JPS5411678A - Electron ray unit - Google Patents

Electron ray unit

Info

Publication number
JPS5411678A
JPS5411678A JP7670677A JP7670677A JPS5411678A JP S5411678 A JPS5411678 A JP S5411678A JP 7670677 A JP7670677 A JP 7670677A JP 7670677 A JP7670677 A JP 7670677A JP S5411678 A JPS5411678 A JP S5411678A
Authority
JP
Japan
Prior art keywords
electron ray
ray unit
test piece
restrict
provision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7670677A
Other languages
Japanese (ja)
Inventor
Korehito Matsuda
Akihira Fujinami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7670677A priority Critical patent/JPS5411678A/en
Publication of JPS5411678A publication Critical patent/JPS5411678A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To restrict the position drift on test piece as much as possible, by interrupting beam at any time through the provision of the shielding body between the test piece shift set and the the final stage of the electron optical system.
COPYRIGHT: (C)1979,JPO&Japio
JP7670677A 1977-06-28 1977-06-28 Electron ray unit Pending JPS5411678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7670677A JPS5411678A (en) 1977-06-28 1977-06-28 Electron ray unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7670677A JPS5411678A (en) 1977-06-28 1977-06-28 Electron ray unit

Publications (1)

Publication Number Publication Date
JPS5411678A true JPS5411678A (en) 1979-01-27

Family

ID=13612954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7670677A Pending JPS5411678A (en) 1977-06-28 1977-06-28 Electron ray unit

Country Status (1)

Country Link
JP (1) JPS5411678A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740700A (en) * 1980-08-22 1982-03-06 Nippon Electron Optics Lab Method and device for exposing electron beam
JPS63150978A (en) * 1986-12-15 1988-06-23 Omron Tateisi Electronics Co Piezoelectric displacement element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740700A (en) * 1980-08-22 1982-03-06 Nippon Electron Optics Lab Method and device for exposing electron beam
JPS63150978A (en) * 1986-12-15 1988-06-23 Omron Tateisi Electronics Co Piezoelectric displacement element

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