JPS54156660A - Reference mark detecting method - Google Patents
Reference mark detecting methodInfo
- Publication number
- JPS54156660A JPS54156660A JP6509278A JP6509278A JPS54156660A JP S54156660 A JPS54156660 A JP S54156660A JP 6509278 A JP6509278 A JP 6509278A JP 6509278 A JP6509278 A JP 6509278A JP S54156660 A JPS54156660 A JP S54156660A
- Authority
- JP
- Japan
- Prior art keywords
- reference mark
- wafer
- information patterns
- disposing
- match
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make position alignment of reference marks faster by disposing the specific information patterns near the reference marks.
CONSTITUTION: A reference mark 2 as well as information patterns 5 indicating the existing direction of the reference mark 2 are formed on a wafer 1. As a result, it is displayed that the reference mark 4 on a metal mask 3 and the reference mark 2 match if the wafer is 1 moved in which direction. The wafer 1 is moved in the arrow A direction and where the reference mark 4 and reference mark 2 match, the wafer is slightly rotated in the counterclockwise direction or other, by which both reference marks 2, 4 are aligned of positions, thus position alignment is accomplished in a short time. It is also effective to disposing Arabic numbers around the reference mark 2 as the information patterns 5 and display the distance from and direction of the reference mark 2 from said numbers.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6509278A JPS54156660A (en) | 1978-05-31 | 1978-05-31 | Reference mark detecting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6509278A JPS54156660A (en) | 1978-05-31 | 1978-05-31 | Reference mark detecting method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54156660A true JPS54156660A (en) | 1979-12-10 |
Family
ID=13276929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6509278A Pending JPS54156660A (en) | 1978-05-31 | 1978-05-31 | Reference mark detecting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54156660A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01191005A (en) * | 1988-01-27 | 1989-08-01 | Canon Inc | Mark detecting device |
-
1978
- 1978-05-31 JP JP6509278A patent/JPS54156660A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01191005A (en) * | 1988-01-27 | 1989-08-01 | Canon Inc | Mark detecting device |
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