JPS54150161A - Two dimensional micro-displacement detector - Google Patents

Two dimensional micro-displacement detector

Info

Publication number
JPS54150161A
JPS54150161A JP5760078A JP5760078A JPS54150161A JP S54150161 A JPS54150161 A JP S54150161A JP 5760078 A JP5760078 A JP 5760078A JP 5760078 A JP5760078 A JP 5760078A JP S54150161 A JPS54150161 A JP S54150161A
Authority
JP
Japan
Prior art keywords
pedestal
parallel
piece
directions
contactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5760078A
Other languages
Japanese (ja)
Other versions
JPS5718561B2 (en
Inventor
Nobuhiro Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5760078A priority Critical patent/JPS54150161A/en
Publication of JPS54150161A publication Critical patent/JPS54150161A/en
Publication of JPS5718561B2 publication Critical patent/JPS5718561B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE: To improve accuracy and reliability by using the two directional parallel springs formed from one piece of metal material.
CONSTITUTION: One piece of metal piece is subjected to slicing, electric discharge wire cutting or other to form the two dirctional parallel springs provided with an upper pedestal 13, lower pedestal 14, parallel plates 15, 16, raised parts 17, 18, 23, movable pedestal 20 and parallel plates 21, 22. A contactor 24 is penetrated through the parallel plate 15 and movable pedestal 20 thereof and its root end is so fixed to the raised part 23 that the intersecting point 0 becomes a point of application of force. In addition, X-, Y-axis differential transformers 25, 27 are fixed between the raised parts 17 and 18 as well as between the upper pedestal 13 and movable pedestal 20. Then, if the contactor 24 displaces in the X- and Y-axis directions respectively, the cores 25b, 27b of the X-, Y-axis differential transformers 25, 27 displace with respect to bobbins 25a, 27a and the induced voltages proportional to the displacements are distinctly discriminated in the two directions and are generated without mutual interference, thus the directions and magnitude of the displacements are detected with high accuracy and good reliability.
COPYRIGHT: (C)1979,JPO&Japio
JP5760078A 1978-05-17 1978-05-17 Two dimensional micro-displacement detector Granted JPS54150161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5760078A JPS54150161A (en) 1978-05-17 1978-05-17 Two dimensional micro-displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5760078A JPS54150161A (en) 1978-05-17 1978-05-17 Two dimensional micro-displacement detector

Publications (2)

Publication Number Publication Date
JPS54150161A true JPS54150161A (en) 1979-11-26
JPS5718561B2 JPS5718561B2 (en) 1982-04-17

Family

ID=13060336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5760078A Granted JPS54150161A (en) 1978-05-17 1978-05-17 Two dimensional micro-displacement detector

Country Status (1)

Country Link
JP (1) JPS54150161A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553332A (en) * 1982-10-18 1985-11-19 Finike Italiana Marposs S.P.A. Probe for checking linear dimensions
US4559717A (en) * 1984-02-21 1985-12-24 The United States Of America As Represented By The Secretary Of Commerce Flexure hinge
US4575947A (en) * 1983-03-30 1986-03-18 Wyler Ag Measuring arm for a multiple coordinate measuring machine
US5187876A (en) * 1989-08-04 1993-02-23 Hatheway Alson E Precision motion transducer
WO2007032026A3 (en) * 2005-09-14 2007-06-07 Hilaal Alam An apparatus for moving an object in nanometer and method thereof
JP2012211879A (en) * 2011-03-31 2012-11-01 Tokyo Seimitsu Co Ltd Touch probe
JP5736095B1 (en) * 2015-02-25 2015-06-17 株式会社東京精密 Touch probe
JPWO2015133113A1 (en) * 2014-03-03 2017-04-06 国立大学法人 香川大学 Tactile sensor and evaluation method of touch feeling

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553332A (en) * 1982-10-18 1985-11-19 Finike Italiana Marposs S.P.A. Probe for checking linear dimensions
US4575947A (en) * 1983-03-30 1986-03-18 Wyler Ag Measuring arm for a multiple coordinate measuring machine
US4559717A (en) * 1984-02-21 1985-12-24 The United States Of America As Represented By The Secretary Of Commerce Flexure hinge
US5187876A (en) * 1989-08-04 1993-02-23 Hatheway Alson E Precision motion transducer
WO2007032026A3 (en) * 2005-09-14 2007-06-07 Hilaal Alam An apparatus for moving an object in nanometer and method thereof
JP2012211879A (en) * 2011-03-31 2012-11-01 Tokyo Seimitsu Co Ltd Touch probe
JPWO2015133113A1 (en) * 2014-03-03 2017-04-06 国立大学法人 香川大学 Tactile sensor and evaluation method of touch feeling
US10190927B2 (en) 2014-03-03 2019-01-29 National University Corporation Kagawa University Tactile sensor and method for evaluating touch feeling
JP5736095B1 (en) * 2015-02-25 2015-06-17 株式会社東京精密 Touch probe

Also Published As

Publication number Publication date
JPS5718561B2 (en) 1982-04-17

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