JPS54150161A - Two dimensional micro-displacement detector - Google Patents

Two dimensional micro-displacement detector

Info

Publication number
JPS54150161A
JPS54150161A JP5760078A JP5760078A JPS54150161A JP S54150161 A JPS54150161 A JP S54150161A JP 5760078 A JP5760078 A JP 5760078A JP 5760078 A JP5760078 A JP 5760078A JP S54150161 A JPS54150161 A JP S54150161A
Authority
JP
Japan
Prior art keywords
pedestal
parallel
piece
directions
contactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5760078A
Other languages
English (en)
Other versions
JPS5718561B2 (ja
Inventor
Nobuhiro Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5760078A priority Critical patent/JPS54150161A/ja
Publication of JPS54150161A publication Critical patent/JPS54150161A/ja
Publication of JPS5718561B2 publication Critical patent/JPS5718561B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP5760078A 1978-05-17 1978-05-17 Two dimensional micro-displacement detector Granted JPS54150161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5760078A JPS54150161A (en) 1978-05-17 1978-05-17 Two dimensional micro-displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5760078A JPS54150161A (en) 1978-05-17 1978-05-17 Two dimensional micro-displacement detector

Publications (2)

Publication Number Publication Date
JPS54150161A true JPS54150161A (en) 1979-11-26
JPS5718561B2 JPS5718561B2 (ja) 1982-04-17

Family

ID=13060336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5760078A Granted JPS54150161A (en) 1978-05-17 1978-05-17 Two dimensional micro-displacement detector

Country Status (1)

Country Link
JP (1) JPS54150161A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553332A (en) * 1982-10-18 1985-11-19 Finike Italiana Marposs S.P.A. Probe for checking linear dimensions
US4559717A (en) * 1984-02-21 1985-12-24 The United States Of America As Represented By The Secretary Of Commerce Flexure hinge
US4575947A (en) * 1983-03-30 1986-03-18 Wyler Ag Measuring arm for a multiple coordinate measuring machine
US5187876A (en) * 1989-08-04 1993-02-23 Hatheway Alson E Precision motion transducer
WO2007032026A3 (en) * 2005-09-14 2007-06-07 Hilaal Alam An apparatus for moving an object in nanometer and method thereof
JP2012211879A (ja) * 2011-03-31 2012-11-01 Tokyo Seimitsu Co Ltd タッチプローブ
JP5736095B1 (ja) * 2015-02-25 2015-06-17 株式会社東京精密 タッチプローブ
JPWO2015133113A1 (ja) * 2014-03-03 2017-04-06 国立大学法人 香川大学 触覚センサおよび手触り感の評価方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553332A (en) * 1982-10-18 1985-11-19 Finike Italiana Marposs S.P.A. Probe for checking linear dimensions
US4575947A (en) * 1983-03-30 1986-03-18 Wyler Ag Measuring arm for a multiple coordinate measuring machine
US4559717A (en) * 1984-02-21 1985-12-24 The United States Of America As Represented By The Secretary Of Commerce Flexure hinge
US5187876A (en) * 1989-08-04 1993-02-23 Hatheway Alson E Precision motion transducer
WO2007032026A3 (en) * 2005-09-14 2007-06-07 Hilaal Alam An apparatus for moving an object in nanometer and method thereof
JP2012211879A (ja) * 2011-03-31 2012-11-01 Tokyo Seimitsu Co Ltd タッチプローブ
JPWO2015133113A1 (ja) * 2014-03-03 2017-04-06 国立大学法人 香川大学 触覚センサおよび手触り感の評価方法
US10190927B2 (en) 2014-03-03 2019-01-29 National University Corporation Kagawa University Tactile sensor and method for evaluating touch feeling
JP5736095B1 (ja) * 2015-02-25 2015-06-17 株式会社東京精密 タッチプローブ

Also Published As

Publication number Publication date
JPS5718561B2 (ja) 1982-04-17

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