JPS54150161A - Two dimensional micro-displacement detector - Google Patents
Two dimensional micro-displacement detectorInfo
- Publication number
- JPS54150161A JPS54150161A JP5760078A JP5760078A JPS54150161A JP S54150161 A JPS54150161 A JP S54150161A JP 5760078 A JP5760078 A JP 5760078A JP 5760078 A JP5760078 A JP 5760078A JP S54150161 A JPS54150161 A JP S54150161A
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- parallel
- piece
- directions
- contactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5760078A JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5760078A JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54150161A true JPS54150161A (en) | 1979-11-26 |
JPS5718561B2 JPS5718561B2 (ja) | 1982-04-17 |
Family
ID=13060336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5760078A Granted JPS54150161A (en) | 1978-05-17 | 1978-05-17 | Two dimensional micro-displacement detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54150161A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4553332A (en) * | 1982-10-18 | 1985-11-19 | Finike Italiana Marposs S.P.A. | Probe for checking linear dimensions |
US4559717A (en) * | 1984-02-21 | 1985-12-24 | The United States Of America As Represented By The Secretary Of Commerce | Flexure hinge |
US4575947A (en) * | 1983-03-30 | 1986-03-18 | Wyler Ag | Measuring arm for a multiple coordinate measuring machine |
US5187876A (en) * | 1989-08-04 | 1993-02-23 | Hatheway Alson E | Precision motion transducer |
WO2007032026A3 (en) * | 2005-09-14 | 2007-06-07 | Hilaal Alam | An apparatus for moving an object in nanometer and method thereof |
JP2012211879A (ja) * | 2011-03-31 | 2012-11-01 | Tokyo Seimitsu Co Ltd | タッチプローブ |
JP5736095B1 (ja) * | 2015-02-25 | 2015-06-17 | 株式会社東京精密 | タッチプローブ |
JPWO2015133113A1 (ja) * | 2014-03-03 | 2017-04-06 | 国立大学法人 香川大学 | 触覚センサおよび手触り感の評価方法 |
-
1978
- 1978-05-17 JP JP5760078A patent/JPS54150161A/ja active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4553332A (en) * | 1982-10-18 | 1985-11-19 | Finike Italiana Marposs S.P.A. | Probe for checking linear dimensions |
US4575947A (en) * | 1983-03-30 | 1986-03-18 | Wyler Ag | Measuring arm for a multiple coordinate measuring machine |
US4559717A (en) * | 1984-02-21 | 1985-12-24 | The United States Of America As Represented By The Secretary Of Commerce | Flexure hinge |
US5187876A (en) * | 1989-08-04 | 1993-02-23 | Hatheway Alson E | Precision motion transducer |
WO2007032026A3 (en) * | 2005-09-14 | 2007-06-07 | Hilaal Alam | An apparatus for moving an object in nanometer and method thereof |
JP2012211879A (ja) * | 2011-03-31 | 2012-11-01 | Tokyo Seimitsu Co Ltd | タッチプローブ |
JPWO2015133113A1 (ja) * | 2014-03-03 | 2017-04-06 | 国立大学法人 香川大学 | 触覚センサおよび手触り感の評価方法 |
US10190927B2 (en) | 2014-03-03 | 2019-01-29 | National University Corporation Kagawa University | Tactile sensor and method for evaluating touch feeling |
JP5736095B1 (ja) * | 2015-02-25 | 2015-06-17 | 株式会社東京精密 | タッチプローブ |
Also Published As
Publication number | Publication date |
---|---|
JPS5718561B2 (ja) | 1982-04-17 |
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