JPS5243373A - Jigs for apparatus of producing a semiconductor - Google Patents
Jigs for apparatus of producing a semiconductorInfo
- Publication number
- JPS5243373A JPS5243373A JP11909775A JP11909775A JPS5243373A JP S5243373 A JPS5243373 A JP S5243373A JP 11909775 A JP11909775 A JP 11909775A JP 11909775 A JP11909775 A JP 11909775A JP S5243373 A JPS5243373 A JP S5243373A
- Authority
- JP
- Japan
- Prior art keywords
- jigs
- semiconductor
- producing
- holding
- stepwise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide holding jigs having insertion grooves for holding semiconductor substrates and being mutually divided into a plurality and guide devices for stepwise or continuous telescoping of the jigs thereby facilitating replacement among jigs of varying intervals.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11909775A JPS5243373A (en) | 1975-10-02 | 1975-10-02 | Jigs for apparatus of producing a semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11909775A JPS5243373A (en) | 1975-10-02 | 1975-10-02 | Jigs for apparatus of producing a semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5243373A true JPS5243373A (en) | 1977-04-05 |
Family
ID=14752818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11909775A Pending JPS5243373A (en) | 1975-10-02 | 1975-10-02 | Jigs for apparatus of producing a semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5243373A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
US4597819A (en) * | 1984-02-29 | 1986-07-01 | Tomco Mfg., Ltd. | Apparatus for altering pitch in arrangement of wafers |
-
1975
- 1975-10-02 JP JP11909775A patent/JPS5243373A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
US4597819A (en) * | 1984-02-29 | 1986-07-01 | Tomco Mfg., Ltd. | Apparatus for altering pitch in arrangement of wafers |
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