JPS51140484A - Method of etching wafer - Google Patents
Method of etching waferInfo
- Publication number
- JPS51140484A JPS51140484A JP6429875A JP6429875A JPS51140484A JP S51140484 A JPS51140484 A JP S51140484A JP 6429875 A JP6429875 A JP 6429875A JP 6429875 A JP6429875 A JP 6429875A JP S51140484 A JPS51140484 A JP S51140484A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- etching wafer
- etching
- backetching
- irregularity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To provide a method of backetching convenient wafer which can prevent the wafer from being broken by reducing the irregularity of thickness of the wafer after etching.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6429875A JPS51140484A (en) | 1975-05-30 | 1975-05-30 | Method of etching wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6429875A JPS51140484A (en) | 1975-05-30 | 1975-05-30 | Method of etching wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140484A true JPS51140484A (en) | 1976-12-03 |
Family
ID=13254190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6429875A Pending JPS51140484A (en) | 1975-05-30 | 1975-05-30 | Method of etching wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140484A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54101275A (en) * | 1978-01-27 | 1979-08-09 | Hitachi Ltd | One side masking method for plate material |
-
1975
- 1975-05-30 JP JP6429875A patent/JPS51140484A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54101275A (en) * | 1978-01-27 | 1979-08-09 | Hitachi Ltd | One side masking method for plate material |
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