JPS5432985A - Flattening method for substrate surface with protrusion - Google Patents
Flattening method for substrate surface with protrusionInfo
- Publication number
- JPS5432985A JPS5432985A JP9976177A JP9976177A JPS5432985A JP S5432985 A JPS5432985 A JP S5432985A JP 9976177 A JP9976177 A JP 9976177A JP 9976177 A JP9976177 A JP 9976177A JP S5432985 A JPS5432985 A JP S5432985A
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- substrate surface
- flattening method
- ion
- flattening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To flaten a pellet surface by utilizing that an etching speed at the time of ion etching depends upon an ion-beam incident angle.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9976177A JPS5432985A (en) | 1977-08-19 | 1977-08-19 | Flattening method for substrate surface with protrusion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9976177A JPS5432985A (en) | 1977-08-19 | 1977-08-19 | Flattening method for substrate surface with protrusion |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5432985A true JPS5432985A (en) | 1979-03-10 |
Family
ID=14255950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9976177A Pending JPS5432985A (en) | 1977-08-19 | 1977-08-19 | Flattening method for substrate surface with protrusion |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432985A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55143035A (en) * | 1979-04-24 | 1980-11-08 | Nec Corp | Manufacture of pattern |
JPS5750436A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS61289635A (en) * | 1985-06-17 | 1986-12-19 | Nippon Telegr & Teleph Corp <Ntt> | Surface flatterning |
JPS62289252A (en) * | 1986-05-09 | 1987-12-16 | エルンスト−アウグスト、ビ−レフエルト | Scroll chamber separator |
JPH10135320A (en) * | 1996-10-24 | 1998-05-22 | Lg Semicon Co Ltd | Formation of semiconductor element separating layer |
US6952867B2 (en) | 2000-12-26 | 2005-10-11 | Alps Electric Co., Ltd. | Method for manufacturing perpendicular magnetic recording head having inverted trapezoidal main magnetic pole layer |
-
1977
- 1977-08-19 JP JP9976177A patent/JPS5432985A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55143035A (en) * | 1979-04-24 | 1980-11-08 | Nec Corp | Manufacture of pattern |
JPH0121617B2 (en) * | 1979-04-24 | 1989-04-21 | Nippon Electric Co | |
JPS5750436A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0313743B2 (en) * | 1980-09-12 | 1991-02-25 | Fujitsu Ltd | |
JPS61289635A (en) * | 1985-06-17 | 1986-12-19 | Nippon Telegr & Teleph Corp <Ntt> | Surface flatterning |
JPH0551174B2 (en) * | 1985-06-17 | 1993-07-30 | Nippon Telegraph & Telephone | |
JPS62289252A (en) * | 1986-05-09 | 1987-12-16 | エルンスト−アウグスト、ビ−レフエルト | Scroll chamber separator |
JPH0518630B2 (en) * | 1986-05-09 | 1993-03-12 | Erunsuto Augusuto Biirefueruto | |
JPH10135320A (en) * | 1996-10-24 | 1998-05-22 | Lg Semicon Co Ltd | Formation of semiconductor element separating layer |
US6952867B2 (en) | 2000-12-26 | 2005-10-11 | Alps Electric Co., Ltd. | Method for manufacturing perpendicular magnetic recording head having inverted trapezoidal main magnetic pole layer |
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