JPS54156660A - Reference mark detecting method - Google Patents

Reference mark detecting method

Info

Publication number
JPS54156660A
JPS54156660A JP6509278A JP6509278A JPS54156660A JP S54156660 A JPS54156660 A JP S54156660A JP 6509278 A JP6509278 A JP 6509278A JP 6509278 A JP6509278 A JP 6509278A JP S54156660 A JPS54156660 A JP S54156660A
Authority
JP
Japan
Prior art keywords
reference mark
wafer
information patterns
disposing
match
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6509278A
Other languages
Japanese (ja)
Inventor
Mikio Segawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6509278A priority Critical patent/JPS54156660A/en
Publication of JPS54156660A publication Critical patent/JPS54156660A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make position alignment of reference marks faster by disposing the specific information patterns near the reference marks.
CONSTITUTION: A reference mark 2 as well as information patterns 5 indicating the existing direction of the reference mark 2 are formed on a wafer 1. As a result, it is displayed that the reference mark 4 on a metal mask 3 and the reference mark 2 match if the wafer is 1 moved in which direction. The wafer 1 is moved in the arrow A direction and where the reference mark 4 and reference mark 2 match, the wafer is slightly rotated in the counterclockwise direction or other, by which both reference marks 2, 4 are aligned of positions, thus position alignment is accomplished in a short time. It is also effective to disposing Arabic numbers around the reference mark 2 as the information patterns 5 and display the distance from and direction of the reference mark 2 from said numbers.
COPYRIGHT: (C)1979,JPO&Japio
JP6509278A 1978-05-31 1978-05-31 Reference mark detecting method Pending JPS54156660A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6509278A JPS54156660A (en) 1978-05-31 1978-05-31 Reference mark detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6509278A JPS54156660A (en) 1978-05-31 1978-05-31 Reference mark detecting method

Publications (1)

Publication Number Publication Date
JPS54156660A true JPS54156660A (en) 1979-12-10

Family

ID=13276929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6509278A Pending JPS54156660A (en) 1978-05-31 1978-05-31 Reference mark detecting method

Country Status (1)

Country Link
JP (1) JPS54156660A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01191005A (en) * 1988-01-27 1989-08-01 Canon Inc Mark detecting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01191005A (en) * 1988-01-27 1989-08-01 Canon Inc Mark detecting device

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