JPS5425683A - Pressure transmitter of semiconductor - Google Patents
Pressure transmitter of semiconductorInfo
- Publication number
- JPS5425683A JPS5425683A JP9029477A JP9029477A JPS5425683A JP S5425683 A JPS5425683 A JP S5425683A JP 9029477 A JP9029477 A JP 9029477A JP 9029477 A JP9029477 A JP 9029477A JP S5425683 A JPS5425683 A JP S5425683A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- pressure transmitter
- gauges
- minimized
- avoiding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52090294A JPS581550B2 (ja) | 1977-07-29 | 1977-07-29 | 半導体圧力伝送器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52090294A JPS581550B2 (ja) | 1977-07-29 | 1977-07-29 | 半導体圧力伝送器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5425683A true JPS5425683A (en) | 1979-02-26 |
JPS581550B2 JPS581550B2 (ja) | 1983-01-11 |
Family
ID=13994503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52090294A Expired JPS581550B2 (ja) | 1977-07-29 | 1977-07-29 | 半導体圧力伝送器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS581550B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007057284A (ja) * | 2005-08-23 | 2007-03-08 | Ngk Spark Plug Co Ltd | 圧力センサ及び圧力検出装置 |
-
1977
- 1977-07-29 JP JP52090294A patent/JPS581550B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007057284A (ja) * | 2005-08-23 | 2007-03-08 | Ngk Spark Plug Co Ltd | 圧力センサ及び圧力検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS581550B2 (ja) | 1983-01-11 |
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