JPS5426664A - Tool for heat treatment of semiconductor wafer - Google Patents
Tool for heat treatment of semiconductor waferInfo
- Publication number
- JPS5426664A JPS5426664A JP9174477A JP9174477A JPS5426664A JP S5426664 A JPS5426664 A JP S5426664A JP 9174477 A JP9174477 A JP 9174477A JP 9174477 A JP9174477 A JP 9174477A JP S5426664 A JPS5426664 A JP S5426664A
- Authority
- JP
- Japan
- Prior art keywords
- tool
- heat treatment
- semiconductor wafer
- core tube
- air shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9174477A JPS5426664A (en) | 1977-07-29 | 1977-07-29 | Tool for heat treatment of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9174477A JPS5426664A (en) | 1977-07-29 | 1977-07-29 | Tool for heat treatment of semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5426664A true JPS5426664A (en) | 1979-02-28 |
JPS618569B2 JPS618569B2 (ja) | 1986-03-15 |
Family
ID=14035030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9174477A Granted JPS5426664A (en) | 1977-07-29 | 1977-07-29 | Tool for heat treatment of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5426664A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140236A (en) * | 1979-04-18 | 1980-11-01 | Teru Saamuko Kk | Device for heat treating semiconductor |
FR2583779A1 (fr) * | 1985-06-25 | 1986-12-26 | Montaudon Patrick | Dispositif pour reduire l'oxydation d'objets places dans une enceinte de traitement gazeux lorsqu'ils en sont extraits |
JPS63140620U (ja) * | 1987-03-05 | 1988-09-16 | ||
JP2001185600A (ja) * | 1999-12-27 | 2001-07-06 | Japan Steel Works Ltd:The | 加熱基板搬送機構及び搬送方法 |
-
1977
- 1977-07-29 JP JP9174477A patent/JPS5426664A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140236A (en) * | 1979-04-18 | 1980-11-01 | Teru Saamuko Kk | Device for heat treating semiconductor |
JPS5923464B2 (ja) * | 1979-04-18 | 1984-06-02 | テルサ−ムコ株式会社 | 半導体熱処理装置 |
FR2583779A1 (fr) * | 1985-06-25 | 1986-12-26 | Montaudon Patrick | Dispositif pour reduire l'oxydation d'objets places dans une enceinte de traitement gazeux lorsqu'ils en sont extraits |
JPS63140620U (ja) * | 1987-03-05 | 1988-09-16 | ||
JP2001185600A (ja) * | 1999-12-27 | 2001-07-06 | Japan Steel Works Ltd:The | 加熱基板搬送機構及び搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS618569B2 (ja) | 1986-03-15 |
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