JPS5286779A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5286779A
JPS5286779A JP280876A JP280876A JPS5286779A JP S5286779 A JPS5286779 A JP S5286779A JP 280876 A JP280876 A JP 280876A JP 280876 A JP280876 A JP 280876A JP S5286779 A JPS5286779 A JP S5286779A
Authority
JP
Japan
Prior art keywords
semiconductor device
aligning
drain
self
extremely small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP280876A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Mitsumasa Koyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP280876A priority Critical patent/JPS5286779A/en
Publication of JPS5286779A publication Critical patent/JPS5286779A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To eliminate mask aligning and make elements extremely small by forming source, drain, gate insulator films and conductor materials through self-aligning by specified procedures.
COPYRIGHT: (C)1977,JPO&Japio
JP280876A 1976-01-14 1976-01-14 Semiconductor device Pending JPS5286779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP280876A JPS5286779A (en) 1976-01-14 1976-01-14 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP280876A JPS5286779A (en) 1976-01-14 1976-01-14 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5286779A true JPS5286779A (en) 1977-07-19

Family

ID=11539674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP280876A Pending JPS5286779A (en) 1976-01-14 1976-01-14 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5286779A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664467A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Mos type semiconductor device
JPS58179A (en) * 1981-06-25 1983-01-05 Seiko Epson Corp Manufacturing method for semiconductor device
JPH07254701A (en) * 1994-03-15 1995-10-03 Nec Corp Semiconductor device and its manufacturing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664467A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Mos type semiconductor device
JPS58179A (en) * 1981-06-25 1983-01-05 Seiko Epson Corp Manufacturing method for semiconductor device
JPH07254701A (en) * 1994-03-15 1995-10-03 Nec Corp Semiconductor device and its manufacturing

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