JPS54156683A - Beam intensity distribution measuring apparatus in electron beam apparatus - Google Patents
Beam intensity distribution measuring apparatus in electron beam apparatusInfo
- Publication number
- JPS54156683A JPS54156683A JP6511478A JP6511478A JPS54156683A JP S54156683 A JPS54156683 A JP S54156683A JP 6511478 A JP6511478 A JP 6511478A JP 6511478 A JP6511478 A JP 6511478A JP S54156683 A JPS54156683 A JP S54156683A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- photo detecting
- detecting surfaces
- electron beam
- intensity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To directly obtain electron beam intensity distributions by using a detector which has stripe form or mesh form photo detecting surfaces.
CONSTITUTION: Stripe form or mesh form photo detecting surfaces are provided to a detector 13. Then, when a forming beam 11 is in the position a, the output of the detector 13 is 0 but when it comes to the position b, the beams incident from the respective photo detecting surfaces of the detector 13 become the signals corresponding to the current distributions. Thses are then inputted to respective amplifiers 14, from where they are sent to registers 18, 19 through an A/D converter 15, beam deflection control circuit 16, gate 17. The contents of a register 21 are subtracted in a subtractor 22 and the difference thereof is stored in a memory 23. Next, the similar operations also take place when the forming beam 11 comes to the position c, thus the current distribution of the forming beams 11 is obtained in the form of being divided to fine mesh form.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6511478A JPS54156683A (en) | 1978-05-31 | 1978-05-31 | Beam intensity distribution measuring apparatus in electron beam apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6511478A JPS54156683A (en) | 1978-05-31 | 1978-05-31 | Beam intensity distribution measuring apparatus in electron beam apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54156683A true JPS54156683A (en) | 1979-12-10 |
Family
ID=13277534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6511478A Pending JPS54156683A (en) | 1978-05-31 | 1978-05-31 | Beam intensity distribution measuring apparatus in electron beam apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54156683A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5116982A (en) * | 1974-06-14 | 1976-02-10 | Cgr Mev |
-
1978
- 1978-05-31 JP JP6511478A patent/JPS54156683A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5116982A (en) * | 1974-06-14 | 1976-02-10 | Cgr Mev |
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