JPS5411678A - Electron ray unit - Google Patents
Electron ray unitInfo
- Publication number
- JPS5411678A JPS5411678A JP7670677A JP7670677A JPS5411678A JP S5411678 A JPS5411678 A JP S5411678A JP 7670677 A JP7670677 A JP 7670677A JP 7670677 A JP7670677 A JP 7670677A JP S5411678 A JPS5411678 A JP S5411678A
- Authority
- JP
- Japan
- Prior art keywords
- electron ray
- ray unit
- test piece
- restrict
- provision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 abstract 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To restrict the position drift on test piece as much as possible, by interrupting beam at any time through the provision of the shielding body between the test piece shift set and the the final stage of the electron optical system.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7670677A JPS5411678A (en) | 1977-06-28 | 1977-06-28 | Electron ray unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7670677A JPS5411678A (en) | 1977-06-28 | 1977-06-28 | Electron ray unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5411678A true JPS5411678A (en) | 1979-01-27 |
Family
ID=13612954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7670677A Pending JPS5411678A (en) | 1977-06-28 | 1977-06-28 | Electron ray unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5411678A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5740700A (en) * | 1980-08-22 | 1982-03-06 | Nippon Electron Optics Lab | Method and device for exposing electron beam |
JPS63150978A (en) * | 1986-12-15 | 1988-06-23 | Omron Tateisi Electronics Co | Piezoelectric displacement element |
-
1977
- 1977-06-28 JP JP7670677A patent/JPS5411678A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5740700A (en) * | 1980-08-22 | 1982-03-06 | Nippon Electron Optics Lab | Method and device for exposing electron beam |
JPS63150978A (en) * | 1986-12-15 | 1988-06-23 | Omron Tateisi Electronics Co | Piezoelectric displacement element |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52119178A (en) | Electron beam exposure device | |
JPS5367318A (en) | Display system | |
JPS52119185A (en) | Electron beam exposure equipment | |
JPS5411678A (en) | Electron ray unit | |
JPS53148284A (en) | Charged particle ray apparatus | |
JPS5322375A (en) | Beam blanking device | |
JPS5423432A (en) | Cathode-ray tube display unit | |
JPS5394889A (en) | Tomograph | |
JPS5390890A (en) | Semiconductor laser device | |
JPS53105316A (en) | Pick up unit | |
JPS5388516A (en) | Deflection yoke | |
JPS52144267A (en) | Color selection mechanism assembly for color cathode-ray tube | |
JPS5396679A (en) | Electron-beam drawing equipment | |
JPS5413735A (en) | Projection type picture tube | |
JPS53140963A (en) | Scanning electronic microscope | |
JPS53120277A (en) | Electron beam exposure device | |
JPS5284397A (en) | Electron accelerating system | |
JPS5434172A (en) | Electromagnetic-shielding dust-proof constant-temperature chamber | |
JPS5397366A (en) | Electron beam focusing device | |
JPS53137194A (en) | Radioactive ray detector | |
JPS5271972A (en) | Acceleration tube | |
JPS51151179A (en) | Charge corpuscular ray analyser | |
JPS53101279A (en) | Electron beam exposure device | |
JPS5313384A (en) | X-ray tomogram image pickup unit | |
JPS5360162A (en) | Electron beam irradiation device |