JPS5243373A - Jigs for apparatus of producing a semiconductor - Google Patents

Jigs for apparatus of producing a semiconductor

Info

Publication number
JPS5243373A
JPS5243373A JP11909775A JP11909775A JPS5243373A JP S5243373 A JPS5243373 A JP S5243373A JP 11909775 A JP11909775 A JP 11909775A JP 11909775 A JP11909775 A JP 11909775A JP S5243373 A JPS5243373 A JP S5243373A
Authority
JP
Japan
Prior art keywords
jigs
semiconductor
producing
holding
stepwise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11909775A
Other languages
Japanese (ja)
Inventor
Hiroyuki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11909775A priority Critical patent/JPS5243373A/en
Publication of JPS5243373A publication Critical patent/JPS5243373A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide holding jigs having insertion grooves for holding semiconductor substrates and being mutually divided into a plurality and guide devices for stepwise or continuous telescoping of the jigs thereby facilitating replacement among jigs of varying intervals.
COPYRIGHT: (C)1977,JPO&Japio
JP11909775A 1975-10-02 1975-10-02 Jigs for apparatus of producing a semiconductor Pending JPS5243373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11909775A JPS5243373A (en) 1975-10-02 1975-10-02 Jigs for apparatus of producing a semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11909775A JPS5243373A (en) 1975-10-02 1975-10-02 Jigs for apparatus of producing a semiconductor

Publications (1)

Publication Number Publication Date
JPS5243373A true JPS5243373A (en) 1977-04-05

Family

ID=14752818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11909775A Pending JPS5243373A (en) 1975-10-02 1975-10-02 Jigs for apparatus of producing a semiconductor

Country Status (1)

Country Link
JP (1) JPS5243373A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
US4597819A (en) * 1984-02-29 1986-07-01 Tomco Mfg., Ltd. Apparatus for altering pitch in arrangement of wafers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
US4597819A (en) * 1984-02-29 1986-07-01 Tomco Mfg., Ltd. Apparatus for altering pitch in arrangement of wafers

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