current

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Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To eliminate personal errors of operators and obtain accurate measurement values by beforehand aligning plural sets of probe groups to the measuring portions of sampling elements, simultaneoulsy pressing the probe groups onto said portions and displaying the results of measurement in a measurement display circuit through multiplexer circuit.
COPYRIGHT: (C)1977,JPO&Japio
JP7193776A 1976-06-18 1976-06-18 Wafer insepaction method Pending JPS52155065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7193776A JPS52155065A (en) 1976-06-18 1976-06-18 Wafer insepaction method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7193776A JPS52155065A (en) 1976-06-18 1976-06-18 Wafer insepaction method

Publications (1)

Publication Number Publication Date
JPS52155065A true JPS52155065A (en) 1977-12-23

Family

ID=13474911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7193776A Pending JPS52155065A (en) 1976-06-18 1976-06-18 Wafer insepaction method

Country Status (1)

Country Link
JP (1) JPS52155065A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118237U (en) * 1984-01-18 1985-08-09 株式会社　東京精密 Marking equipment for semiconductor devices
JPH03235005A (en) * 1990-02-09 1991-10-21 Olympus Optical Co Ltd Scanning tunneling microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118237U (en) * 1984-01-18 1985-08-09 株式会社　東京精密 Marking equipment for semiconductor devices
JPH03235005A (en) * 1990-02-09 1991-10-21 Olympus Optical Co Ltd Scanning tunneling microscope

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