JPS54150161A - Two dimensional micro-displacement detector - Google Patents
Two dimensional micro-displacement detectorInfo
- Publication number
- JPS54150161A JPS54150161A JP5760078A JP5760078A JPS54150161A JP S54150161 A JPS54150161 A JP S54150161A JP 5760078 A JP5760078 A JP 5760078A JP 5760078 A JP5760078 A JP 5760078A JP S54150161 A JPS54150161 A JP S54150161A
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- parallel
- piece
- directions
- contactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE: To improve accuracy and reliability by using the two directional parallel springs formed from one piece of metal material.
CONSTITUTION: One piece of metal piece is subjected to slicing, electric discharge wire cutting or other to form the two dirctional parallel springs provided with an upper pedestal 13, lower pedestal 14, parallel plates 15, 16, raised parts 17, 18, 23, movable pedestal 20 and parallel plates 21, 22. A contactor 24 is penetrated through the parallel plate 15 and movable pedestal 20 thereof and its root end is so fixed to the raised part 23 that the intersecting point 0 becomes a point of application of force. In addition, X-, Y-axis differential transformers 25, 27 are fixed between the raised parts 17 and 18 as well as between the upper pedestal 13 and movable pedestal 20. Then, if the contactor 24 displaces in the X- and Y-axis directions respectively, the cores 25b, 27b of the X-, Y-axis differential transformers 25, 27 displace with respect to bobbins 25a, 27a and the induced voltages proportional to the displacements are distinctly discriminated in the two directions and are generated without mutual interference, thus the directions and magnitude of the displacements are detected with high accuracy and good reliability.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5760078A JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5760078A JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54150161A true JPS54150161A (en) | 1979-11-26 |
JPS5718561B2 JPS5718561B2 (en) | 1982-04-17 |
Family
ID=13060336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5760078A Granted JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54150161A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4553332A (en) * | 1982-10-18 | 1985-11-19 | Finike Italiana Marposs S.P.A. | Probe for checking linear dimensions |
US4559717A (en) * | 1984-02-21 | 1985-12-24 | The United States Of America As Represented By The Secretary Of Commerce | Flexure hinge |
US4575947A (en) * | 1983-03-30 | 1986-03-18 | Wyler Ag | Measuring arm for a multiple coordinate measuring machine |
US5187876A (en) * | 1989-08-04 | 1993-02-23 | Hatheway Alson E | Precision motion transducer |
WO2007032026A3 (en) * | 2005-09-14 | 2007-06-07 | Hilaal Alam | An apparatus for moving an object in nanometer and method thereof |
JP2012211879A (en) * | 2011-03-31 | 2012-11-01 | Tokyo Seimitsu Co Ltd | Touch probe |
JP5736095B1 (en) * | 2015-02-25 | 2015-06-17 | 株式会社東京精密 | Touch probe |
JPWO2015133113A1 (en) * | 2014-03-03 | 2017-04-06 | 国立大学法人 香川大学 | Tactile sensor and evaluation method of touch feeling |
-
1978
- 1978-05-17 JP JP5760078A patent/JPS54150161A/en active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4553332A (en) * | 1982-10-18 | 1985-11-19 | Finike Italiana Marposs S.P.A. | Probe for checking linear dimensions |
US4575947A (en) * | 1983-03-30 | 1986-03-18 | Wyler Ag | Measuring arm for a multiple coordinate measuring machine |
US4559717A (en) * | 1984-02-21 | 1985-12-24 | The United States Of America As Represented By The Secretary Of Commerce | Flexure hinge |
US5187876A (en) * | 1989-08-04 | 1993-02-23 | Hatheway Alson E | Precision motion transducer |
WO2007032026A3 (en) * | 2005-09-14 | 2007-06-07 | Hilaal Alam | An apparatus for moving an object in nanometer and method thereof |
JP2012211879A (en) * | 2011-03-31 | 2012-11-01 | Tokyo Seimitsu Co Ltd | Touch probe |
JPWO2015133113A1 (en) * | 2014-03-03 | 2017-04-06 | 国立大学法人 香川大学 | Tactile sensor and evaluation method of touch feeling |
US10190927B2 (en) | 2014-03-03 | 2019-01-29 | National University Corporation Kagawa University | Tactile sensor and method for evaluating touch feeling |
JP5736095B1 (en) * | 2015-02-25 | 2015-06-17 | 株式会社東京精密 | Touch probe |
Also Published As
Publication number | Publication date |
---|---|
JPS5718561B2 (en) | 1982-04-17 |
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